Micro-electro mechanical system device using in-plane motion
    91.
    发明申请
    Micro-electro mechanical system device using in-plane motion 审中-公开
    微机电系统装置采用平面运动

    公开(公告)号:US20070290572A1

    公开(公告)日:2007-12-20

    申请号:US11708633

    申请日:2007-02-21

    IPC分类号: H02N1/00

    CPC分类号: H02N1/008 G02B26/0841

    摘要: A micro-electro mechanical system (MEMS) device using in-plane motion is provided. The MEMS device includes a stage which is supported by an axle and an actuator which provides a push-pull exciting force to the axle at upper and lower eccentric positions of an axis of the axle. The actuator includes a plurality of fixed combs; a plurality of driving combs for engagement with the fixed combs, the driving combs being translationally vibrated between engaging and disengaging positions by an electrostatic attractive force periodically generated by the fixed combs; a driving frame which connects and supports the driving combs, the driving frame being vibrated together with the driving combs; and a motion transmitting member transmitting the translational vibration of the driving frame to the eccentric positions of the axle. With this MEMS device, the comb structure can be easily expanded to improve the dynamic performance and high-speed/long displacement characteristic.

    摘要翻译: 提供了使用平面内运动的微机电系统(MEMS)装置。 MEMS器件包括由轴支撑的台和致动器,其在轴的轴线的上偏心位置和下偏心位置处向轴提供推挽激励力。 致动器包括多个固定梳; 多个用于与固定梳状物接合的驱动梳,所述驱动梳通过由所述固定梳定期产生的静电吸引力在接合位置和脱离位置之间平移地振动; 驱动框架,其连接和支撑驱动梳,所述驱动框架与所述驱动梳一起振动; 以及运动传递构件,其将所述驱动框架的平移振动传递到所述轴的偏心位置。 利用该MEMS器件,可以容易地扩展梳状结构,以提高动态性能和高速/长位移特性。

    Field emission display having gate plate
    92.
    发明授权
    Field emission display having gate plate 有权
    具有门板的场发射显示

    公开(公告)号:US07309954B2

    公开(公告)日:2007-12-18

    申请号:US10745736

    申请日:2003-12-23

    IPC分类号: H01J1/62

    摘要: The present invention relates to a field emission display in which a gate plate having a gate hole and a gate electrode around the gate hole is formed between an anode plate having phosphor and a cathode plate having a field emitter and a control device for controlling field emission current, wherein the field emitter of the cathode plate is constructed to be opposite to the phosphor of the anode plate through the gate hole.According to the present invention, it is possible to significantly reduce the display row/column driving voltage by applying scan and data signals of the field emission display to the control device of each pixel, And the present invention is directed to improve the brightness of the field emission display in such a manner that the electric field necessary for field emission is applied through the gate electrode of the gate plate to freely control the distance between the anode plate and the cathode plate, so that a high voltage can be applied to the anode.

    摘要翻译: 本发明涉及一种场致发射显示器,其中在具有荧光体的阳极板和具有场发射极的阴极板之间形成具有栅极孔和围绕栅极孔的栅电极的栅极板和用于控制场致发射的控制装置 电流,其中阴极板的场发射极被构造成通过栅极孔与阳极板的荧光体相对。 根据本发明,通过将场发射显示的扫描和数据信号施加到每个像素的控制装置,可以显着降低显示行/列驱动电压。本发明旨在提高 以通过栅极板的栅电极施加场发射所需的电场以自由地控制阳极板和阴极板之间的距离的方式进行场发射显示,从而可以向阳极施加高电压 。

    Actuator and two-dimensional scanner
    93.
    发明申请
    Actuator and two-dimensional scanner 审中-公开
    执行器和二维扫描仪

    公开(公告)号:US20070268099A1

    公开(公告)日:2007-11-22

    申请号:US11654582

    申请日:2007-01-18

    IPC分类号: H01H51/22

    摘要: An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.

