公开(公告)号：US20200333716A1

公开(公告)日：2020-10-22

申请号：US16655973

申请日：2019-10-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daesung Jung ,  Younsok Choi ,  Jongmin Song ,  Minho Kang ,  Sangyoon Soh ,  Hohyun Lee

IPC: G03F7/20 ,  G03F1/00 ,  G03F1/44 ,  G03F9/00 ,  H01L21/67

Abstract: A measuring apparatus for a vacuum chamber capable of accurately measuring physical properties or quantities in the vacuum chamber in an exposure process in real time, and a measuring system including the measuring apparatus are described herein. The measuring apparatus includes: a body having a shape of an exposure mask used in an exposure process; and a measuring element in an interior of the body or on a first surface of the body. When the measuring apparatus is positioned in a vacuum chamber during the exposure process, the measuring apparatus is configured to measure physical properties in the vacuum chamber using the measuring element. The body or the measuring element is configured to withstand a vacuum in the vacuum chamber including resisting or preventing physical deformation of the body or the measuring element due to the vacuum.

公开(公告)号：US12074051B2

公开(公告)日：2024-08-27

申请号：US17713541

申请日：2022-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taehyoung Lee ,  Hohyun Lee ,  Jongmin Song ,  Young Yoon ,  Jaemoo Choi

IPC: H01L21/683 ,  B25J9/16 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/6833 ,  B25J9/1679 ,  B25J9/1697 ,  H01L21/67259 ,  H01L21/67742

Abstract: A teaching apparatus includes a chamber; an electrostatic chuck in the chamber, the electrostatic chuck including a sidewall surrounding a loading area; an aligner configured to be loaded onto the loading area of the electrostatic chuck; a vision sensor configured to obtain measurement data by measuring separation distances of separation regions between the aligner and the sidewall of the electrostatic chuck and to transmit the measurement data; a transfer robot configured to load the aligner onto a reference position of the loading area and to position the vision sensor above the electrostatic chuck; and controller configured to reset the reference position and to equalize the separation distances based on the measurement data transmitted from the vision sensor.

公开(公告)号：US11169449B2

公开(公告)日：2021-11-09

申请号：US16655973

申请日：2019-10-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daesung Jung ,  Younsok Choi ,  Jongmin Song ,  Minho Kang ,  Sangyoon Soh ,  Hohyun Lee

IPC: G03F7/20 ,  H01L21/67 ,  G03F1/44 ,  G03F9/00 ,  G03F1/62

Abstract: A measuring apparatus for a vacuum chamber capable of accurately measuring physical properties or quantities in the vacuum chamber in an exposure process in real time, and a measuring system including the measuring apparatus are described herein. The measuring apparatus includes: a body having a shape of an exposure mask used in an exposure process; and a measuring element in an interior of the body or on a first surface of the body. When the measuring apparatus is positioned in a vacuum chamber during the exposure process, the measuring apparatus is configured to measure physical properties in the vacuum chamber using the measuring element. The body or the measuring element is configured to withstand a vacuum in the vacuum chamber including resisting or preventing physical deformation of the body or the measuring element due to the vacuum.