公开(公告)号：US06452201B1

公开(公告)日：2002-09-17

申请号：US09619087

申请日：2000-07-19

申请人： Yu-Sheng Wang ,  Chien-Rong Huang ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Tzong-Ming Wu

发明人： Yu-Sheng Wang ,  Chien-Rong Huang ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Tzong-Ming Wu

IPC分类号： G01N2188

CPC分类号： H01L21/67265 ,  Y10S414/136

摘要： This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.

摘要翻译： 本发明使用基于模式的信号来加速评估过程，作为替代复杂计算过程的手段。 通过实施绝对坐标来构建本发明，通过位置和两个光学传感器信号产生基于图案的信号，并且通过进行特征提取处理。 该过程产生了侧向和重叠问题的特征信号。 此外，通过转换信号，特征信号可以由数字数据处理器处理。 因此，本发明可以实现晶片映射的三个主要目的。

公开(公告)号：US06669185B2

公开(公告)日：2003-12-30

申请号：US09736664

申请日：2000-12-08

申请人： Wu-Lang Lin ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Muh-Wang Liang ,  Kuei-Jung Chen ,  Tzong-Ming Wu

发明人： Wu-Lang Lin ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Muh-Wang Liang ,  Kuei-Jung Chen ,  Tzong-Ming Wu

IPC分类号： B65G6534

CPC分类号： H01L21/67775 ,  Y10S269/903 ,  Y10S414/137

摘要： A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

公开(公告)号：US06997664B1

公开(公告)日：2006-02-14

申请号：US09619388

申请日：2000-07-19

申请人： Muh-Wang Liang ,  Chun-Kai Huang ,  Jiann-Cherng Chen ,  Tzong-Ming Wu ,  Ping-Yu Hu ,  Kuan-Chou Chen

发明人： Muh-Wang Liang ,  Chun-Kai Huang ,  Jiann-Cherng Chen ,  Tzong-Ming Wu ,  Ping-Yu Hu ,  Kuan-Chou Chen

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  Y10S414/14

摘要： The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.

摘要翻译： 本发明提出了一种用于将晶片装载和从半导体制造设备卸载的装置。 本发明使用两个具有高刚度的U形端口板支撑件分别与诸如导螺杆，轴轴承和引线装置的驱动装置接合，然后与诸如端口板，端口门和 基础。 组件由电机通过定时滑轮，同步皮带，惰轮，一对导螺杆，轴轴承和引导装置驱动。 编码器匹配反馈控制。 因此，可以实现负责向上和向下移动的晶片盒的主机构的精确定位，从而提高晶片定位传送的准确性和可靠性。 其次，通过使用进气过滤系统可以减少由主机构的运动引起的颗粒污染。 因为本发明采用模块化设计，每个单元的驱动源是隔离的，每个单元的电路都是隐藏的，使得整个结构最紧凑，组装/拆卸和维护更容易。

公开(公告)号：US06382896B1

公开(公告)日：2002-05-07

申请号：US09705728

申请日：2000-11-06

申请人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

发明人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  Y10S414/137 ,  Y10S414/139

摘要： A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.

摘要翻译： 前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达，使传动轴通过两个蜗杆转动两个蜗轮组，每个蜗轮组包括与一个蜗杆啮合的蜗轮， 固定在蜗轮上的径向延伸的定位板，以及具有矩形中心孔的垫圈构件，分别装配在矩形中心孔中的两个致动螺栓，并通过相应的螺母固定到蜗轮组，保持蜗杆的定位板 齿轮组保持直角，两个第一止动销适于在第一位置停止蜗轮组的定位板，其中致动螺栓关闭FOUP的盖子，以及两个第二止动销，其适于停止定位板 蜗轮组处于第二位置，其中致动螺栓打开FOUP的盖。

公开(公告)号：US06896470B1

公开(公告)日：2005-05-24

申请号：US09705733

申请日：2000-11-06

申请人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

发明人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

IPC分类号： B65G65/34 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

摘要翻译： 本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。 托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过 水平移动机构，并由提升机构降低。 相反，盖子在FOUP上关闭。 因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

公开(公告)号：US07618225B2

公开(公告)日：2009-11-17

申请号：US10994342

申请日：2004-11-23

申请人： Kuan-Chou Chen ,  Tzong-Ming Wu

发明人： Kuan-Chou Chen ,  Tzong-Ming Wu

IPC分类号： B65D85/00

CPC分类号： H01L21/67369 ,  Y10S414/13 ,  Y10S414/136 ,  Y10T74/20

摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

摘要翻译： 本发明公开了一种六杆连杆定位机构，其安装在由定位构件和四杆联动器形成的清洁容器内部，并且驱动模块在移动时具有停止在清洁容器的基部处的驱动模块的滑动件， 被迫相对于定位构件内的滑动方向向上移动，并且使得驱动模块的驱动连杆向上驱动四杆联动装置，并且进一步迫使四杆联动装置的第二连杆件将工件推向相应的 插入插槽在清洁容器上的盒子中。 六杆连杆定位机构仅具有一个自由度，使得其通过一点处的接触将工件在盒中水平移动到位，防止由摩擦引起的污染并且还提高移动稳定性。

