公开(公告)号：US11527423B2

公开(公告)日：2022-12-13

申请号：US17501569

申请日：2021-10-14

Applicant: SEMES CO., LTD.

Inventor： Tae Hyun Park ,  Jae Young Jang ,  Kook Bong Lee

IPC: B41J2/045 ,  H01L21/67 ,  B41J11/46 ,  B41J11/00

Abstract: A method for setting a substrate processing apparatus having a head for dispensing ink includes aligning a position of at least one vision unit, by moving the vision unit above a reference mark and taking, by the vision unit, an image of the reference mark, in which the vision unit takes an image of a substrate, and the reference mark is made on the substrate processing apparatus and fixed in one position, and aligning at least one of a movement axis of the vision unit, a position of the substrate, or a movement axis of the substrate, by moving the vision unit or the substrate in a state in which the substrate having alignment marks made thereon is located under the vision unit and taking, by the vision unit, an image of the alignment marks.

公开(公告)号：US11518169B2

公开(公告)日：2022-12-06

申请号：US17237175

申请日：2021-04-22

Applicant: SEMES CO., LTD.

Inventor： In Seok Ha ,  Jin Hyuck Yang ,  Jae Young Jang

IPC: B41J2/145

Abstract: Provided are a load distribution apparatus capable of efficiently distributing loads for a plurality of inkjet head modules and a substrate treatment system including the same. The load distribution apparatus includes a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module for discharging droplets onto a substrate is installed in the central portion, a first support supporting the second support on at least one side and supporting the second support below the second support, a first support unit supporting the second support on at least one side and supporting the second support above the second support, and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.

公开(公告)号：US20210331466A1

公开(公告)日：2021-10-28

申请号：US17237175

申请日：2021-04-22

Applicant: SEMES CO., LTD.

Inventor： In Seok Ha ,  Jin Hyuck Yang ,  Jae Young Jang

IPC: B41J2/145

Abstract: Provided are a load distribution apparatus capable of efficiently distributing loads for a plurality of inkjet head modules and a substrate treatment system including the same. The load distribution apparatus includes a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module for discharging droplets onto a substrate is installed in the central portion, a first support supporting the second support on at least one side and supporting the second support below the second support, a first support unit supporting the second support on at least one side and supporting the second support above the second support, and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.