公开(公告)号：US12013348B2

公开(公告)日：2024-06-18

申请号：US17077997

申请日：2020-10-22

申请人： BLANCCO TECHNOLOGY GROUP IP OY

发明人： William Fitzgerald ,  Daniel Öberg ,  Patrick Conway ,  Donal O'Shaughnessy ,  Donie Kelly ,  Tero Mononen

IPC分类号： G01N21/956 ,  G06F1/16 ,  G06K7/015 ,  G06K7/14

CPC分类号： G01N21/956 ,  G06K7/015 ,  G06K7/1417 ,  G01N2201/0221 ,  G01N2201/105 ,  G06F1/1605

摘要： There is presented a system and method for detecting mobile device fault conditions, particularly detecting defects in a display or housing of a mobile device. One or more cameras included within the mobile device are used with a reflecting surface in a test fixture to obtain properly aligned and formatted images of the external housing and display of the mobile device, and interactive guidance assists with placement and execution of diagnostics. A remote server conducts further analysis of the captured images, and then defect status may be returned to and displayed upon the mobile device screen.

公开(公告)号：US20240035978A1

公开(公告)日：2024-02-01

申请号：US18356979

申请日：2023-07-21

申请人： FEI DEUTSCHLAND GMBH

发明人： Rainer DAUM ,  Xaver VOEGELE

IPC分类号： G01N21/64 ,  G02B21/16 ,  G02B21/00 ,  G02B21/24

CPC分类号： G01N21/6458 ,  G02B21/16 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/0076 ,  G02B21/24 ,  G01N2201/08 ,  G01N2201/06113 ,  G01N2201/105

摘要： Disclosed are confocal microscope systems capable of spectral multiplexing. The systems beneficially provide multiple excitation spots on a sample plane simultaneously, and each spot can provide a different wavelength of excitation light. Scanning the excitation spots across a sample can therefore provide multispectral fluorescence imaging at a faster rate than through the sequential process of conventional laser scanning confocal microscopes. A method of generating a distribution from multiplexed spectral fluorescence data is also disclosed.

公开(公告)号：US20190187042A1

公开(公告)日：2019-06-20

申请号：US16203901

申请日：2018-11-29

申请人： 1087 Systems, Inc.

发明人： Matthias Wagner

IPC分类号： G01N15/14 ,  G01N21/39 ,  G01N21/53 ,  G02B21/00 ,  G01N15/06 ,  G01N15/00 ,  G01N21/35 ,  G01N21/3577

CPC分类号： G01N15/1436 ,  G01N15/00 ,  G01N15/06 ,  G01N15/1434 ,  G01N15/147 ,  G01N15/1475 ,  G01N21/35 ,  G01N21/3577 ,  G01N21/3581 ,  G01N21/39 ,  G01N21/53 ,  G01N21/552 ,  G01N2015/0065 ,  G01N2015/0687 ,  G01N2015/0693 ,  G01N2015/1006 ,  G01N2015/1443 ,  G01N2015/1447 ,  G01N2015/1488 ,  G01N2015/1497 ,  G01N2021/399 ,  G01N2201/068 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/006 ,  G02B21/0064 ,  G02B21/008

摘要： An analyzer of a component in a sample fluid includes an optical source and an optical detector defining a beam path of a beam, wherein the optical source emits the beam and the optical detector measures the beam after partial absorption by the sample fluid, a fluid flow cell disposed on the beam path defining an interrogation region in the a fluid flow cell in which the optical beam interacts with the sample fluid and a reference fluid; and wherein the sample fluid and the reference fluid are in laminar flow, and a scanning system that scans the beam relative to the laminar flow within the fluid flow cell, wherein the scanning system scans the beam relative to both the sample fluid and the reference fluid.

公开(公告)号：US10054551B2

公开(公告)日：2018-08-21

申请号：US15134278

申请日：2016-04-20

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Boris Golberg ,  Ron Naftali

IPC分类号： G01N21/88

CPC分类号： G01N21/8851 ,  G01N2201/063 ,  G01N2201/105

摘要： An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detection of radiation emitted from the sample as a result of each scan line; and wherein the processor may be configured to independently process detection signals relating to different scan lines.

