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公开(公告)号:US20240327136A1
公开(公告)日:2024-10-03
申请号:US18383656
申请日:2023-10-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Minkyun LEE , Seunggyu Kang , Hyunjae Kang , Sangmin Kim , Youngwook Kim , Jaesung Byun , Yongjun Ahn , Yongjun Ahn , Hyunwoo Lee , Jeonghun Lim , Junhyuk Chang
IPC: B65G47/90 , H01L21/677 , H01L21/687
CPC classification number: B65G47/90 , H01L21/67712 , H01L21/67769 , H01L21/68707
Abstract: An apparatus includes an elevator, a plurality of storages, a plurality of first robots and a plurality of second robots. The elevator may elevate a vehicle containing a plurality of semiconductor device carriers to position the vehicle at each of a plurality of process floors. At least one of the plurality of storages may be provided at each of the plurality of process floors to store the plurality of semiconductor device carriers. At least one of the plurality of first robots may be provided at each of the plurality of process floors to transfer the vehicle between the elevator and a respective one of the plurality of process floors. At least one of the second robots may be provided at each of the plurality of process floors to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages.
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公开(公告)号:US20240294196A1
公开(公告)日:2024-09-05
申请号:US18377782
申请日:2023-10-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunjae Kang , Seunggyu Kang , SANGMIN KIM , JAESUNG BYUN , YONG-JUN AHN , MIN KYUN LEE , SANGKYUNG LEE , HYUNWOO LEE , JEONGHUN LIM , JUNHYUK CHANG
Abstract: An embodiment of the present disclosure provides an overhead hoist transport system including: a driving rail configured to extend in a first direction; a support rail positioned parallel to the driving rail; and a crane movably connected to the driving rail and the support rail and configured to move along the driving rail and the support rail, wherein the crane includes: a base configured to extend in a second direction perpendicular to the first direction to cross the driving rail and the support rail; a driving wheel connected to the base and configured to move along the driving rail; and a guide wheel connected to the base and pressed toward a contact surface of the support rail to remain in contact with the support rail, the contact surface being a surface in contact with the guide wheel.
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公开(公告)号:US20230253227A1
公开(公告)日:2023-08-10
申请号:US17946727
申请日:2022-09-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seunggyu Kang , Jeonghun Lim , Youngwook Kim , Chuljun Park , Yongjun Ahn , Sangkyung Lee , Hyunwoo Lee
IPC: H01L21/677 , H01L21/67 , H02J50/12 , H02J50/90
CPC classification number: H01L21/67742 , H01L21/67259 , H02J50/12 , H02J50/90 , H01L21/6773 , H01L21/67736 , H01L21/67294 , H01M10/486
Abstract: A substrate transfer system and method includes a mobile robot configured to handle a substrate carrier and comprising a power receiver; a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot; at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust a distance between the power feeder and the power receiver; an identification tag disposed on any one of the mobile robot and the mobile robot interface device; a tag reader configured to recognize the identification tag; and a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator and the controller is further configured to control the first and/or second actuator to adjust the distance between the power feeder and the power receiver.
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