公开(公告)号：US07423269B1

公开(公告)日：2008-09-09

申请号：US11360325

申请日：2006-02-22

申请人： Amir Azordegan ,  Hedong Yang ,  Gongyuan Qu ,  Gian Francesco Lorusso

发明人： Amir Azordegan ,  Hedong Yang ,  Gongyuan Qu ,  Gian Francesco Lorusso

IPC分类号： G21K7/00 ,  G21N23/00

CPC分类号： H01J37/222 ,  G03F7/70625 ,  H01J37/1478 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2809 ,  H01J2237/2817

摘要： One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.

摘要翻译： 一个实施例涉及使用离轴光束倾斜的自动微距对准方法。 在多个光束倾斜的基底上从感兴趣的区域收集图像数据。 确定要在该区域中识别的特征的潜在边缘，并且执行边缘相关数据的计算分析以肯定地识别特征。 另一实施例涉及使用离轴光束倾斜在特征上自动检测底切的方法。 对于每个光束倾斜，确定一侧的边缘测量与另一侧的边缘测量之间的差数据。 根据差异数据检测该特征的底切。 还公开了其他实施例。

公开(公告)号：US08237119B2

公开(公告)日：2012-08-07

申请号：US12414759

申请日：2009-03-31

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： G21N23/00 ,  G21K7/00

CPC分类号： H01J37/28 ,  G06T5/002 ,  G06T5/008 ,  G06T7/11 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/24495

摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.

摘要翻译： 使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分 图片。 此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。

公开(公告)号：US07443947B2

公开(公告)日：2008-10-28

申请号：US10556918

申请日：2004-04-19

申请人： Carl J. Brunnett

发明人： Carl J. Brunnett

IPC分类号： A61B6/00 ,  G21N23/00

CPC分类号： H03M1/127 ,  A61B6/032 ,  G01T1/17 ,  G01T1/2985

摘要： In a method for measuring detected radiation, an analog data signal is converted to a digital data signal having aperiodic data pulses varying with intensity of the analog data signal. A time signal indicative of data intervals is produced. The data pulses are counted. A data count is stored in a start location and a corresponding time value is stored in a start location each time a data pulse occurs until a measured data interval starts. After a next data interval is detected, the data count is stored in an end location and a corresponding time value is stored in an end location when the next data pulse occurs. An average intensity of the detected radiation for the measured data interval is determined from the stored data counts and time values. A CT scanner (10) for measuring detected radiation includes a channel circuit (56), a storage circuit (60), a control circuit (58), and a processor (62).

摘要翻译： 在用于测量检测到的辐射的方法中，模拟数据信号被转换成具有以模拟数据信号的强度变化的非周期数据脉冲的数字数据信号。 产生指示数据间隔的时间信号。 对数据脉冲进行计数。 数据计数存储在开始位置，并且每当数据脉冲发生直到测量的数据间隔开始时，对应的时间值被存储在开始位置。 在检测到下一个数据间隔之后，当发生下一个数据脉冲时，数据计数被存储在结束位置中，并且相应的时间值被存储在结束位置。 根据存储的数据计数和时间值确定测量数据间隔的检测辐射的平均强度。 用于测量检测到的辐射的CT扫描器（10）包括通道电路（56），存储电路（60），控制电路（58）和处理器（62）。

公开(公告)号：US07009192B2

公开(公告)日：2006-03-07

申请号：US10864420

申请日：2004-06-10

申请人： Hiroyuki Suzuki ,  Shouji Tomida

发明人： Hiroyuki Suzuki ,  Shouji Tomida

IPC分类号： H01J37/21 ,  G21K7/00 ,  G21N23/00

CPC分类号： H01J37/21 ,  H01J37/20 ,  H01J2237/20235 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/31749

摘要： The present invention enables the same target to be precisely machined and observed in a short time when a focal distance of a charged particle beam is changed or if the focal distances of charged particle beams are not equal on a sample. The present invention provides a charged particle beam application apparatus having a stage device used to move a sample in at least three axial directions, a charged particle beam optical system having an optical axis inclined from a surface of the sample to irradiate the sample with a charged particle beam, and a display device that displays an image formed by the charged particle beam optical system, the apparatus including a correction table indicating a relationship between both focal distance and optical conditions for said charged particle beam optical system and a position of the sample, and an arithmetic section that calculates the position of the sample, the arithmetic section calculating the amount of correction for the position of the sample so that when the focal distance of the charged particle beam changes, a position of a target on the sample is placed in the center of a visual field of a screen of the display device.

摘要翻译： 本发明使得当带电粒子束的焦距改变或者带电粒子束的焦距在样本上不相等时，能够在短时间内精确地加工和观察相同的靶。 本发明提供了一种带电粒子束施加装置，其具有用于沿至少三个轴向移动样品的载物台装置，带电粒子束光学系统，其具有从样品表面倾斜的光轴，以向样品照射带电 粒子束以及显示由带电粒子束光学系统形成的图像的显示装置，该装置包括指示所述带电粒子束光学系统的焦距和光学条件两者之间的关系的校正表以及样本的位置， 以及运算部，其计算样本的位置，算术部计算样本的位置的校正量，使得当带电粒子束的焦距变化时，将样本上的目标的位置置于 显示设备的屏幕的视野的中心。