公开(公告)号：US20230154779A1

公开(公告)日：2023-05-18

申请号：US17981685

申请日：2022-11-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunjae KANG ,  Sangmin KIM ,  Youngwook KIM ,  Chuljun PARK ,  Jaesung BYUN ,  Sangkyung LEE ,  Hyunwoo LEE ,  Junhyuk CHANG

IPC: H01L21/677 ,  H01F7/02 ,  B65G17/12

CPC classification number: H01L21/67766 ,  H01F7/02 ,  B65G17/12 ,  B65G2201/0297

Abstract: A transfer apparatus according to the disclosure includes a mast portion including a base portion, and a protrusion portion protruding from the base portion, and a plurality of shuttles configured to move along the mast portion, thereby transferring a carrier. The mast portion includes a first magnet track fixed to a first sidewall of the protrusion portion, and a second magnet track fixed to a second sidewall of the protrusion portion. Each of the plurality of shuttles includes a first coil portion adjacent to the first magnet track in a horizontal direction, and a second coil portion adjacent to the second magnet track in the horizontal direction. The protrusion portion, the first magnet track, and the second magnet track are disposed between the first and second coil portions.

公开(公告)号：US20230061872A1

公开(公告)日：2023-03-02

申请号：US17847542

申请日：2022-06-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minji KIM ,  Sangmin KIM ,  Youngwook KIM ,  Ginam PARK ,  Chuljun PARK ,  Sanga BANG ,  Yongjun AHN ,  Sangkyung LEE ,  Hyunwoo LEE ,  Jeonghun LIM

IPC: B65G1/04 ,  B65G49/06

Abstract: A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.

公开(公告)号：US20230041221A1

公开(公告)日：2023-02-09

申请号：US17683769

申请日：2022-03-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangmin KIM ,  Youngwook KIM ,  Ginam PARK ,  Chuljun PARK ,  Jeongjae BANG ,  Jaesung BYUN ,  Yongjun AHN ,  Sangkyung LEE ,  Hyunwoo LEE ,  Junhyuk CHANG

IPC: H01L21/677 ,  B65G1/06 ,  B65G1/127

Abstract: A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.

公开(公告)号：US20210033965A1

公开(公告)日：2021-02-04

申请号：US16901466

申请日：2020-06-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ginam PARK ,  Sangmin KIM ,  Jongsam KIM ,  Hongjin KIM ,  Chuljun PARK ,  Yongjun AHN ,  Sangkyung LEE ,  Junyong LEE ,  Taijo JEON ,  Kyubum CHO

IPC: G03F1/66 ,  B01D46/44 ,  B01D46/00 ,  B01D46/42 ,  F24F3/14 ,  H05B1/02 ,  F24H3/04 ,  F25B21/02

Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.