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    Front-opening unified pod auto-loading structure
    1.
    发明授权
    Front-opening unified pod auto-loading structure 有权
    前开口统一吊舱自动装载结构

    公开(公告)号：US06896470B1

    公开(公告)日：2005-05-24

    申请号：US09705733

    申请日：2000-11-06

    申请人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

    发明人： Kuan-Chou Chen ,  Ping-Yu Hu ,  Kuei-Jung Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin ,  Wen-Yo Lee

    IPC分类号： B65G65/34 ,  H01L21/677 ,  H01L21/68

    CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

    摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

    摘要翻译： 本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。 托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过 水平移动机构，并由提升机构降低。 相反，盖子在FOUP上关闭。 因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

    Front-opening unified pod closing/opening control structure
    2.
    发明授权
    Front-opening unified pod closing/opening control structure 失效
    前开口统一吊舱关闭/开启控制结构

    公开(公告)号：US06382896B1

    公开(公告)日：2002-05-07

    申请号：US09705728

    申请日：2000-11-06

    申请人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

    发明人： Ping-Yu Hu ,  Kuan-Chou Chen ,  Tzong-Ming Wu ,  Wu-Lang Lin

    IPC分类号： B65G4907

    CPC分类号： H01L21/67772 ,  Y10S414/137 ,  Y10S414/139

    摘要： A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.

    摘要翻译： 前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达，使传动轴通过两个蜗杆转动两个蜗轮组，每个蜗轮组包括与一个蜗杆啮合的蜗轮， 固定在蜗轮上的径向延伸的定位板，以及具有矩形中心孔的垫圈构件，分别装配在矩形中心孔中的两个致动螺栓，并通过相应的螺母固定到蜗轮组，保持蜗杆的定位板 齿轮组保持直角，两个第一止动销适于在第一位置停止蜗轮组的定位板，其中致动螺栓关闭FOUP的盖子，以及两个第二止动销，其适于停止定位板 蜗轮组处于第二位置，其中致动螺栓打开FOUP的盖。

    Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment
    4.
    发明授权
    Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment 有权
    用于从半导体制造设备加载/卸载晶片的装置

    公开(公告)号：US06997664B1

    公开(公告)日：2006-02-14

    申请号：US09619388

    申请日：2000-07-19

    申请人： Muh-Wang Liang ,  Chun-Kai Huang ,  Jiann-Cherng Chen ,  Tzong-Ming Wu ,  Ping-Yu Hu ,  Kuan-Chou Chen

    发明人： Muh-Wang Liang ,  Chun-Kai Huang ,  Jiann-Cherng Chen ,  Tzong-Ming Wu ,  Ping-Yu Hu ,  Kuan-Chou Chen

    IPC分类号： B65G49/07

    CPC分类号： H01L21/67775 ,  Y10S414/14

    摘要： The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.

    摘要翻译： 本发明提出了一种用于将晶片装载和从半导体制造设备卸载的装置。 本发明使用两个具有高刚度的U形端口板支撑件分别与诸如导螺杆，轴轴承和引线装置的驱动装置接合，然后与诸如端口板，端口门和 基础。 组件由电机通过定时滑轮，同步皮带，惰轮，一对导螺杆，轴轴承和引导装置驱动。 编码器匹配反馈控制。 因此，可以实现负责向上和向下移动的晶片盒的主机构的精确定位，从而提高晶片定位传送的准确性和可靠性。 其次，通过使用进气过滤系统可以减少由主机构的运动引起的颗粒污染。 因为本发明采用模块化设计，每个单元的驱动源是隔离的，每个单元的电路都是隐藏的，使得整个结构最紧凑，组装/拆卸和维护更容易。

    Wafer-mapping method of wafer load port equipment
    5.
    发明授权
    Wafer-mapping method of wafer load port equipment 失效
    晶圆负载端口设备的晶圆映射方法

    公开(公告)号：US06452201B1

    公开(公告)日：2002-09-17

    申请号：US09619087

    申请日：2000-07-19

    申请人： Yu-Sheng Wang ,  Chien-Rong Huang ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Tzong-Ming Wu

    发明人： Yu-Sheng Wang ,  Chien-Rong Huang ,  Kuan-Chou Chen ,  Ping-Yu Hu ,  Tzong-Ming Wu

    IPC分类号： G01N2188

    CPC分类号： H01L21/67265 ,  Y10S414/136

    摘要： This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.

