Double wrap dry scroll vacuum pump having a compressed gas cooling
passage disposed in the scroll shaft
    1.
    发明授权
    Double wrap dry scroll vacuum pump having a compressed gas cooling passage disposed in the scroll shaft 失效
    具有设置在涡旋轴中的压缩气体冷却通道的双层卷绕真空泵

    公开(公告)号:US6149405A

    公开(公告)日:2000-11-21

    申请号:US123289

    申请日:1998-07-28

    摘要: A double-wrap dry scroll vacuum pump for use as a vacuum pump for nuclear power equipment. The pump has a pump body including a suction port capable of being communicated with a vessel to be evacuated and a discharge port for discharging wrap compressed gas to an outside of the pump body after an operation of gas compression by the progressive volume reduction of a sealed space, formed by a revolving scroll and a pair of stationary scrolls. The pump further includes a pair of enclosing members which cover opposite end portions of a drive shaft and are mounted in a gas-tight state around the revolving scroll. The pump has compressed gas feed ports for feeding compressed gas therethrough to the enclosing members, the compressed gas having a higher pressure than the wrap compressed gas and is discharged together with the wrap compressed gas through the discharge port. To attain high performance and durability, the double-wrap dry scroll vacuum pump has a gas bearing in fluid communication with the compressed gas feed ports to rotatably support the drive shaft. A contact-less torque transmission means is implemented for transmitting torque from a driving source to the drive shaft.

    摘要翻译: 用于核电设备的真空泵的双卷干式涡旋真空泵。 该泵具有一泵体,该泵体包括能够与要抽真空的容器连通的吸入口,以及用于将气体压缩操作后的压缩气体排放到泵体外部的排出口, 空间,由旋转涡卷和一对固定涡卷形成。 该泵还包括一对封闭构件,该封闭构件覆盖驱动轴的相对端部并围绕回转涡卷以气密状态安装。 泵具有用于将压缩气体通过其中的压缩气体供给口压缩到封闭构件,压缩气体具有比包裹压缩气体更高的压力,并且与包裹压缩气体一起排出通过排出口。 为了获得高性能和耐久性,双卷干式涡旋真空泵具有与压缩气体进料口流体连通的气体轴承,以可旋转地支撑驱动轴。 实现用于将扭矩从驱动源传递到驱动轴的无接触转矩传递装置。

    Unit for separating gas
    2.
    发明授权
    Unit for separating gas 失效
    用于分离气体的单元

    公开(公告)号:US07527676B2

    公开(公告)日:2009-05-05

    申请号:US10566489

    申请日:2004-06-02

    IPC分类号: B01D53/02

    摘要: A unit for separating an exhaust gas containing PFC gases including CF4 and C2F6 generated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CF4 and C2F6.

    摘要翻译: 一种用于分离在生产过程中产生的包含CF4和C2F6的PFC气体的排气的单元,其中废气在浓缩装置中浓缩,然后在使用氮气作为载气的色谱分离装置中色谱分离。 色谱分离装置装有分子筛13X或F-9等。 该单元能够有效分离CF4和C2F6。

    Quadrupole electrode and process for producing the same
    5.
    发明授权
    Quadrupole electrode and process for producing the same 失效
    四极电极及其制造方法

    公开(公告)号:US5373157A

    公开(公告)日:1994-12-13

    申请号:US965258

    申请日:1993-01-05

    IPC分类号: H01J49/42 H01J1/88

    CPC分类号: H01J49/4215 H01J49/068

    摘要: The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.

    摘要翻译: PCT No.PCT / JP92 / 01141 Sec。 371日期:1993年1月5日 102(e)日期1993年1月5日PCT提交1992年9月7日PCT公布。 出版物WO93 / 05532 日本1993年3月18日。本发明涉及用于质谱仪等的四极电极的改进,其中两对电极棒1,2,3和4以这样的方式形成: 每个杆的相对面是双曲线或圆形,并且每个电极棒由陶瓷制成,并且电极的表面涂覆有导电金属的涂层5。 此外,本发明涉及一种制造方法,其特征在于以预定间隔并入这四个电极。 由于电极主要由能够以高尺寸精度容易地形成的陶瓷制成,因此可以在组装期间电极之间的位置关系的调整不需要太多的努力,这使得能够提供具有高性能的四极电极 以低成本实现良好的再现性。

    Thread groove type vacuum pump
    8.
    发明授权
    Thread groove type vacuum pump 失效
    螺纹槽式真空泵

    公开(公告)号:US5632597A

    公开(公告)日:1997-05-27

    申请号:US623014

    申请日:1996-03-28

    IPC分类号: F04D19/04 F01D1/36

    CPC分类号: F04D19/044

    摘要: A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.

    摘要翻译: 螺旋槽型真空泵,其中转子和定子之间的间隙不受转子温度的任何影响,因此泵送性能在核聚变反应堆的等离子体燃烧期间不会劣化。 螺纹槽泵送部分形成为圆锥体,使得转子的膨胀和收缩沿着圆锥体的母线发生。 由于转子和定子之间的间隙由于不同的转子引起的转子温度变化导致的热膨胀变化,因此转子和定子之间的间隙保持恒定,泵在整个运行模式下表现出最高的泵送性能 气体负荷。

    Quadrupole mass spectrometer having plural stable regions
    9.
    发明授权
    Quadrupole mass spectrometer having plural stable regions 失效
    具有多个稳定区域的四极杆质谱仪

    公开(公告)号:US5177359A

    公开(公告)日:1993-01-05

    申请号:US781507

    申请日:1991-10-22

    IPC分类号: G01N27/62 H01J49/42

    CPC分类号: H01J49/42

    摘要: In a quadrupole mass spectrometer which includes four parallel rod electrodes between opposite pairs of which overlapping voltages.+-.(U+V cos .omega. t) are applied (where U: a continuous voltage and V cos .omega. t: a radio-frequency voltage) and which effects mass-analysis by an electric field formed within the four parallel rod electrodes, at least one parameter of U, V and .omega. has two different values, and the values are changed over to select the first stable region or the second stable region, the first stable region being nearest to the original point and the second stable region being next near to the original point on the a - q plane (where a:ordinate, q:abscissa) showing "stability diagram", and the ions being able to pass through the four parallel electrodes under the conditions of the first and second stable regions, where the variable a=8eU/mr.sub.O.sup.2 .omega..sup.2, q=4eV/mr.sub.O.sup.2 .omega..sup.2, U: level of DC voltage, V: peak of the radio-frequency voltage, e: charge of ion, m:mass of ion, r.sub.O : radius of an inscribed circle of the four parallel rod electrodes and.omega.: angular frequency of the radio frequency voltage.

    摘要翻译: 在四极质谱仪中,包括四个平行的棒状电极,在相对的两对之间施加重叠电压+/-(U + Vcosω),其中U:连续电压和Vcosωt:射频电压)和 其通过形成在四个平行杆电极内的电场进行质量分析,U,V和ω的至少一个参数具有两个不同的值,并且将值改变以选择第一稳定区域或第二稳定区域, 第一稳定区域最接近于原始点,而第二稳定区域靠近a-q平面上原始点(其中a:纵坐标,q:横坐标)显示“稳定性图”,并且离子能够 在第一和第二稳定区域的条件下通过四个平行电极,其中变量a = 8eU /mrO2ω2,q = 4eV /mrO2ω2,U:直流电压电平,V: 频率电压,e:离子电荷,m:离子质量,r0:r 四个平行杆电极的内切圆的像素和ω:射频电压的角频率。