公开(公告)号：US09847507B2

公开(公告)日：2017-12-19

申请号：US15249057

申请日：2016-08-26

Applicant: Samsung Display Co., Ltd.

Inventor： Hong Ro Lee ,  Chung Hwan Lee

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/00 ,  H01L27/12 ,  H01L29/786

CPC classification number: H01L51/5253 ,  H01L27/1222 ,  H01L27/1274 ,  H01L27/3262 ,  H01L29/78675 ,  H01L51/0096 ,  H01L51/529 ,  Y02E10/549

Abstract: A display panel includes: a substrate including a first substrate layer which includes a glass material and a second substrate layer contacting the first substrate layer and which includes a polymer material; a thin film transistor disposed on the substrate; and a light emitting element disposed on the thin film transistor.

公开(公告)号：US20170110685A1

公开(公告)日：2017-04-20

申请号：US15249057

申请日：2016-08-26

Applicant: Samsung Display Co., Ltd.

Inventor： Hong Ro Lee ,  Chung Hwan Lee

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/56

CPC classification number: H01L51/5253 ,  H01L27/1222 ,  H01L27/1274 ,  H01L27/3262 ,  H01L29/78675 ,  H01L51/0096 ,  H01L51/529 ,  Y02E10/549

Abstract: A display panel includes: a substrate including a first substrate layer which includes a glass material and a second substrate layer contacting the first substrate layer and which includes a polymer material; a thin film transistor disposed on the substrate; and a light emitting element disposed on the thin film transistor.

公开(公告)号：US11666989B2

公开(公告)日：2023-06-06

申请号：US16842272

申请日：2020-04-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hong Ro Lee ,  Chung Hwan Lee

IPC: B23K26/12 ,  B23K26/352

CPC classification number: B23K26/127 ,  B23K26/352

Abstract: Provided is a laser crystallizing apparatus including a laser generator generating a laser beam and an optical system photo-converting the laser beam to make a converted laser beam. A beam transmitting unit includes a passage through which the converted laser beam is transmitted into the chamber. The beam transmitting unit includes a chamber window provided on the chamber to transmit the laser beam, and a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window.

公开(公告)号：US10898972B2

公开(公告)日：2021-01-26

申请号：US15168325

申请日：2016-05-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Chung Hwan Lee ,  Hong Ro Lee ,  Rae Chul Park

IPC: B23K26/354 ,  B23K37/04

Abstract: A laser crystallizing apparatus includes a stage configured to receive a substrate, the stage including a plurality of groove lines each having a predetermined depth and width, and a plurality of control holes, each arranged in a respective groove line. Each control hole is provided with a negative pressure to hold the substrate to a surface of the stage or a positive pressure to release the substrate from the surface of the stage.

公开(公告)号：US10475647B2

公开(公告)日：2019-11-12

申请号：US15465707

申请日：2017-03-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hong Ro Lee ,  Rae Chul Park ,  Chung Hwan Lee

IPC: H01L21/02 ,  B23K26/064 ,  B23K26/70 ,  H01L27/12 ,  B23K26/00 ,  B23K26/06 ,  B23K26/08 ,  B23K26/352 ,  G02B5/00 ,  B23K101/40 ,  B23K103/16 ,  B23K103/00

Abstract: A laser crystallization device includes a laser oscillator, a stage, and a reflection unit. The stage is configured to support a substrate with a target film disposed on the substrate. The laser oscillator is configured to irradiate an incident laser beam on the target film. The stage is configured to move the substrate such that the incident laser beam scans the target film. The incident laser beam is reflected from the target film to generate a reflected laser beam. The reflection unit includes at least two reflection mirrors positioned at a path of the reflected laser beam. The reflection unit is configured to re-irradiate the reflected laser beam on the target film two or more times through a plurality of paths that are different from a path of the incident laser beam.

公开(公告)号：US10181413B2

公开(公告)日：2019-01-15

申请号：US15138986

申请日：2016-04-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Chung Hwan Lee ,  Hong Ro Lee

IPC: H01L21/67 ,  H01L21/02 ,  H01S3/00 ,  B23K26/06 ,  B23K26/12

Abstract: A laser crystallization apparatus includes a laser generator that generates a laser beam including a plurality of line beams that are parallel to each other. An optical system includes a plurality of lenses and mirrors, wherein the optical system optically converts the generated laser beam to a converted laser beam. A chamber includes a stage and a substrate disposed on the stage, wherein a laser-crystallized thin film is formed on the substrate when the substrate is irradiated by the converted laser beam. A line focus adjuster that adjusts a line focus and a final focus of the plurality of line beams passing through the optical system, wherein the substrate is irradiated by the plurality of line beams at the final focus of the plurality of line beams.