摘要:
A micro-electro mechanical system (MEMS) device using in-plane motion is provided. The MEMS device includes a stage which is supported by an axle and an actuator which provides a push-pull exciting force to the axle at upper and lower eccentric positions of an axis of the axle. The actuator includes a plurality of fixed combs; a plurality of driving combs for engagement with the fixed combs, the driving combs being translationally vibrated between engaging and disengaging positions by an electrostatic attractive force periodically generated by the fixed combs; a driving frame which connects and supports the driving combs, the driving frame being vibrated together with the driving combs; and a motion transmitting member transmitting the translational vibration of the driving frame to the eccentric positions of the axle. With this MEMS device, the comb structure can be easily expanded to improve the dynamic performance and high-speed/long displacement characteristic.
摘要:
The present invention relates to a field emission display in which a gate plate having a gate hole and a gate electrode around the gate hole is formed between an anode plate having phosphor and a cathode plate having a field emitter and a control device for controlling field emission current, wherein the field emitter of the cathode plate is constructed to be opposite to the phosphor of the anode plate through the gate hole.According to the present invention, it is possible to significantly reduce the display row/column driving voltage by applying scan and data signals of the field emission display to the control device of each pixel, And the present invention is directed to improve the brightness of the field emission display in such a manner that the electric field necessary for field emission is applied through the gate electrode of the gate plate to freely control the distance between the anode plate and the cathode plate, so that a high voltage can be applied to the anode.
摘要:
An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.
摘要:
A light emission device and a display device having the light emission device are provided. The light emission device includes: a first substrate and a second substrate facing the first substrate; a plurality of first electrodes and a plurality of second electrodes on an inner surface of the first substrate, the first electrodes crossing the second electrodes; a plurality of electron emission regions electrically connected to the first electrodes at crossing regions where the first electrodes cross the second electrode; a light emission unit on an inner surface of the second substrate; and at least one spacer between the first and second substrates, Here, a shortest distance D between the spacer and the electron emission regions satisfies the following condition: 500 μm≦D≦2Dh, where, Dh is a diagonal length of at least one of the crossing regions.
摘要:
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.
摘要:
A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要:
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.
摘要:
A method and apparatus for scanning a video signal are provided. The method includes: detecting an operating frequency of a drive signal for an optical scanner which scans the video signal; detecting a sync signal error per frame between a vertical sync signal corresponding to the video signal and a horizontal sync signal corresponding to the operating frequency; adjusting a frequency of the vertical sync signal to allow the horizontal sync signal corresponding to the operating frequency to be synchronized with the vertical sync signal corresponding to the video signal, for each frame, in response to the sync signal error; and scanning the video signal according to the horizontal sync signal corresponding to the operating frequency and the vertical sync signal having an adjusted frequency.
摘要:
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.
摘要:
A method of forming a buffer dielectric film in a semiconductor device and a method of manufacturing a thin film transistor using the same are disclosed. By forming a buffer dielectric film containing porous silica material having low heat conductivity between the amorphous silicon layer and the substrate to minimize the heat transfer to the substrate and forming the polysilicon active layer using the laser in the state of securing the crystal growth time, polysilicon active layer having a maximized crystal particle size can be formed to improve the charge mobility of the device, in case of crystallizing the amorphous silicon layer by the ELA method, and the length of the SLG (Super Lateral Grain) can be increased to prevent the nucleation phenomenon from being generated at the portion that the crystals meet and thus the moved number of the mask can be minimized and the throughput of the process can be improved, though the interval of the mask pattern is increased, in case of crystallizing the amorphous silicon by the SLS method.