-
公开(公告)号:US11798833B2
公开(公告)日:2023-10-24
申请号:US16801622
申请日:2020-02-26
Applicant: APPLIED MATERIALS, INC.
Inventor: Paul Wirth , Behzad Taheri
IPC: H01L21/687 , F15B9/03 , F15B11/076 , F15B9/14
CPC classification number: H01L21/68742 , F15B9/03 , F15B9/14 , F15B11/076
Abstract: Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.
-
2.
公开(公告)号:US5458047A
公开(公告)日:1995-10-17
申请号:US206453
申请日:1994-03-04
Applicant: Joseph F. McCormick
Inventor: Joseph F. McCormick
IPC: F15B11/076 , F15B13/16 , F15B15/22
CPC classification number: F15B11/076 , F15B2211/30525 , F15B2211/31588 , F15B2211/327 , F15B2211/6336 , F15B2211/7056 , F15B2211/765 , F15B2211/8613 , F15B2211/8855
Abstract: A hydraulic damper for a high speed actuator is provided to bring the actuator to rest with minimum oscillation around a target position. The hydraulic damper comprises a hydraulic circuit to communicate with the actuator over its entire positional range for the purpose of dampening a sudden stop of the actuator about a target position. The actuator is connected by a cable to a reel, the reel being connected to a shaft movement of the actuator produces rotation of the shaft. The shaft is also connected to a hydraulic motor which pumps hydraulic fluid through a hydraulic damper too, in effect, dampen the movement of the actuator.
Abstract translation: 提供了一种用于高速致动器的液压阻尼器,以使致动器以围绕目标位置的最小振荡来停止。 液压阻尼器包括液压回路,以在其整个位置范围内与致动器连通,以便抑制致动器围绕目标位置的突然停止。 致动器通过电缆连接到卷轴,卷轴连接到致动器的轴运动产生轴的旋转。 轴也连接到液压马达,液压马达也通过液压阻尼器泵送液压流体,实际上阻尼致动器的运动。
-
公开(公告)号:US5117739A
公开(公告)日:1992-06-02
申请号:US598387
申请日:1990-10-15
Applicant: Patrick F. Maher , David A. Tucker
Inventor: Patrick F. Maher , David A. Tucker
IPC: F15B11/076 , F15B15/06
CPC classification number: F15B11/076 , F15B15/063 , F15B2211/212 , F15B2211/216 , F15B2211/7107 , Y10T74/20207
Abstract: An apparatus (10) for providing rotary and linear motions, either simultaneously or separately. The apparatus (10) includes a rotary table assembly (14) that interconnects a rotary actuator assembly (12) and a power cylinder (18) or a comparable device. The rotary table assembly (14) includes a rotatable hub (16) to which the power cylinder (18) is mounted. Rotation of the hub (16) causes rotary motion of the entire power cylinder (18). Because of the interconnection between the rotary actuator assembly (12) and the power cylinder (18) using a rotary table assembly (14), a modular construction is provided whereby the power cylinder (18) can be positioned both vertically and laterally, depending upon the application or intended use of the apparatus (10). In one preferred embodiment, the rotary actuator assembly (12) converts linear movement to rotary motion using hydraulic oil to provide a smooth, adjustable control of the rotary shaft (32) of the rotary actuator assembly (12). Hydraulic oil is located in a reservoir unit that is connected contiguously adjacent to the tandem cylinders (82 and 84) of the rotary actuator assembly (12).
-
公开(公告)号:US4569274A
公开(公告)日:1986-02-11
申请号:US715374
申请日:1985-03-25
Applicant: Lee E. Stump
Inventor: Lee E. Stump
IPC: F15B11/076 , F15B15/22
CPC classification number: F15B11/076 , F15B2211/212 , F15B2211/216 , F15B2211/30525 , F15B2211/40584 , F15B2211/41527 , F15B2211/46 , F15B2211/473 , F15B2211/7055 , F15B2211/765
Abstract: An improved double-acting fluid cylinder with primary and secondary chambers of tandem construction, wherein the primary chamber is utilized to provide ram motion in a first direction and wherein the tandemly arranged secondary chamber is provided with a single biasing spring means to resiliently bias the secondary piston and to buffer and control the rate of motion induced in the ram, and also to drive the ram in a direction opposite the stroke of the first direction and at a time subsequent to the stroke so as to temper the ultimate amplitude or extent of motion induced in the ram in response to forces applied within the primary chamber.
Abstract translation: 一种改进的双作用液压缸,其具有串联构造的初级和次级室,其中所述主室用于沿第一方向提供冲头运动,并且其中所述串联布置的副室设有单个偏置弹簧装置,以弹性偏置所述次级 并且缓冲和控制在冲头中引起的运动速度,并且还可以在与第一方向的冲程相反的方向上以及在冲程之后的时间驱动冲头,以便调节最终的振幅或运动程度 响应于施加在主室内的力而在压头中引起。
-
公开(公告)号:US4481868A
公开(公告)日:1984-11-13
申请号:US515793
申请日:1983-07-21
Applicant: Lee E. Stump
Inventor: Lee E. Stump
IPC: F15B11/076 , F15B15/22
CPC classification number: F15B11/076 , F15B2211/212 , F15B2211/30525 , F15B2211/40507 , F15B2211/40584 , F15B2211/41527 , F15B2211/46 , F15B2211/473 , F15B2211/50554 , F15B2211/55 , F15B2211/625 , F15B2211/7055 , Y10S92/04
Abstract: An improved double-acting fluid cylinder with primary and secondary chambers of tandem construction, wherein the primary chamber is utilized to provide ram motion in a first direction and wherein the tandemly arranged secondary chamber is provided with a resiliently biased secondary piston to buffer and control the rate of motion induced in the ram, and also to drive the ram in a direction opposite the first direction so as to control the ultimate amplitude or extent of motion induced in the ram in response to forces applied within the primary chamber.
