公开(公告)号：US10361068B2

公开(公告)日：2019-07-23

申请号：US15707346

申请日：2017-09-18

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  Sriram Viswanathan ,  Christina Hutchinson

IPC: H01L21/312 ,  B44C1/22 ,  G11B5/31 ,  H01J37/32 ,  G11B5/00

Abstract: A method of forming a feature in a void, the method including filling the void having at least one sloped wall with a polymeric material; forming a layer of photoresist over the polymeric material; forming a gap in the layer of photoresist; and etching the polymeric material exposed by the gap in the layer of photoresist to form a feature.

公开(公告)号：US20180114674A1

公开(公告)日：2018-04-26

申请号：US15707346

申请日：2017-09-18

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  Sriram Viswanathan ,  Christina Hutchinson

IPC: H01J37/32 ,  G11B5/31 ,  G11B5/00

CPC classification number: H01J37/32009 ,  G11B5/3116 ,  G11B5/3163 ,  G11B2005/0021 ,  H01J2237/332 ,  H01J2237/334

Abstract: A method of forming a feature in a void, the method including filling the void having at least one sloped wall with a polymeric material; forming a layer of photoresist over the polymeric material; forming a gap in the layer of photoresist; and etching the polymeric material exposed by the gap in the layer of photoresist to form a feature.

公开(公告)号：US10186283B2

公开(公告)日：2019-01-22

申请号：US14938264

申请日：2015-11-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  YongJun Zhao ,  David Michael Grundman

IPC: H01L21/311 ,  G11B5/31 ,  G11B5/00

Abstract: A method of forming a peg of a NFT, the peg having a tapered portion, the method including depositing a layer of dielectric material; forming a three dimensional shape from at least a portion of the dielectric material the three dimensional shape having two side surfaces and two end surfaces; and depositing plasmonic material on at least one side surface of the three dimensional shape of dielectric material, wherein the plasmonic material deposited on the at least one side surface forms the tapered portion of the peg.

公开(公告)号：US09767989B2

公开(公告)日：2017-09-19

申请号：US14938026

申请日：2015-11-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  Sriram Viswanathan ,  Christina Hutchinson

IPC: H01L21/312 ,  B44C1/22 ,  H01J37/32 ,  G11B5/31 ,  G11B5/00

CPC classification number: H01J37/32009 ,  G11B5/3116 ,  G11B5/3163 ,  G11B2005/0021 ,  H01J2237/332 ,  H01J2237/334

Abstract: A method of forming a feature in a void, the method including filling the void having at least one sloped wall with a polymeric material; forming a layer of photoresist over the polymeric material; forming a gap in the layer of photoresist; and etching the polymeric material exposed by the gap in the layer of photoresist to form a feature.

公开(公告)号：US20160133440A1

公开(公告)日：2016-05-12

申请号：US14938026

申请日：2015-11-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  Sriram Viswanathan ,  Christina Hutchinson

IPC: H01J37/32

CPC classification number: H01J37/32009 ,  G11B5/3116 ,  G11B5/3163 ,  G11B2005/0021 ,  H01J2237/332 ,  H01J2237/334

Abstract: A method of forming a feature in a void, the method including filling the void having at least one sloped wall with a polymeric material; forming a layer of photoresist over the polymeric material; forming a gap in the layer of photoresist; and etching the polymeric material exposed by the gap in the layer of photoresist to form a feature.

Abstract translation: 一种在空隙中形成特征的方法，所述方法包括用聚合材料填充具有至少一个倾斜壁的空隙; 在聚合物材料上形成一层光致抗蚀剂; 在光致抗蚀剂层中形成间隙; 并蚀刻由光致抗蚀剂层中的间隙暴露的聚合物材料以形成特征。

公开(公告)号：US20160133275A1

公开(公告)日：2016-05-12

申请号：US14938264

申请日：2015-11-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sridhar Dubbaka ,  YongJun Zhao ,  David Michael Grundman

IPC: G11B5/127

CPC classification number: G11B5/314 ,  G11B2005/0021

Abstract: A method of forming a peg of a NFT, the peg having a tapered portion, the method including depositing a layer of dielectric material; forming a three dimensional shape from at least a portion of the dielectric material the three dimensional shape having two side surfaces and two end surfaces; and depositing plasmonic material on at least one side surface of the three dimensional shape of dielectric material, wherein the plasmonic material deposited on the at least one side surface forms the tapered portion of the peg.

Abstract translation: 一种形成NFT的钉的方法，所述钉具有锥形部分，所述方法包括沉积介电材料层; 从电介质材料的至少一部分形成具有两个侧面和两个端面的三维形状的三维形状; 以及将等离子体激元材料沉积在介电材料的三维形状的至少一个侧表面上，其中沉积在所述至少一个侧表面上的等离子体激元材料形成所述钉的锥形部分。