    摘要翻译: 执行器和二维扫描仪。 致动器和二维扫描仪包括基板,围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板,形成磁力的磁场产生部分,其作用在 与第二轴平行的方向,在第一轴的位置具有最小尺寸,与第一轴和第二轴的至少一个同轴设置的支撑构件,连接基板和可动板,并形成 可移动板的枢转轴线和驱动线圈部分,可动板的驱动力被施加到可动板上,以便相对于第一轴线和第二轴线的交叉点具有点对称形状 轴。

    LIGHT EMISSION DEVICE, METHOD OF MANUFACTURING ELECTRON EMISSION UNIT FOR THE LIGHT EMISSION DEVICE, AND DISPLAY DEVICE HAVING THE LIGHT EMISSION DEVICE
    94.
    发明申请
    LIGHT EMISSION DEVICE, METHOD OF MANUFACTURING ELECTRON EMISSION UNIT FOR THE LIGHT EMISSION DEVICE, AND DISPLAY DEVICE HAVING THE LIGHT EMISSION DEVICE 失效
    光发射装置,用于光发射装置的电子发射装置的制造方法和具有发光装置的显示装置

    公开(公告)号:US20070267639A1

    公开(公告)日:2007-11-22

    申请号:US11746579

    申请日:2007-05-09

    IPC分类号: H01L33/00

    CPC分类号: H01J9/18 H01J61/305 H01J63/06

    摘要: A light emission device and a display device having the light emission device are provided. The light emission device includes: a first substrate and a second substrate facing the first substrate; a plurality of first electrodes and a plurality of second electrodes on an inner surface of the first substrate, the first electrodes crossing the second electrodes; a plurality of electron emission regions electrically connected to the first electrodes at crossing regions where the first electrodes cross the second electrode; a light emission unit on an inner surface of the second substrate; and at least one spacer between the first and second substrates, Here, a shortest distance D between the spacer and the electron emission regions satisfies the following condition: 500 μm≦D≦2Dh, where, Dh is a diagonal length of at least one of the crossing regions.

    摘要翻译: 提供了具有发光装置的发光装置和显示装置。 发光装置包括:第一基板和面向第一基板的第二基板; 多个第一电极和多个第二电极,位于第一基板的内表面上,第一电极与第二电极交叉; 在所述第一电极与所述第二电极交叉的交叉区域与所述第一电极电连接的多个电子发射区域; 在第二基板的内表面上的发光单元; 以及在第一和第二基底之间的至少一个间隔物。 这里,间隔物和电子发射区域之间的最短距离D满足以下条件:<?in-line-formula description =“In-line formula”end =“lead”≥500mum <= D <= 2Dh, <?in-line-formula description =“In-line formula”end =“tail”?>其中,Dh是至少一个交叉区域的对角线长度。

    Frequency tunable resonant scanner
    95.
    发明授权
    Frequency tunable resonant scanner 失效
    频率可调共振扫描仪

    公开(公告)号:US07242511B2

    公开(公告)日:2007-07-10

    申请号:US10963693

    申请日:2004-10-14

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0841

    摘要: Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

    摘要翻译: 提供了一种单轴驱动光学扫描器,其包括基板,从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架,从两个边缘侧的中间部分支撑台阶的扭簧 固定到基板以支撑扭簧的支撑部分,相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极 舞台。

    Micro mirror and method for fabricating the same
    96.
    发明授权
    Micro mirror and method for fabricating the same 有权
    微镜及其制造方法

    公开(公告)号:US07185994B2

    公开(公告)日:2007-03-06

    申请号:US11000004

    申请日:2004-12-01

    IPC分类号: G02B7/182

    CPC分类号: G02B26/0833 G02B26/105

    摘要: A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

    摘要翻译: 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转地驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明,通过存在椭圆形邻接部分,可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。

    Optical scanner and method of fabricating the same
    97.
    发明授权
    Optical scanner and method of fabricating the same 失效
    光学扫描器及其制造方法

    公开(公告)号:US07180647B2

    公开(公告)日:2007-02-20

    申请号:US10226176

    申请日:2002-08-23

    IPC分类号: G02F1/03

    CPC分类号: G02B26/0841

    摘要: An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.

    摘要翻译: 提供了一种光学扫描器及其制造方法。 光学扫描器包括基底,框架,H形台,支架和台架驱动结构。 在基底基板上形成具有预定图案的布线层。 框架具有形成在基底基板上的矩形框架形状。 H形台具有相对于单轴中心轴在框架中执行跷跷板运动并位于单轴中心轴线上的中心区域,以及从中心区域的两侧延伸的四个延伸区域,单轴 中心轴通过,平行于单轴中心轴。 支持者具有位于单轴中心轴上的支撑梁,并且连接到从支撑梁延伸并且连接到平台的中心区域的框架和扭杆。 舞台驱动结构分别在舞台下方和底座衬底上面具有移动梳状电极和固定梳状电极。 多个梳状电极可以形成在延伸区域上。 因此,可以大大提高驱动力,这导致使用相当低的电压获得类似的驱动速度。 此外,对于高速驾驶,舞台的重量应该大大降低。 为此,舞台被切成多个阶段。 此外,为了增加驱动力,在台的右侧和左侧另外形成多个梳状电极。