Abstract translation: 一种改进的双作用液压缸,其具有串联构造的初级和次级室,其中所述主室用于在第一方向上提供冲头运动,并且其中所述串联布置的副室设置有弹性偏压的次级活塞以缓冲和控制 在冲头中引起的运动速度,并且还沿着与第一方向相反的方向驱动冲头,以便响应于施加在主室内的力来控制在冲头中引起的运动的最终振幅或程度。
-
公开(公告)号:US3894477A
公开(公告)日:1975-07-15
申请号:US34339673
申请日:1973-03-21
Applicant: TSUBAKIMOTO CHAIN CO
Inventor: TOMIKAWA HISAO
IPC: G05D3/00 , B65G47/04 , B65G47/61 , F15B11/02 , F15B11/04 , F15B11/076 , F15B21/08 , G05B11/00 , F15B11/15 , F15B15/22
CPC classification number: B65G47/61 , F15B11/02 , F15B11/076 , F15B21/08 , F15B2211/30505 , F15B2211/30525 , F15B2211/3138 , F15B2211/327 , F15B2211/40515 , F15B2211/426 , F15B2211/455 , F15B2211/46 , F15B2211/6336 , F15B2211/6654 , F15B2211/7053 , F15B2211/7055
Abstract: A follow-up control device comprising a pneumatic cylinder connected in series or parallel with a hydraulic cylinder for controlling the movement of a load device relative to a further device, such as for transferring an article or commodity from a load device onto the hanger of a movable conveyor. The pneumatic cylinder functions as the power source for moving the load device, and the hydraulic cylinder functions as a speed control for controlling the speed of movement of the load device. The hydraulic cylinder is coupled with a substantially closed hydraulic circuit for controlling the movement of the load.
Abstract translation: 一种后续控制装置,包括与液压缸串联或并联连接的气动缸,用于控制负载装置相对于另一装置的运动,例如用于将物品或商品从负载装置传送到吊架上 活动输送机 气缸用作用于移动负载装置的动力源,液压缸用作用于控制负载装置的移动速度的速度控制。 液压缸与基本封闭的液压回路连接,用于控制负载的移动。
-
公开(公告)号:US3678805A
公开(公告)日:1972-07-25
申请号:US3678805D
申请日:1970-10-22
Applicant: HENRY WALTER WEYMAN
Inventor: WEYMAN HENRY WALTER
IPC: F15B11/076 , F15B15/14 , F15B15/22
CPC classification number: F15B11/076 , F15B15/1466 , F15B2211/40507 , F15B2211/40515 , F15B2211/411 , F15B2211/41536 , F15B2211/428 , F15B2211/8855
Abstract: A pneumatic cylinder assembly incorporating hydraulic damping, said assembly comprising a pneumatic cylinder, a pneumatic piston slidable within said cylinder and a pneumatic piston rod operatively connected to said pneumatic piston, and a hydraulic damping cylinder assembly incorporating a hydraulic cylinder arranged within the pneumatic piston rod, a hydraulic piston within said hydraulic cylinder and a hydraulic piston rod operatively connected to said hydraulic piston and secured to an end wall of said pneumatic cylinder remote from said pneumatic piston rod.
Abstract translation: 一种包含液压阻尼的气缸组件,所述组件包括气缸,可在所述气缸内滑动的气动活塞和可操作地连接到所述气动活塞的气动活塞杆,以及包括设置在所述气动活塞杆内的液压缸的液压阻尼气缸组件 ,所述液压缸内的液压活塞和可操作地连接到所述液压活塞并固定到所述气动缸的远离所述气动活塞杆的端壁的液压活塞杆。
-
公开(公告)号:US3302533A
公开(公告)日:1967-02-07
申请号:US46382965
申请日:1965-06-14
Applicant: SPHERE INVEST LTD
Inventor: HUTTER JAMES F , LEONARD KELLY
IPC: F15B11/076
CPC classification number: F15B11/076 , F15B2211/40515 , F15B2211/424 , F15B2211/7055 , F15B2211/75 , F15B2211/755 , F15B2211/8855
-
公开(公告)号:US3216332A
公开(公告)日:1965-11-09
申请号:US29008163
申请日:1963-06-24
Applicant: LIONEL PACIFIC INC
Inventor: DE CHAMBEAU THOMAS R
IPC: F15B11/076 , F16F9/18
CPC classification number: F15B11/076 , F15B2211/30505 , F15B2211/40515 , F15B2211/41536 , F15B2211/613 , F15B2211/7055 , F15B2211/72 , F16F9/18
-
公开(公告)号:US3042006A
公开(公告)日:1962-07-03
申请号:US6892060
申请日:1960-11-14
Applicant: APPLIED POWER IND INC
Inventor: BUTORAC JOHN R
IPC: B66F3/24 , B66F3/25 , B66F3/32 , F15B11/076
CPC classification number: B66F3/32 , B66F3/24 , F15B11/076 , F15B2211/40507 , F15B2211/41536 , F15B2211/7055 , F15B2211/755 , F15B2211/8855
-
-
-
-
-
-
-
-
-