公开(公告)号：US09921169B2

公开(公告)日：2018-03-20

申请号：US15159266

申请日：2016-05-19

申请人： Zeta Instruments, Inc.

发明人： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman ,  Hung P. Nguyen

IPC分类号： G01N21/55 ,  G01N21/958 ,  G01N21/94

CPC分类号： G01N21/958 ,  G01L1/00 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8806 ,  G01N21/94 ,  G01N2021/8854 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/105 ,  G01N2201/1247

摘要： A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.

公开(公告)号：US20170307539A1

公开(公告)日：2017-10-26

申请号：US15134278

申请日：2016-04-20

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Boris Golberg ,  Ron Naftali

IPC分类号： G01N21/88

CPC分类号： G01N21/8851 ,  G01N2201/063 ,  G01N2201/105

摘要： An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detection of radiation emitted from the sample as a result of each scan line; and wherein the processor may be configured to independently process detection signals relating to different scan lines.

公开(公告)号：US20170276615A1

公开(公告)日：2017-09-28

申请号：US15197408

申请日：2016-06-29

申请人： FOGALE NANOTECH

发明人： Gilles FRESQUET ,  Alain COURTEVILLE ,  Philippe GASTALDO

IPC分类号： G01N21/95 ,  G01B11/06 ,  G01N21/88 ,  G01B11/02

CPC分类号： G01J3/0208 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

摘要： A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration.

公开(公告)号：US20170276544A1

公开(公告)日：2017-09-28

申请号：US15282305

申请日：2016-09-30

申请人： FOGALE NANOTECH

发明人： Philippe GASTALDO

IPC分类号： G01J3/02 ,  G01J3/453 ,  G01J3/18

CPC分类号： G01N21/9501 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

摘要： A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.

公开(公告)号：US20170218534A1

公开(公告)日：2017-08-03

申请号：US15488342

申请日：2017-04-14

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Masami OHARA

IPC分类号： C30B15/10 ,  C30B15/14 ,  C30B29/06

CPC分类号： H01J37/32935 ,  C30B15/00 ,  C30B15/10 ,  C30B15/14 ,  C30B29/06 ,  C30B35/002 ,  G01N21/3563 ,  G01N21/65 ,  G01N21/68 ,  G01N21/95 ,  G01N2021/8477 ,  G01N2201/105 ,  G01N2201/12

摘要： A quality-evaluated vitreous silica crucible for pulling silicon single crystal is provided, wherein an inner surface of the vitreous silica crucible has regions where surface defects including brown rings are to be generated when pulling silicon single crystal. The regions are distinguished using an infrared absorption spectrum or a Raman shift of the regions, wherein a position of each region and/or a density of the regions are/is specified.

公开(公告)号：US09709508B2

公开(公告)日：2017-07-18

申请号：US15088620

申请日：2016-04-01

申请人： MITSUI HIGH-TEC, INC. ,  TOYOTA JIDOSHA KABUSHIKI KAISHA

发明人： Tadashi Shibuta ,  Masashi Matsumoto ,  Tatsuhiko Mizutani ,  Yoshitada Yamagishi

IPC分类号： G01N21/94 ,  G01N21/88 ,  G01N21/954

CPC分类号： G01N21/94 ,  G01N21/8851 ,  G01N21/954 ,  G01N2201/06146 ,  G01N2201/105

摘要： There is provided a method for inspecting a laminated iron core structured by laminating a plurality of iron core pieces-having a predetermined shape and including therein a cooling flow path allowing refrigerant to flow therethrough, the refrigerant being supplied and discharged through openings formed at different positions. The method includes arranging a light projecting part and a light receiving part of a photosensor in the openings of the cooling flow path, respectively, and detecting light from the light projecting part by the light receiving part to thereby inspect a penetrating state of the cooling flow path.