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公开(公告)号：US12242051B2
公开(公告)日：2025-03-04
申请号：US17745186
申请日：2022-05-16
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Gianluca Mendicino , Enri Duqi , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region elastically suspended above the cavity; at least a first pair of driving arms coupled to the tiltable structure and carrying respective piezoelectric material regions which may be biased to cause a rotation thereof around at least one rotation axis; elastic suspension elements coupling the tiltable structure elastically to the fixed structure and which are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion; and a piezoresistive sensor configured to provide a detection signal indicative of the rotation of the tiltable structure. At least one test structure is integrated in the die to provide a calibration signal indicative of a sensitivity variation of the piezoresistive sensor in order to calibrate the detection signal.
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公开(公告)号：US11656539B2
公开(公告)日：2023-05-23
申请号：US16704484
申请日：2019-12-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: A microelectromechanical device includes a fixed structure defining a cavity with a tiltable structure that is elastically suspended in the cavity. A piezoelectrically driven actuation structure, interposed between the tiltable structure and the fixed structure, is biased for causing rotation of the tiltable structure about a first rotation axis belonging to a horizontal plane in which the tiltable structure rests. The actuation structure includes a pair of driving arms carry respective regions of piezoelectric material and are elastically coupled to the tiltable structure on opposite sides of the first rotation axis through respective elastic decoupling elements. The elastic decoupling elements exhibit stiffness in regard to movements out of the horizontal plane and compliance to torsion about the first rotation axis.
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Patent Agency Ranking
3.发明授权公开(公告)号：US11673799B2
公开(公告)日：2023-06-13
申请号：US17155429
申请日：2021-01-22
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Nicolo′ Boni , Lorenzo Baldo , Massimiliano Merli , Roberto Carminati
CPC classification number: B81C1/00158 , H01L41/35 , B81C2201/013
Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.
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公开(公告)号：US11086122B2
公开(公告)日：2021-08-10
申请号：US16222027
申请日：2018-12-17
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Massimiliano Merli , Nicolo′ Boni
Abstract: A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.
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公开(公告)号：US11787685B2
公开(公告)日：2023-10-17
申请号：US17126903
申请日：2020-12-18
Applicant: STMicroelectronics S.r.l.
Inventor： Luca Seghizzi , Nicolo′ Boni , Laura Oggioni , Roberto Carminati , Marta Carminati
CPC classification number: B81B3/0021 , B81C1/0069 , B81C2201/013 , B81C2201/0156
Abstract: For manufacturing an optical microelectromechanical device, a first wafer of semiconductor material having a first surface and a second surface is machined to form a suspended mirror structure, a fixed structure surrounding the suspended mirror structure, elastic supporting elements which extend between the fixed structure and the suspended mirror structure, and an actuation structure coupled to the suspended mirror structure. A second wafer is machined separately to form a chamber delimited by a bottom wall having a through opening. The second wafer is bonded to the first surface of the first wafer in such a way that the chamber overlies the actuation structure and the through opening is aligned to the suspended mirror structure. Furthermore, a third wafer is bonded to the second surface of the first wafer to form a composite wafer device. The composite wafer device is then diced to form an optical microelectromechanical device.
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公开(公告)号：US11600765B2
公开(公告)日：2023-03-07
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico Giusti , Carlo Luigi Prelini , Marco Ferrera , Carla Maria Lazzari , Luca Seghizzi , Nicolo′ Boni , Roberto Carminati , Fabio Quaglia
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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公开(公告)号：US11448871B2
公开(公告)日：2022-09-20
申请号：US16539109
申请日：2019-08-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Roberto Carminati , Massimiliano Merli
Abstract: A micromechanical device includes a fixed structure, a mobile portion rotatable about a first rotation axis, and a first actuation structure arranged between the fixed structure and the mobile portion to enable rotation of the mobile portion about the first rotation axis. The mobile portion includes a supporting structure, a tiltable platform rotatable about a second rotation axis, transverse to the first rotation axis, and a second actuation structure coupled between the tiltable platform and the supporting structure. Stiffening elements are arranged between the supporting structure and the fixed structure. The micromechanical device may be used within a pico-projector.
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