公开(公告)号：US20230147723A1

公开(公告)日：2023-05-11

申请号：US17894625

申请日：2022-08-24

Applicant: Samsung Display Co., LTD.

Inventor： Kyongho HONG ,  Myungkyu KIM ,  Chang-Kon PARK ,  Sukbeom YOU ,  Dongjae LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A loading apparatus for a deposition mask includes a clamper that clamps the mask extending in a direction, a first adsorption part, a second adsorption part, and a connection part connected to the first adsorption part and the second adsorption part, and includes a picker that transfers the mask. In case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask, the second adsorption unit adsorbs a portion between the ends of the mask, and the clamper clamps the mask between the first adsorption part and the second adsorption part.

公开(公告)号：US20230189625A1

公开(公告)日：2023-06-15

申请号：US18079966

申请日：2022-12-13

Applicant: Samsung Display Co., Ltd.

Inventor： Myungkyu KIM ,  Changkon PARK ,  Sukbeom YOU ,  Dongjae LEE ,  Kyongho HONG

IPC: H10K71/00 ,  C23C14/04

CPC classification number: H01L51/56 ,  C23C14/042

Abstract: A mask stage includes plates disposed adjacent to each other, the plates forming a closed loop in a plan view, and a connection portion connecting adjacent ones among the plates to each other, the connection portion being detachable from the plates. The mask stage supports a mask frame.

公开(公告)号：US20150083045A1

公开(公告)日：2015-03-26

申请号：US14276874

申请日：2014-05-13

Applicant: Samsung Display Co., Ltd.

Inventor： Sukbeom YOU ,  Hyungmin Kim

IPC: H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  H01L21/682

Abstract: A mask fixing device is disclosed. In one aspect, the mask fixing device includes a plate and a magnetic assembly. The magnetic assembly faces a mask such that a substrate is interposed therebetween and generates a magnetic force to fix the mask to the substrate. The plate holds the magnetic assembly and faces the substrate. The magnetic assembly includes a plurality of first and second magnetic members respectively having first and second magnetic poles. The first magnetic members and the second magnetic members are alternately arranged.

Abstract translation: 公开了一种掩模固定装置。 一方面，面罩固定装置包括板和磁性组件。 磁性组件面对掩模，使得衬底介于其间并产生磁力以将掩模固定到衬底。 该板保持磁性组件并面向衬底。 磁性组件包括分别具有第一和第二磁极的多个第一和第二磁性部件。 第一磁性构件和第二磁性构件交替布置。

公开(公告)号：US20140356552A1

公开(公告)日：2014-12-04

申请号：US14049306

申请日：2013-10-09

Applicant: Samsung Display Co., Ltd.

Inventor： Daeyong KIM ,  Sukbeom YOU

IPC: C23C16/50 ,  H05B3/02 ,  H05B3/03

CPC classification number: C23C14/26 ,  C23C14/12 ,  C23C14/562 ,  H01L51/001 ,  H01L51/56 ,  H05B3/26

Abstract: A joule-heating evaporation deposition apparatus which deposits a layer on a target substrate, the apparatus including: a base substrate facing the target substrate including a plurality of target areas defined thereon; a plurality of heating electrodes on the base substrate; and a deposition material on the plurality of heating electrodes and an entire surface of the base substrate. Plural heating electrodes among the plurality of heating electrodes respectively face each target area among the plurality of target areas.

Abstract translation: 一种在目标基板上沉积层的焦耳加热蒸发沉积装置，所述装置包括：面向目标基板的基底基板，包括限定在其上的多个目标区域; 基底基板上的多个加热电极; 以及在所述多个加热电极和所述基底基板的整个表面上的沉积材料。 多个加热电极中的多个加热电极分别面对多个目标区域中的每个目标区域。