公开(公告)号：US20220120627A1

公开(公告)日：2022-04-21

申请号：US17566326

申请日：2021-12-30

Applicant: Yokogawa Electric Corporation

Inventor： Takashi YOSHIDA ,  Yuusaku YOSHIDA ,  Atsushi YUMOTO ,  Yoshitaka SUZUKI

IPC: G01L7/08 ,  G01L7/02 ,  G01L9/00

Abstract: A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.

公开(公告)号：US20180145656A1

公开(公告)日：2018-05-24

申请号：US15814481

申请日：2017-11-16

Applicant: Yokogawa Electric Corporation

Inventor： Takashi YOSHIDA ,  Yusaku YOSHIDA ,  Makoto NORO ,  Atsushi YUMOTO ,  Shuhei YOSHITA

IPC: H03H9/24

CPC classification number: H03H9/2447 ,  H03H9/02338 ,  H03H2009/02291

Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.

公开(公告)号：US20160061857A1

公开(公告)日：2016-03-03

申请号：US14829801

申请日：2015-08-19

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yusaku YOSHIDA ,  Takashi YOSHIDA ,  Atsushi YUMOTO

IPC: G01P15/097

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.

Abstract translation: 谐振传感器包括可在第一方向上移动的移动器，沿与第一方向垂直的第二方向延伸的支撑件，支撑件连接到移动器和定影器，支撑件支撑可动第一 方向和可振动的谐振器，所述谐振器的至少一部分嵌入在所述支撑件中。

公开(公告)号：US20150047434A1

公开(公告)日：2015-02-19

申请号：US14460684

申请日：2014-08-15

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi Yoshida ,  Yuusaku YOSHIDA ,  Atsushi YUMOTO ,  Yoshitaka SUZUKI

IPC: G01L7/08 ,  G01L7/02

CPC classification number: G01L7/082 ,  G01L7/022 ,  G01L7/08 ,  G01L9/0008 ,  G01L9/0047 ,  Y10T29/4913

Abstract: A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.

Abstract translation: 谐振压力传感器包括：第一衬底，包括隔膜和设置在隔膜上的至少一个突起;以及设置在第一衬底中的至少一个谐振器，所述谐振器的至少一部分包括在所述突起中，并且所述谐振器被布置 在所述突起的顶部和所述第一基板的中间水平面之间。