公开(公告)号：US20100019117A1

公开(公告)日：2010-01-28

申请号：US12572477

申请日：2009-10-02

申请人： Kuan-Chou CHEN ,  Tzong-Ming Wu

发明人： Kuan-Chou CHEN ,  Tzong-Ming Wu

IPC分类号： H01L21/68 ,  H01L21/673 ,  F16M13/00

CPC分类号： H01L21/67369 ,  Y10S414/13 ,  Y10S414/136 ,  Y10T74/20

摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

摘要翻译： 本发明公开了一种六杆连杆定位机构，其安装在由定位构件和四杆联动器形成的清洁容器内部，并且驱动模块在移动时具有停止在清洁容器的基部处的驱动模块的滑动件， 被迫相对于定位构件内的滑动方向向上移动，并且使得驱动模块的驱动连杆向上驱动四杆联动装置，并且进一步迫使四杆联动装置的第二连杆件将工件推向相应的 插入插槽在清洁容器上的盒子中。 六杆连杆定位机构仅具有一个自由度，使得其通过一点处的接触将工件在盒中水平移动到位，防止由摩擦引起的污染并且还提高移动稳定性。

公开(公告)号：US20060060495A1

公开(公告)日：2006-03-23

申请号：US10994342

申请日：2004-11-23

申请人： Kuan-Chou Chen ,  Tzong-Ming Wu

发明人： Kuan-Chou Chen ,  Tzong-Ming Wu

IPC分类号： B65G1/00

CPC分类号： H01L21/67369 ,  Y10S414/13 ,  Y10S414/136 ,  Y10T74/20

摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

公开(公告)号：US20080160235A1

公开(公告)日：2008-07-03

申请号：US12005401

申请日：2007-12-27

申请人： Tzong-Ming Wu

发明人： Tzong-Ming Wu

IPC分类号： B32B1/08

CPC分类号： H01L21/67353 ,  G03F1/66 ,  H01L21/67359 ,  H01L21/67386 ,  H01L21/67396 ,  Y10T428/13

摘要： A clean container having an elastic positioning structure includes a support element and a back positioning element on a base. A cover is disposed for covering the base, and a positioning part is disposed between the cover and the base, which has two elastic arms extended laterally, and each elastic arm extends with a pushing surface respectively. When a plate of brittle material is placed on the base, and the cover is closed, the pushing surfaces are elastically pressed against and push the plate respectively, so that the plate moves backwards and presses against the back positioning element. Therefore, the plate is prevented from being damaged. Additionally, the base, the cover, and the positioning part are made of a conductive material, so that the electrostatic charges for the plate is conducted out of the clean container, and has a protective function of an electrostatic discharge.

摘要翻译： 具有弹性定位结构的干净的容器包括在基座上的支撑元件和后定位元件。 盖子被设置成覆盖基座，并且定位部件设置在盖子和基座之间，该定位部件具有横向延伸的两个弹性臂，并且每个弹性臂分别与推动表面一起延伸。 当将脆性材料板放置在基座上并且盖子关闭时，推动表面被弹性地按压并推动板，使得板向后移动并压靠在后定位元件上。 因此，防止板损坏。 此外，基座，盖和定位部分由导电材料制成，使得板的静电电荷被导出清洁容器，并且具有静电放电的保护功能。

公开(公告)号：US20060032786A1

公开(公告)日：2006-02-16

申请号：US10984926

申请日：2004-11-10

申请人： Tzong-Ming Wu ,  Tien-Lu Ho

发明人： Tzong-Ming Wu ,  Tien-Lu Ho

IPC分类号： B65D85/48

CPC分类号： H01L21/67386 ,  H01L21/67396

摘要： Disclosed is a clean container module, which includes a container body with a front opening, a rack inserted through the front opening into the inside of the container body, a top access board provided above the top panel of the container body, a bottom access board provided below the bottom panel of the container body, and the rack affix to the top access board and the bottom access board. Therefore, the rack, the top access board, and the bottom access board can provide a reasonable effect force transferring path when carrying the load, preventing obstruction of precision due to deformation of the container body during transportation. Further, the rack, the top access board, and the bottom access board can provide a satisfactory electrostatic protection.

摘要翻译： 公开了一种清洁的容器模块，其包括具有前开口的容器主体，通过前开口插入到容器主体的内部的齿条，设置在容器主体的顶板上方的顶部存取板，底部存取板 设置在容器主体的底板下方，并且机架固定在顶部存取板和底部存取板上。 因此，在搬运时，机架，顶板和底板可以提供合理的作用力传递路径，防止运输过程中容器主体变形引起的精密阻塞。 此外，机架，顶部存取板和底部存取板可以提供令人满意的静电保护。