    Video signal scanning method and apparatus
    98.
    发明申请
    Video signal scanning method and apparatus 审中-公开
    视频信号扫描方法和装置

    公开(公告)号:US20060181611A1

    公开(公告)日:2006-08-17

    申请号:US11340678

    申请日:2006-01-27

    IPC分类号: H04N3/02

    CPC分类号: H04N5/126 H04N9/3129

    摘要: A method and apparatus for scanning a video signal are provided. The method includes: detecting an operating frequency of a drive signal for an optical scanner which scans the video signal; detecting a sync signal error per frame between a vertical sync signal corresponding to the video signal and a horizontal sync signal corresponding to the operating frequency; adjusting a frequency of the vertical sync signal to allow the horizontal sync signal corresponding to the operating frequency to be synchronized with the vertical sync signal corresponding to the video signal, for each frame, in response to the sync signal error; and scanning the video signal according to the horizontal sync signal corresponding to the operating frequency and the vertical sync signal having an adjusted frequency.

    摘要翻译: 提供了一种用于扫描视频信号的方法和装置。 该方法包括:检测扫描视频信号的光学扫描器的驱动信号的工作频率; 检测对应于视频信号的垂直同步信号与对应于操作频率的水平同步信号之间的每帧同步信号误差; 调整垂直同步信号的频率,以响应于同步信号误差,允许对应于工作频率的水平同步信号与对应于每个帧的视频信号的垂直同步信号同步; 并根据与工作频率对应的水平同步信号和具有调整频率的垂直同步信号扫描视频信号。

    Method for manufacturing a micro-actuator
    99.
    发明授权
    Method for manufacturing a micro-actuator 失效
    微型致动器的制造方法

    公开(公告)号:US07083737B2

    公开(公告)日:2006-08-01

    申请号:US10791756

    申请日:2004-03-04

    IPC分类号: H01L21/302

    摘要: A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.

    摘要翻译: 公开了一种具有能够进行跷跷板运动的平台的微致动器及其制造方法。 在本发明的微型致动器中,在台架的底部形成多个平行的驱动梳状电极,在基板上形成多个平行的固定梳状电极。 在舞台的两侧是一个扭杆,可以实现跷跷板的动作。 扭杆由包括第一框架层和第二框架层的框架支撑。 扭杆和第一框架层形成一体。 第一和第二框架层通过在金属层之间的金属共晶接合层结合。

    Method of forming a buffer dielectric layer in a semiconductor device and a method of manufacturing a thin film transistor using the same
    100.
    发明授权
    Method of forming a buffer dielectric layer in a semiconductor device and a method of manufacturing a thin film transistor using the same 失效
    在半导体器件中形成缓冲电介质层的方法以及使用其制造薄膜晶体管的方法

    公开(公告)号:US07045469B2

    公开(公告)日:2006-05-16

    申请号:US10679021

    申请日:2003-10-02

    IPC分类号: H01L21/31 H01L21/469

    摘要: A method of forming a buffer dielectric film in a semiconductor device and a method of manufacturing a thin film transistor using the same are disclosed. By forming a buffer dielectric film containing porous silica material having low heat conductivity between the amorphous silicon layer and the substrate to minimize the heat transfer to the substrate and forming the polysilicon active layer using the laser in the state of securing the crystal growth time, polysilicon active layer having a maximized crystal particle size can be formed to improve the charge mobility of the device, in case of crystallizing the amorphous silicon layer by the ELA method, and the length of the SLG (Super Lateral Grain) can be increased to prevent the nucleation phenomenon from being generated at the portion that the crystals meet and thus the moved number of the mask can be minimized and the throughput of the process can be improved, though the interval of the mask pattern is increased, in case of crystallizing the amorphous silicon by the SLS method.

    摘要翻译: 公开了一种在半导体器件中形成缓冲电介质膜的方法和使用其制造薄膜晶体管的方法。 通过在非晶硅层和衬底之间形成含有导热性低的多孔二氧化硅材料的缓冲电介质薄膜,以最小化在衬底上的热传递,并且在保证晶体生长时间的状态下使用激光形成多晶硅有源层,多晶硅 可以形成具有最大晶体粒径的活性层,以通过ELA方法使非晶硅层结晶的情况下提高器件的电荷迁移率,并且可以增加SLG(超侧面晶粒)的长度以防止 在晶体相遇的部分产生的成核现象可以最小化,并且由于掩模图案的间隔增加,在结晶非晶硅的情况下,可以使掩模的移动次数最小化并且可以提高处理的生产量 通过SLS方法。