公开(公告)号：US20210005533A1

公开(公告)日：2021-01-07

申请号：US16750579

申请日：2020-01-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyoukyung Cho ,  Daesuk Lee ,  Jinnam Kim ,  Taeseong Kim ,  Kwangjin Moon ,  Hakseung Lee

IPC: H01L23/48 ,  H01L23/528 ,  H01L23/00 ,  H01L25/065 ,  H01L23/532 ,  H01L21/768 ,  H01L21/02 ,  H01L21/306

Abstract: Disclosed are semiconductor packages and methods of fabricating the same. The semiconductor package comprises a first wiring layer, a first semiconductor substrate on the first wiring layer, a first dielectric layer on the first semiconductor substrate, a landing pad in the first wiring layer, a through hole that penetrates the first semiconductor substrate, the first dielectric layer, and the first wiring layer and exposes the landing pad, the through hole including a first hole and a second hole on a bottom end of the first hole, the second hole having a maximum diameter less than a minimum diameter of the first hole, and a mask layer on an upper lateral surface of the through hole.

公开(公告)号：US11373932B2

公开(公告)日：2022-06-28

申请号：US16750579

申请日：2020-01-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyoukyung Cho ,  Daesuk Lee ,  Jinnam Kim ,  Taeseong Kim ,  Kwangjin Moon ,  Hakseung Lee

IPC: H01L23/48 ,  H01L23/00 ,  H01L25/065 ,  H01L23/532 ,  H01L21/768 ,  H01L21/02 ,  H01L21/306 ,  H01L23/528 ,  H01L21/027 ,  H01L21/288 ,  H01L21/321

Abstract: Disclosed are semiconductor packages and methods of fabricating the same. The semiconductor package comprises a first wiring layer, a first semiconductor substrate on the first wiring layer, a first dielectric layer on the first semiconductor substrate, a landing pad in the first wiring layer, a through hole that penetrates the first semiconductor substrate, the first dielectric layer, and the first wiring layer and exposes the landing pad, the through hole including a first hole and a second hole on a bottom end of the first hole, the second hole having a maximum diameter less than a minimum diameter of the first hole, and a mask layer on an upper lateral surface of the through hole.

公开(公告)号：US11798866B2

公开(公告)日：2023-10-24

申请号：US17808533

申请日：2022-06-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Eunji Kim ,  Sungdong Cho ,  Kwangwuk Park ,  Sangjun Park ,  Daesuk Lee ,  Hakseung Lee

IPC: H01L23/48 ,  H01L21/768 ,  H01L25/18 ,  H01L23/528 ,  H01L23/498 ,  H01L21/3065

CPC classification number: H01L23/481 ,  H01L21/76898 ,  H01L25/18 ,  H01L21/3065

Abstract: A semiconductor device includes a semiconductor substrate having an active surface on which semiconductor elements are provided. An interlayer insulating film is provided on the semiconductor substrate. A first via structure passes through the semiconductor substrate. The first via structure has a first diameter. A second via structure passes through the semiconductor substrate. The second via structure has a second diameter that is greater than the first diameter. The first via structure has a step portion that is in contact with the interlayer insulating film.

公开(公告)号：US11380606B2

公开(公告)日：2022-07-05

申请号：US16932726

申请日：2020-07-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Eunji Kim ,  Sungdong Cho ,  Kwangwuk Park ,  Sangjun Park ,  Daesuk Lee ,  Hakseung Lee

IPC: H01L23/48 ,  H01L21/768 ,  H01L25/18 ,  H01L23/528 ,  H01L23/498 ,  H01L23/522 ,  H01L21/3065

Abstract: A semiconductor device includes a semiconductor substrate having an active surface on which semiconductor elements are provided. An interlayer insulating film is provided on the semiconductor substrate. A first via structure passes through the semiconductor substrate. The first via structure has a first diameter. A second via structure passes through the semiconductor substrate. The second via structure has a second diameter that is greater than the first diameter. The first via structure has a step portion that is in contact with the interlayer insulating film.