公开(公告)号：US11417827B2

公开(公告)日：2022-08-16

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/00 ,  H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20210204847A1

公开(公告)日：2021-07-08

申请号：US17212045

申请日：2021-03-25

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Andrea Di Matteo ,  Principia Dardano

IPC: A61B5/1486 ,  A61B5/145

Abstract: A microneedle array device includes a substrate and an array of microneedles on the substrate. Each microneedle includes a redox enzyme and redox mediator and an electrically conductive layer on the substrate. The electrically conductive layer may extend partway up each microneedle exposing the tip thereof.

公开(公告)号：US12058938B2

公开(公告)日：2024-08-06

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H10N30/30 ,  H02N2/18 ,  H10N30/01 ,  H10N30/03 ,  H10N30/06 ,  H10N30/082 ,  H10N30/853 ,  H10N30/87 ,  H10N30/88

CPC classification number: H10N30/308 ,  H02N2/186 ,  H10N30/01 ,  H10N30/03 ,  H10N30/06 ,  H10N30/082 ,  H10N30/304 ,  H10N30/8554 ,  H10N30/87 ,  H10N30/88

Abstract: A process for manufacturing a MEMS piezoelectric device includes: forming a membrane at a first surface of wafer of semiconductor material further having a second surface (the first and second surfaces being opposite along a vertical axis and extending parallel to a horizontal plane formed by first and second horizontal axes); forming a cavity within the wafer so that the membrane is suspended above the cavity; forming a piezoelectric material layer above a first surface of the membrane; forming an electrode arrangement in contact with the piezoelectric material layer; and forming a proof mass coupled to a second surface of the membrane opposite to the first surface along the vertical axis. The proof mass deforms the membrane in response to environmental mechanical vibrations. Forming the proof mass includes forming a connection element at a central position between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US10186654B2

公开(公告)日：2019-01-22

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/22 ,  H01L41/113 ,  H01L41/047 ,  H02N2/18 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US09823210B2

公开(公告)日：2017-11-21

申请号：US14951094

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N33/543 ,  G01N27/28 ,  C12Q1/00 ,  G01N27/327 ,  G01N27/403 ,  G03F7/00 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A method for manufacturing a biosensor includes forming an electrode layer on a flexible foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

公开(公告)号：US20170186940A1

公开(公告)日：2017-06-29

申请号：US15163230

申请日：2016-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/113 ,  H01L41/053 ,  H01L41/332 ,  H01L41/25 ,  H01L41/29 ,  H01L41/047 ,  H01L41/187

CPC classification number: H01L41/1138 ,  H01L41/047 ,  H01L41/053 ,  H01L41/1134 ,  H01L41/1876 ,  H01L41/22 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332 ,  H02N2/186

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20160077034A1

公开(公告)日：2016-03-17

申请号：US14951136

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N27/28 ,  G01N27/327

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

Abstract translation: 生物传感器包括具有位于箔上的电极层的柔性箔。 粘合剂层位于箔层上，并且第一可光定影的水凝胶膜位于电极层和粘合剂层之上。 具有固定化生物识别元件的第二光可定义水凝胶膜通过第一水凝胶膜中的开口定位在与电极层接触的第一水凝胶膜的上方。

公开(公告)号：US09244067B2

公开(公告)日：2016-01-26

申请号：US13929654

申请日：2013-06-27

Applicant: STMicroelectronics S.r.l.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N33/543 ,  C12Q1/00

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

Abstract translation: 生物传感器包括具有位于箔上的电极层的柔性箔。 粘合剂层位于箔层上，并且第一可光定影的水凝胶膜位于电极层和粘合剂层之上。 具有固定化生物识别元件的第二光可定义水凝胶膜通过第一水凝胶膜中的开口定位在与电极层接触的第一水凝胶膜的上方。

公开(公告)号：US10987039B2

公开(公告)日：2021-04-27

申请号：US14558779

申请日：2014-12-03

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Andrea Di Matteo ,  Principia Dardano

IPC: A61B5/1486 ,  A61B5/145 ,  A61B5/00

Abstract: A microneedle array device includes a substrate and an array of microneedles on the substrate. Each microneedle includes a redox enzyme and redox mediator and an electrically conductive layer on the substrate. The electrically conductive layer may extend partway up each microneedle exposing the tip thereof.

公开(公告)号：US09910005B2

公开(公告)日：2018-03-06

申请号：US14951136

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N27/28 ,  C12Q1/00 ,  G01N33/543 ,  G01N27/327 ,  G01N27/403 ,  G03F7/00 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.