公开(公告)号：US20230302502A1

公开(公告)日：2023-09-28

申请号：US18094820

申请日：2023-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongha YUN ,  Seyoon KIM ,  Juhui PARK ,  Jiyeon LEE ,  Cheolmin Shin

IPC: B08B3/14 ,  C02F1/28 ,  C02F1/44 ,  C02F1/42 ,  B01D61/08 ,  B01D61/02 ,  B01D63/02 ,  B01D15/36 ,  B08B3/02 ,  B08B13/00 ,  H01L21/67

CPC classification number: B08B3/14 ,  C02F1/283 ,  C02F1/441 ,  C02F1/42 ,  B01D61/08 ,  B01D61/02 ,  B01D63/02 ,  B01D15/361 ,  B08B3/022 ,  B08B13/00 ,  H01L21/67017 ,  C02F2209/40 ,  C02F2201/005 ,  C02F2103/04

Abstract: Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

公开(公告)号：US20240417301A1

公开(公告)日：2024-12-19

申请号：US18815333

申请日：2024-08-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongha YUN ,  Seyoon KIM ,  Juhui PARK ,  Jiyeon LEE ,  Cheolmin SHIN

IPC: C02F9/00 ,  B01D15/36 ,  B01D61/02 ,  B01D61/08 ,  B01D61/14 ,  B01D63/02 ,  B08B3/02 ,  B08B3/14 ,  B08B13/00 ,  C02F1/28 ,  C02F1/42 ,  C02F1/44 ,  C02F103/04 ,  C02F103/34 ,  H01L21/67

Abstract: Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

公开(公告)号：US20230264998A1

公开(公告)日：2023-08-24

申请号：US18172566

申请日：2023-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunhye PARK ,  Juhui PARK ,  Seyoon KIM ,  Jiyeon LEE

IPC: C02F9/00

CPC classification number: C02F9/00 ,  C02F2201/005 ,  C02F2209/003 ,  C02F2203/006

Abstract: An ultrapure water manufacturing facility includes: a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged; a branch line branched downstream of the supply line and connected to the pure water storage tank; and a first automatic valve connected to the branch line and configured to be actuated by a double-acting actuator.

公开(公告)号：US20230260512A1

公开(公告)日：2023-08-17

申请号：US18093978

申请日：2023-01-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seyoon KIM ,  Gajin SONG ,  Hoseon SHIN ,  Joohwan KIM

IPC: G10L15/22 ,  G10L15/18 ,  G10L15/06

CPC classification number: G10L15/22 ,  G10L15/063 ,  G10L15/1815 ,  G10L2015/088

Abstract: An electronic device includes a memory storing instructions, and at least one processor electrically connected to the memory and configured to execute the instructions, and when the at least one processor executes the instructions, the at least one processor may be configured to activate a speech recognition service in response to a first utterance including a default wake-up word, deactivate the speech recognition service after providing feedback on the first utterance, receive a second utterance following the first utterance within a predetermined period of time, and reactivate the speech recognition service based on a case where the second utterance includes a predictive wake-up word. In addition, various embodiments are possible.