公开(公告)号：US09377487B2

公开(公告)日：2016-06-28

申请号：US13922539

申请日：2013-06-20

Applicant: mCube Inc.

Inventor： Daniel N. Koury, Jr. ,  Sudheer Sridharamurthy

IPC: H01G7/00 ,  G01R3/00 ,  G01P15/125 ,  B81B3/00 ,  G01C19/5783 ,  G01P15/08

CPC classification number: G01R3/00 ,  B81B3/0072 ,  B81B2203/0163 ,  B81B2203/0307 ,  G01C19/5783 ,  G01P15/125 ,  G01P2015/0857 ,  Y10T29/49007

Abstract: An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.

公开(公告)号：US09321629B2

公开(公告)日：2016-04-26

申请号：US14217376

申请日：2014-03-17

Applicant: mCube Inc.

Inventor： Daniel N. Koury, Jr.

IPC: H01L21/00 ,  B81C1/00 ,  H01L27/146 ,  G01P15/08

CPC classification number: B81C1/00134 ,  B81C1/00142 ,  G01P15/0802 ,  H01L27/14609 ,  H01L27/14643 ,  H01L2924/01013

Abstract: A method and structure for adding mass with stress isolation to MEMS. The structure has a thickness of silicon material coupled to at least one flexible element. The thickness of silicon material can be configured to move in one or more spatial directions about the flexible element(s) according to a specific embodiment. The apparatus also includes a plurality of recessed regions formed in respective spatial regions of the thickness of silicon material. Additionally, the apparatus includes a glue material within each of the recessed regions and a plug material formed overlying each of the recessed regions.

Abstract translation: 一种将应力隔离加入MEMS的方法和结构。 该结构具有耦合到至少一个柔性元件的硅材料的厚度。 根据具体实施例，硅材料的厚度可被配置为围绕柔性元件在一个或多个空间方向上移动。 该设备还包括形成在硅材料厚度的相应空间区域中的多个凹陷区域。 此外，该设备包括在每个凹陷区域内的胶合材料和形成在每个凹陷区域上的塞子材料。