公开(公告)号：US06282260B1

公开(公告)日：2001-08-28

申请号：US09458479

申请日：1999-12-09

Applicant: Lee Grodzins

Inventor： Lee Grodzins

IPC: G01N23201

CPC classification number: G01V5/0025 ,  G01N23/20 ,  G21K5/04

Abstract: A hand holdable inspection device for three-dimensional inspection of a volume distal to a surface. The inspection device has a hand-holdable unit including a source of penetrating radiation for providing a beam of specified cross-section and a detector arrangement for detecting penetrating radiation from the beam scattered by the object in the direction of the detector arrangement and for generating a scattered radiation signal. Additionally, the inspection device has a controller for characterizing the volume based at least on the scattered radiation signal. The detector arrangement includes one or more backscatter detectors that may be disposed asymmetrically with respect to the beam and at differing displacements with respect to the surface.

Abstract translation: 用于立体检查远离表面的体积的手持式检查装置。 检查装置具有可手持单元，其包括用于提供特定横截面的束的穿透辐射源和检测器装置，用于检测来自由物体沿检测器装置的方向散射的束的穿透辐射，并且用于产生 散射辐射信号。 此外，检查装置具有至少基于散射辐射信号来表征体积的控制器。 检测器装置包括一个或多个反向散射检测器，其可以相对于梁不对称地设置并且相对于表面具有不同的位移。

公开(公告)号：US06556652B1

公开(公告)日：2003-04-29

申请号：US09635212

申请日：2000-08-09

Applicant: Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

Inventor： Isaac Mazor ,  Boris Yokhin ,  Amos Gvirtzman

IPC: G01N23201

CPC classification number: G01B15/00 ,  G01N23/201

Abstract: A method for measurement of critical dimensions includes irradiating a surface of a substrate with a beam of X-rays. A pattern of the X-rays scattered from the surface due to features formed on the surface is detected and analyzed to measure a dimension of the features in a direction parallel to the surface.

Abstract translation: 用于测量临界尺寸的方法包括用X射线照射衬底的表面。 检测并分析由于表面上形成的特征而从表面散射的X射线的图案，以测量特征在平行于表面的方向上的尺寸。

公开(公告)号：US06751288B1

公开(公告)日：2004-06-15

申请号：US10261657

申请日：2002-10-02

Applicant: Jan P. Hessler

Inventor： Jan P. Hessler

IPC: G01N23201

CPC classification number: G01N23/201

Abstract: A detector for time-resolved small-angle x-ray scattering includes a nearly constant diameter, evacuated linear tube having an end plate detector with a first fluorescent screen and concentric rings of first fiber optic bundles for low angle scattering detection and an annular detector having a second fluorescent screen and second fiber optic bundles concentrically disposed about the tube for higher angle scattering detection. With the scattering source, i.e., the specimen under investigation, located outside of the evacuated tube on the tube's longitudinal axis, scattered x-rays are detected by the fiber optic bundles, to each of which is coupled a respective photodetector, to provide a measurement resolution, i.e., dq/q, where q is the momentum transferred from an incident x-ray to an x-ray scattering specimen, of 2% over two (2) orders of magnitude in reciprocal space, i.e., qmax/qmin≅100.

Abstract translation: 用于时间分辨的小角度x射线散射的检测器包括几乎恒定直径的真空线性管，其具有带有第一荧光屏的端板检测器和用于低角度散射检测的第一光纤束的同心环，并且环形检测器具有 第二荧光屏和第二光纤束，其围绕管同心地设置，用于更高角度的散射检测。 利用散射源，即正在研究的试样，位于管纵轴上的真空管外部，通过光纤束检测散射的X射线，其中每个光纤束连接相应的光电检测器，以提供测量 分辨率，即dq / q，其中q是从入射x射线转移到X射线散射样本的动量，在倒数空间中超过两（2）个数量级的2％，即qmax /qmin≅100 。

公开(公告)号：US06510201B2

公开(公告)日：2003-01-21

申请号：US10047970

申请日：2002-01-16

Applicant: Gerhard Martens

Inventor： Gerhard Martens

IPC: G01N23201

CPC classification number: G01N23/20

Abstract: An apparatus for measuring the pulse transmission spectrum of elastically scattered quantities includes at least one diaphragm displaceable in a y-direction for switching between fine and coarse local resolution of the examined partial volumes of an examination object, wherein the diaphragm narrows the effective ray width transversely of a scanning direction, and a diaphragm system displaceable in a x-direction for limiting and extension of the partial volume in a z-direction, wherein the diaphragm system includes at least two circular ring diaphragms arranged one above the other and identical with respect to their circular ring structure, and wherein the circular ring diaphragms are arranged at a relative offset for reducing an effective imaging slot width or a detector slot width.

