CAPACITIVE MICRO-ELECTRO-MECHANICAL FORCE SENSOR AND CORRESPONDING FORCE SENSING METHOD
    1.
    发明申请
    CAPACITIVE MICRO-ELECTRO-MECHANICAL FORCE SENSOR AND CORRESPONDING FORCE SENSING METHOD 有权
    电容式微机电力传感器及相应的力传感方法

    公开(公告)号:US20150135860A1

    公开(公告)日:2015-05-21

    申请号:US14539640

    申请日:2014-11-12

    CPC classification number: G01L1/142 G01L1/148

    Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.

    Abstract translation: MEMS力传感器具有:基板; 耦合到所述衬底的固定电极; 以及在所述固定电极处悬置在所述基板上方的移动电极,以限定感测电容器,所述移动电极被设计为由于施加要检测的力而发生变形。 在静止状态下,介电材料区域设置在固定电极上并与气动间隙隔开间隔开。 通过施加力的最小可检测值,移动电极承受电介质材料区域,使得当力增加时,移动电极和电介质材料区域之间的接触表面尤其以基本线性的方式增加 。

    Capacitive micro-electro-mechanical force sensor and corresponding force sensing method

    公开(公告)号:US10024738B2

    公开(公告)日:2018-07-17

    申请号:US14539640

    申请日:2014-11-12

    Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.

    MICROFLUIDIC DIE WITH MULTIPLE HEATERS IN A CHAMBER
    3.
    发明申请
    MICROFLUIDIC DIE WITH MULTIPLE HEATERS IN A CHAMBER 有权
    微波炉与多个加热器在室内

    公开(公告)号:US20150367641A1

    公开(公告)日:2015-12-24

    申请号:US14310898

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

    Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。

    Microfluidic die with multiple heaters in a chamber
    6.
    发明授权
    Microfluidic die with multiple heaters in a chamber 有权
    具有多个加热器的微流体模具在腔室中

    公开(公告)号:US09561650B2

    公开(公告)日:2017-02-07

    申请号:US14976445

    申请日:2015-12-21

    Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

    Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。

    Microfluidic die with a high ratio of heater area to nozzle exit area
    7.
    发明授权
    Microfluidic die with a high ratio of heater area to nozzle exit area 有权
    微流体模具具有高比例的加热器面积与喷嘴出口面积

    公开(公告)号:US09174445B1

    公开(公告)日:2015-11-03

    申请号:US14310633

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die having a substrate with an inlet path that is configured to move fluid into the die. The die includes a plurality of heaters formed above the substrate, each heater having a first area, a plurality of chambers formed above the plurality of heaters, and a plurality of nozzles formed above the chambers. Each nozzle having an entrance adjacent to the chamber and an exit adjacent to en external environment, the entrance having a second area, and the second having a third area, the first area being greater than the second area, and the second area being greater than the third area. A ratio of the first area to the third area being greater than 5 to 1.

    Abstract translation: 本公开针对具有基底的微流体模具,该基底具有入口路径,该入口路径被配置为将流体移动到模具中。 模具包括形成在基板上方的多个加热器,每个加热器具有第一区域,形成在多个加热器上方的多个室以及形成在室上方的多个喷嘴。 每个喷嘴具有邻近室的入口和与外部环境相邻的出口,入口具有第二区域,第二区域具有第三区域,第一区域大于第二区域,第二区域大于第二区域 第三区。 第一区域与第三区域的比例大于5比1。

    MEMS gyroscope having an improved rejection of the quadrature error

    公开(公告)号:US11965739B2

    公开(公告)日:2024-04-23

    申请号:US17868479

    申请日:2022-07-19

    CPC classification number: G01C19/5712

    Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

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