    摘要翻译： 本发明使用基于模式的信号来加速评估过程，作为替代复杂计算过程的手段。 通过实施绝对坐标来构建本发明，通过位置和两个光学传感器信号产生基于图案的信号，并且通过进行特征提取处理。 该过程产生了侧向和重叠问题的特征信号。 此外，通过转换信号，特征信号可以由数字数据处理器处理。 因此，本发明可以实现晶片映射的三个主要目的。

    Six-bar linkage positioning mechanism
    6.
    发明授权
    Six-bar linkage positioning mechanism 有权
    六杆联动定位机制

    公开(公告)号：US07618225B2

    公开(公告)日：2009-11-17

    申请号：US10994342

    申请日：2004-11-23

    申请人： Kuan-Chou Chen ,  Tzong-Ming Wu

    发明人： Kuan-Chou Chen ,  Tzong-Ming Wu

    IPC分类号： B65D85/00

    CPC分类号： H01L21/67369 ,  Y10S414/13 ,  Y10S414/136 ,  Y10T74/20

    摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

    摘要翻译： 本发明公开了一种六杆连杆定位机构，其安装在由定位构件和四杆联动器形成的清洁容器内部，并且驱动模块在移动时具有停止在清洁容器的基部处的驱动模块的滑动件， 被迫相对于定位构件内的滑动方向向上移动，并且使得驱动模块的驱动连杆向上驱动四杆联动装置，并且进一步迫使四杆联动装置的第二连杆件将工件推向相应的 插入插槽在清洁容器上的盒子中。 六杆连杆定位机构仅具有一个自由度，使得其通过一点处的接触将工件在盒中水平移动到位，防止由摩擦引起的污染并且还提高移动稳定性。

    Six-bar linkage positioning mechanism
    7.
    发明申请
    Six-bar linkage positioning mechanism 有权

    公开(公告)号：US20060060495A1

    公开(公告)日：2006-03-23

    申请号：US10994342

    申请日：2004-11-23

    申请人： Kuan-Chou Chen ,  Tzong-Ming Wu

    发明人： Kuan-Chou Chen ,  Tzong-Ming Wu

    IPC分类号： B65G1/00

    CPC分类号： H01L21/67369 ,  Y10S414/13 ,  Y10S414/136 ,  Y10T74/20

    摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

    Web camera
    8.
    发明授权
    Web camera 有权
    网络摄像头

    公开(公告)号：US07656433B2

    公开(公告)日：2010-02-02

    申请号：US11707967

    申请日：2007-02-20

    申请人： Chi-Hsien Wang ,  Wen-Ming Huang ,  Wei-Song Yeh ,  Chun-Chieh Lin ,  Kuan-Chou Chen

    发明人： Chi-Hsien Wang ,  Wen-Ming Huang ,  Wei-Song Yeh ,  Chun-Chieh Lin ,  Kuan-Chou Chen

    IPC分类号： H04N5/228 ,  H04N5/225 ,  H04N7/26

    CPC分类号： H04N19/184 ,  H04N19/91

    摘要： A web camera includes an image sensor, which takes an external image; a sensor interface, which is connected to the mage sensor to receive and convert the image taken by the image sensor into digital image data; at least one compression module, which is connected to the sensor interface to receive and compress the digital image data into compressed image data; and a USB interface, which is connected to the compression module to output the compressed image data to a host device having a USB interface port, such as a computer and a USB OTG device, for storage, playing back and other applications.

    摘要翻译： 网络摄像机包括拍摄外部图像的图像传感器; 传感器接口，其连接到法师传感器，以将图像传感器拍摄的图像接收并转换为数字图像数据; 至少一个压缩模块，其连接到传感器接口以将数字图像数据接收并压缩成压缩图像数据; 以及USB接口，其连接到压缩模块以将压缩的图像数据输出到具有诸如计算机和USB OTG设备的USB接口端口的主机设备，用于存储，回放和其他应用。

    VACUUM APPARATUS OF ROTARY MOTION ENTRY
    10.
    发明申请
    VACUUM APPARATUS OF ROTARY MOTION ENTRY 有权
    旋转运动入口的真空装置

    公开(公告)号：US20110079963A1

    公开(公告)日：2011-04-07

    申请号：US12615811

    申请日：2009-11-10

    申请人： Kuan-Chou Chen ,  Fu-Ching Tung ,  Chia-Ming Chen ,  Pei-Shan Wu ,  Tean-Mu Shen ,  Jung-Chen Ho

    发明人： Kuan-Chou Chen ,  Fu-Ching Tung ,  Chia-Ming Chen ,  Pei-Shan Wu ,  Tean-Mu Shen ,  Jung-Chen Ho

    IPC分类号： F16C33/10 ,  F16J15/32

    CPC分类号： F16C33/76 ,  F16C2300/62 ,  Y10S277/913

    摘要： A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.

    摘要翻译： 公开了一种旋转运动进入的真空装置，其包括：设置在真空系统的空腔壁上的轴套; 旋转轴，由轴套套管; 以及与驱动该旋转轴的旋转轴连接的变速器组; 其特征在于，所述旋转轴设置成穿过形成在所述轴套的基部上的孔，同时在所述孔内分开设置有第一轴承，第二轴承，密封环和轴密封件。 此外，轴密封件具有形成为朝向孔中心延伸的片状唇缘凸缘，其能够通过将旋转轴插入孔而远离真空系统延伸，从而使得唇缘凸缘 与大气压力紧密地与旋转轴啮合，从而将外界与真空系统隔离开来。