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公开(公告)号：US20180005364A1
公开(公告)日：2018-01-04
申请号：US15200586
申请日：2016-07-01
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen , James Jianguo Xu
Abstract: A dual mode inspector includes an optical inspector configured to detect a defect located at a first location on a sample, a microscope configured to capture an image of the defect at the first location on the sample, and a platform that is configured to support the sample. The sample is not removed from the platform between the detecting of the defect located at the first location on the sample and the capturing of the image of the defect at the first location on the sample. The dual mode optical inspector also includes a controller that causes the optical inspector to detect the defect located at the first location on the sample and causes the microscope to capture the image of the defect at the first location on the sample. The dual mode inspector also performs scanning lens distortion correction to improve the capturing of defect images.
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公开(公告)号：US10094787B2
公开(公告)日：2018-10-09
申请号：US15159626
申请日：2016-05-19
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen
IPC: G01N21/00 , G01N21/958 , G01N21/21 , G01N21/55
Abstract: An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least a portion of top surface specular reflection, a second detector that receives at least a portion of the bottom surface specular reflection. A turning mirror may also be included. The turning mirror is a switchable mirror that can be adjusted to a first position where the turning mirror reflects the top and bottom surface specular reflection, and can be adjusted to a second position where the turning mirror does not reflect the top or the bottom surface specular reflection. A first and second polarizing element may also be included to detect additional types of defects on either surface.
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公开(公告)号：US10475173B2
公开(公告)日：2019-11-12
申请号：US15200586
申请日：2016-07-01
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen , James Jianguo Xu
Abstract: A dual mode inspector includes an optical inspector configured to detect a defect located at a first location on a sample, a microscope configured to capture an image of the defect at the first location on the sample, and a platform that is configured to support the sample. The sample is not removed from the platform between the detecting of the defect located at the first location on the sample and the capturing of the image of the defect at the first location on the sample. The dual mode optical inspector also includes a controller that causes the optical inspector to detect the defect located at the first location on the sample and causes the microscope to capture the image of the defect at the first location on the sample. The dual mode inspector also performs scanning lens distortion correction to improve the capturing of defect images.
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Patent Agency Ranking
公开(公告)号：US20170336331A1
公开(公告)日：2017-11-23
申请号：US15159626
申请日：2016-05-19
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen
IPC: G01N21/958 , G01N21/55 , G01N21/21
CPC classification number: G01N21/958 , G01N21/21 , G01N21/55 , G01N2201/0636 , G01N2201/0638 , G01N2201/0683 , G01N2201/105
Abstract: An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least a portion of top surface specular reflection, a second detector that receives at least a portion of the bottom surface specular reflection. A turning mirror may also be included. The turning mirror is a switchable mirror that can be adjusted to a first position where the turning mirror reflects the top and bottom surface specular reflection, and can be adjusted to a second position where the turning mirror does not reflect the top or the bottom surface specular reflection. A first and second polarizing element may also be included to detect additional types of defects on either surface.
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公开(公告)号：US10769769B2
公开(公告)日：2020-09-08
申请号：US15200586
申请日：2016-07-01
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen , James Jianguo Xu
Abstract: A dual mode inspector includes an optical inspector configured to detect a defect located at a first location on a sample, a microscope configured to capture an image of the defect at the first location on the sample, and a platform that is configured to support the sample. The sample is not removed from the platform between the detecting of the defect located at the first location on the sample and the capturing of the image of the defect at the first location on the sample. The dual mode optical inspector also includes a controller that causes the optical inspector to detect the defect located at the first location on the sample and causes the microscope to capture the image of the defect at the first location on the sample. The dual mode inspector also performs scanning lens distortion correction to improve the capturing of defect images.
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公开(公告)号：US20170336330A1
公开(公告)日：2017-11-23
申请号：US15159266
申请日：2016-05-19
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen
IPC: G01N21/958 , G01N21/55 , G01N21/94
CPC classification number: G01N21/958 , G01L1/00 , G01N21/21 , G01N21/55 , G01N21/8806 , G01N21/94 , G01N2021/8854 , G01N2201/06113 , G01N2201/0683 , G01N2201/105 , G01N2201/1247
Abstract: A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.
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公开(公告)号：US09921169B2
公开(公告)日：2018-03-20
申请号：US15159266
申请日：2016-05-19
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen
IPC: G01N21/55 , G01N21/958 , G01N21/94
CPC classification number: G01N21/958 , G01L1/00 , G01N21/21 , G01N21/55 , G01N21/8806 , G01N21/94 , G01N2021/8854 , G01N2201/06113 , G01N2201/0683 , G01N2201/105 , G01N2201/1247
Abstract: A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.
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公开(公告)号：US08830457B1
公开(公告)日：2014-09-09
申请号：US13861378
申请日：2013-04-12
Applicant: Zeta Instruments, Inc.
Inventor： Steven W. Meeks , Rusmin Kudinar , Hung P. Nguyen
CPC classification number: G01N21/958 , G01N2021/8967
Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first waveplate, a second waveplate, a polarizing beam splitter, and a detector. The radiating source irradiates the first waveplate with a linearly polarized source beam generating a circularly polarized source beam, which irradiates a first position of on the time varying beam reflector. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. The reflected radiation from the transparent sample is directed via the telecentric lens and the time varying beam reflector to the second waveplate, which converts circularly polarized reflected radiation to linearly polarized reflected radiation including radiation that is vertically polarized and radiation that is horizontally polarized. The polarizing beam splitter redirects vertically polarized reflected radiation to the detector while horizontally polarized reflected radiation passes through.
Abstract translation: 光学检查器包括辐射源，时变光束反射器，远心扫描透镜，第一波片，第二波片，偏振分束器和检测器。 辐射源用产生圆偏振源光束的线性偏振源光束照射第一波片，其照射时变光束反射器上的第一位置。 时变光束反射器将源光束引导到远心扫描透镜，然后再将源光束引导到透明样品。 来自透明样品的反射辐射经由远心透镜和时变光束反射器引导到第二波片，其将圆偏振的反射辐射转换成线性偏振的反射辐射，其包括垂直极化的辐射和水平偏振的辐射。 偏振分束器将垂直偏振的反射辐射重定向到检测器，同时水平偏振的反射辐射通过。
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