公开(公告)号：US06430257B1

公开(公告)日：2002-08-06

申请号：US09646319

申请日：2000-11-21

Applicant: Nikolaj Bruun ,  Jan Lundgren ,  Steen Teller ,  Thomas Aaboe Jensen

Inventor： Nikolaj Bruun ,  Jan Lundgren ,  Steen Teller ,  Thomas Aaboe Jensen

IPC: G01N23201

CPC classification number: B23K26/04 ,  G01B15/00

Abstract: The invention refers to a method for determining the position of an elongated narrow object relative the surface of an obstructing disk-like body in front of said object and oriented at an angle thereto, by means of electromagnetic ionizing radiation, for guidance of the movement of an associated laser welding equipment For providing the carrying out of this method with high speed and greatest precision when manufacturing sandwich elements with conical or double-curved surface it is suggested according to the invention that from the side of the body remote from the object is directed, under approximate movement in the longitudinal direction of the object one precisely collimated radiation beam obliquely to the object under simultaneous scanning motion at right angles thereto, that the radiation back-scattered from the object is collected at the same side of the body and is brought to form a signal which is compared with memory-stored predetermined preference signals for the desired correct position of the object relative the body. The invention also suggests a device for carrying out this method.

Abstract translation: 本发明涉及一种用于通过电磁电离辐射来确定细长的窄物体相对于所述物体前面的阻挡盘状物体的表面的位置并以其角度定向的方法，用于引导所述物体的运动 相关联的激光焊接设备为了在制造具有圆锥形或双曲面的夹层元件时，以高速度和最高精度提供该方法的实施，根据本发明建议，从身体远离物体的一侧被定向 在物体的纵向近似移动时，在与其成直角的同时扫描运动的同时倾斜地对准物体的一个精确准直的辐射束，从物体反向散射的辐射被收集在身体的同一侧，并被带到 以形成与用于期望的cor的存储器存储的预定偏好信号进行比较的信号 物体相对于身体的直角位置。 本发明还提出了一种用于执行该方法的装置。

公开(公告)号：US06424695B1

公开(公告)日：2002-07-23

申请号：US09465103

申请日：1999-12-16

Applicant: Lee Grodzins ,  William Adams

Inventor： Lee Grodzins ,  William Adams

IPC: G01N23201

CPC classification number: G01V5/0025 ,  G01N23/04 ,  G01N23/20 ,  G21K5/04

Abstract: A system and a method for determining the depth of an object with respect to a surface behind which the object is concealed. The intensity of x-rays backscattered from the object is measured by at least two backscatter detectors disposed at different positions with respect to the scattering object. The depth of a scattering source within the volume penetrated by the x-rays is derived from the ratio of scattered x-rays measured by the detectors.

Abstract translation: 一种用于确定物体相对于隐藏对象的表面的深度的系统和方法。 通过设置在相对于散射物体的不同位置处的至少两个后向散射检测器测量从物体反向散射的x射线的强度。 由X射线穿透的体积内的散射源的深度来自于由检测器测量的散射x射线的比例。

公开(公告)号：US06823043B2

公开(公告)日：2004-11-23

申请号：US10179323

申请日：2002-06-25

Applicant: Paul F. Fewster ,  Gareth A. Tye

Inventor： Paul F. Fewster ,  Gareth A. Tye

IPC: G01N23201

CPC classification number: G01N23/20

Abstract: A method for determining parameters of a material includes comparing a range of an actual x-ray scattering profile with a range of an expected x-ray scattering profile for a material sample. The expected profile is modified to match the actual profile and this is then repeated with an ever-larger range of the profiles until two profiles match across the whole of their profile. From the last modified expected profile the parameters of the material are determined.

