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公开(公告)号:US09099604B2
公开(公告)日:2015-08-04
申请号:US13858481
申请日:2013-04-08
Inventor: François Roy , Lucile Broussous , Julien Michelot , Jean-Pierre Oddou
IPC: H01L21/00 , H01L31/18 , H01L27/146
CPC classification number: H01L31/18 , H01L27/14605
Abstract: A method for manufacturing an image sensor, including the successive steps of: forming columns of a semiconductor material; forming one or several pixels at a first end of each of the columns; and deforming the structure so that the second ends of each of the columns come closer to each other or draw away from each other to form a surface in the shape of a polyhedral cap.
Abstract translation: 一种用于制造图像传感器的方法,包括以下连续步骤:形成半导体材料的列; 在每个列的第一端形成一个或几个像素; 并且使结构变形使得每个柱的第二端彼此靠近或彼此拉开以形成多面体盖的形状的表面。
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公开(公告)号:US20140004644A1
公开(公告)日:2014-01-02
申请号:US13858481
申请日:2013-04-08
Inventor: François Roy , Lucile Broussous , Julien Michelot , Jean-Pierre Oddou
IPC: H01L31/18
CPC classification number: H01L31/18 , H01L27/14605
Abstract: A method for manufacturing an image sensor, including the successive steps of: forming columns of a semiconductor material; forming one or several pixels at a first end of each of the columns; and deforming the structure so that the second ends of each of the columns come closer to each other or draw away from each other to form a surface in the shape of a polyhedral cap.
Abstract translation: 一种用于制造图像传感器的方法,包括以下连续步骤:形成半导体材料的列; 在每个列的第一端形成一个或几个像素; 并且使结构变形,使得每个柱的第二端彼此靠近或彼此拉开,以形成多面体盖的形状的表面。
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公开(公告)号:US12232435B2
公开(公告)日:2025-02-18
申请号:US18130184
申请日:2023-04-03
Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics (Grenoble 2) SAS , STMicroelectronics (Rousset) SAS
Inventor: Franck Arnaud , David Galpin , Stephane Zoll , Olivier Hinsinger , Laurent Favennec , Jean-Pierre Oddou , Lucile Broussous , Philippe Boivin , Olivier Weber , Philippe Brun , Pierre Morin
Abstract: An integrated circuit includes a substrate with an active area, a first insulating layer, a second insulating layer, and a phase-change material. The integrated circuit further includes a heating element in an L-shape, with a long side in direct physical contact with the phase-change material and a short side in direct physical contact with a via. The heating element is surrounded by first, second, and third insulating spacers, with the first insulating spacer having a planar first sidewall in contact with the long side of the heating element, a convex second sidewall, and a planar bottom face in contact with the short side of the heating element. The second and third insulating spacers are in direct contact with the first insulating spacer and the long side of the heating element.
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公开(公告)号:US11653582B2
公开(公告)日:2023-05-16
申请号:US16184246
申请日:2018-11-08
Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics (Grenoble 2) SAS , STMicroelectronics (Rousset) SAS
Inventor: Franck Arnaud , David Galpin , Stephane Zoll , Olivier Hinsinger , Laurent Favennec , Jean-Pierre Oddou , Lucile Broussous , Philippe Boivin , Olivier Weber , Philippe Brun , Pierre Morin
CPC classification number: H10N70/8616 , G11C13/0004 , G11C13/0069 , H10B63/30 , H10B63/80 , H10N70/011 , H10N70/021 , H10N70/231 , H10N70/826 , H10N70/8265 , H10N70/8413 , H10N70/882 , G11C2013/008
Abstract: An electronic chip includes memory cells made of a phase-change material and a transistor. First and second vias extend from the transistor through an intermediate insulating layer to a same height. A first metal level including a first interconnection track in contact with the first via is located over the intermediate insulating layer. A heating element for heating the phase-change material is located on the second via, and the phase-change material is located on the heating element. A second metal level including a second interconnection track is located above the phase-change material. A third via extends from the phase-change material to the second interconnection track.
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