公开(公告)号：US20230242401A1

公开(公告)日：2023-08-03

申请号：US17766257

申请日：2020-10-02

Applicant: TOSOH CORPORATION

Inventor： Masami MESUDA ,  Hideto KURAMOCHI ,  Shinichi HARA

IPC: C01B21/06 ,  C23C16/448 ,  C04B35/622 ,  C04B35/58 ,  C23C14/34

CPC classification number: C01B21/0632 ,  C23C16/4486 ,  C04B35/622 ,  C04B35/58 ,  C23C14/3414 ,  C01P2004/61 ,  C04B2235/725 ,  C04B2235/3286 ,  C04B2235/723 ,  C01P2004/20 ,  C01P2006/80

Abstract: High-purity gallium nitride particles having a low oxygen content suitable for a raw material or a sintered body is provided. Gallium nitride particles characterized in that the oxygen content is 0.5 at % or less and the total impurity amount of elements, Si, Ge, Sn, Pb, Be, Mg, Ca, Sr, Ba, Zn and Cd, is less than 10 wtppm are used.

公开(公告)号：US20240409429A1

公开(公告)日：2024-12-12

申请号：US18732633

申请日：2024-06-04

Applicant: TOSOH CORPORATION

Inventor： Yoshiro KUSUSE ,  Shinichi HARA ,  Junya IIHAMA ,  Masami MESUDA

IPC: C01G15/00

Abstract: A powder of gallium nitride has an oxygen content of 0.5 at or less. A green body formed by charging 8 g of the powder into a rectangular cuboidal die having a size of 10 mm×40 mm and uniaxially pressing the powder at a pressure of 100 MPa has an electrical resistivity of 1.0×107 Ω·cm or less.

公开(公告)号：US20190016638A1

公开(公告)日：2019-01-17

申请号：US16068596

申请日：2016-12-28

Applicant: TOSOH CORPORATION

Inventor： Kenichi ITOH ,  Hiroyuki HARA ,  Shinichi HARA

IPC: C04B35/453 ,  C04B35/64 ,  H01J37/34

Abstract: An oxide sintered body is provided which does not splash from the target surface even at the time of high power film formation, has a high film formation rate, and is used in a sputtering target capable of providing a high-refractive-index film.An oxide sintered body is used which contains zinc, niobium, aluminum and oxygen as constituent elements and in which Nb/(Zn+Nb+Al)=0.076 to 0.289 and Al/(Zn+Nb+Al)=0.006 to 0.031, where Zn, Nb and Al denote contents of zinc, niobium and aluminum, respectively.