Abstract translation: 用于确定材料参数的方法包括将实际x射线散射曲线的范围与材料样品的预期x射线散射曲线的范围进行比较。 修改预期的配置文件以匹配实际配置文件，然后重复使用配置文件的更大范围，直到两个配置文件在整个配置文件中匹配。 从最后修改的预期轮廓中确定材料的参数。

公开(公告)号：US06735279B1

公开(公告)日：2004-05-11

申请号：US10348487

申请日：2003-01-21

Applicant: Alan M. Jacobs ,  Edward T. Dugan

Inventor： Alan M. Jacobs ,  Edward T. Dugan

IPC: G01N23201

CPC classification number: G01N23/201

Abstract: A snapshot backscatter radiography (SBR) system and related method includes at least one penetrating radiation source, and at least one radiation detector. The radiation detector is interposed between an object to be interrogated and the radiation source. The radiation detector transmits a portion of the forward radiation from the radiation source to the object. A portion of the transmitted radiation is scattered by the object and is detected by the detector. An image of the object can be obtained by subtracting the forward radiation detected at the detector, or an estimate thereof, from a total of all radiation detected by the detector. Integrated circuit inspection, land mine detection, and luggage or cargo screening systems can be SBR based.

Abstract translation: 快照后向散射照相（SBR）系统和相关方法包括至少一个穿透辐射源和至少一个辐射检测器。 放射线检测器介于要询问的物体和辐射源之间。 辐射检测器将来自辐射源的前向辐射的一部分传输到物体。 被发射的辐射的一部分被物体散射并由检测器检测。 可以通过从由检测器检测到的全部辐射的总和中减去在检测器处检测到的正向辐射或其估计来获得对象的图像。 集成电路检查，地雷检测，行李或货物检测系统可以基于SBR。

公开(公告)号：US06643354B2

公开(公告)日：2003-11-04

申请号：US10124776

申请日：2002-04-17

Applicant: Louis N. Koppel ,  Craig E. Uhrich ,  Jon Opsal

Inventor： Louis N. Koppel ,  Craig E. Uhrich ,  Jon Opsal

IPC: G01N23201

CPC classification number: G01N23/20

Abstract: The present invention relates to the calibration and alignment of an X-ray reflectometry (“XRR”) system for measuring thin films. An aspect of the present invention describes a method for accurately determining C0 for each sample placement and for finding the incident X-ray intensity corresponding to each pixel of a detector array and thus permitting an amplitude calibration of the reflectometer system. Another aspect of the present invention relates to a method for aligning an angle-resolved X-ray reflectometer that uses a focusing optic, which may preferably be a Johansson crystal. Another aspect of the present invention is to validate the focusing optic. Another aspect of the present invention relates to the alignment of the focusing optic with the X-ray source. Another aspect of the present invention concerns the correction of measurements errors caused by the tilt or slope of the sample. Yet another aspect of the present invention concerns the calibration of the vertical position of the sample.

公开(公告)号：US06347132B1

公开(公告)日：2002-02-12

申请号：US09320006

申请日：1999-05-26

Applicant: Martin Annis

Inventor： Martin Annis

IPC: G01N23201

CPC classification number: G01V5/0091 ,  G01N23/04

Abstract: An x-ray inspection system for automatically detecting nuclear weapons materials generates a high energy x-ray fan beam or a traveling x-ray pencil beam that traverses an object under inspection. An x-ray detector detects x-ray energy that passes through the object and provides a detected signal indicative thereof. The detected signal is processed to detect the presence of an area of very high x-ray attenuation within the object under inspection, which is indicative of nuclear weapons materials. Because of the high atomic number (Z) and high density of nuclear weapons materials Uranium and Plutonium, both of these materials attenuate (i.e., absorb) incident x-rays significantly more than ordinary materials. That is, very high Z materials such as nuclear weapons materials, produce no x-rays outside of their block of material because the x-rays are self absorbed within the very high Z materials. Therefore, these materials can be detected by a transmission detectors, or by combining the readings from transmission and scatter detectors, if a pencil beam system is employed.

Abstract translation: 用于自动检测核武器材料的X射线检查系统产生高能X射线扇形光束或穿过检查对象的行进x射线笔形光束。 X射线检测器检测穿过物体的X射线能量，并提供表示其的检测信号。 检测到的信号被处理以检测在被检查物体内是否存在非常高的x射线衰减的区域，这表示核武器材料。 由于原子序数（Z）和高密度的核武器材料铀和钚，这两种材料都比普通材料显着地衰减（即吸收）入射的X射线。 也就是说，非常高的Z材料，如核武器材料，不会在其材料块之外产生X射线，因为x射线在非常高的Z材料内自吸。 因此，如果采用笔式光束系统，则这些材料可以由透射检测器检测，或通过组合来自透射和散射检测器的读数。