公开(公告)号：US06219400B1

公开(公告)日：2001-04-17

申请号：US09062014

申请日：1998-04-17

Applicant: Takayuki Hasegawa ,  Yutaka Watanabe

Inventor： Takayuki Hasegawa ,  Yutaka Watanabe

IPC: G21K500

CPC classification number: G21K1/06 ,  G03F7/70058 ,  G03F7/7085

Abstract: An X-ray optical system includes an X-ray illumination system having at least two mirrors, a driving system for moving the at least two mirrors, a detecting system having at least one sensor, for detecting at least one of tilt and incidence position of X-rays in the X-ray illumination system, and a control system for controlling movements of the at least two mirrors by the driving system on the basis of detection by the detecting system.

Abstract translation: X射线光学系统包括具有至少两个反射镜的X射线照明系统，用于移动至少两个反射镜的驱动系统，具有至少一个传感器的检测系统，用于检测至少两个反射镜的倾斜和入射位置 X射线照射系统中的X射线，以及用于根据检测系统的检测来控制驱动系统的至少两个反射镜的移动的控制系统。

公开(公告)号：US5975709A

公开(公告)日：1999-11-02

申请号：US234948

申请日：1994-04-28

Applicant: Ryuichi Ebinuma ,  Yutaka Watanabe

Inventor： Ryuichi Ebinuma ,  Yutaka Watanabe

IPC: G02B5/10 ,  G02B7/182 ,  G03F7/20 ,  G21K1/06 ,  G21K5/02 ,  G02B5/08

CPC classification number: G03F7/702 ,  G02B5/10 ,  G02B7/182 ,  G03F7/70233 ,  G03F7/70891 ,  G21K1/06 ,  G21K2201/067

Abstract: A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the reflection member and the base member are adhered to each other with one of the bottom surface of the reflection member and the base surface of the base member being made to follow the other to cause deformation of the spherical shape, whereby the reflection surface is formed into an aspherical shape.

Abstract translation: 反射系统包括具有球面形状的镜面反射面的反射部件， 以及具有预定形状的基面的基底构件; 并且其中所述反射构件和所述基底构件通过所述反射构件的底表面中的一个并且所述基底构件的所述基面彼此粘合以引起所述球形的变形，由此所述反射面 形成为非球面形状。

公开(公告)号：US5892118A

公开(公告)日：1999-04-06

申请号：US947160

申请日：1997-10-08

Applicant: Junji Kawachi ,  Hironori Matsubara ,  Yoshinori Nakahara ,  Yutaka Watanabe

Inventor： Junji Kawachi ,  Hironori Matsubara ,  Yoshinori Nakahara ,  Yutaka Watanabe

IPC: C07C45/46 ,  C07C213/02 ,  C07C215/80 ,  C08G73/22 ,  C07C215/78 ,  C07C209/58

CPC classification number: C08G73/22 ,  C07C213/02 ,  C07C45/46

Abstract: A process for producing 4,6-diaminoresorcinols comprises the steps of:subjecting a dioxime of the formula (4) ##STR1## wherein R is an alkyl or phenyl group, to Beckmann rearrangement to thereby produce 4,6-diacylaminoresorcinol of the formula (5) ##STR2## wherein R is as defined above, and subjecting the 4,6-diacylaminoresorcinol to hydrolysis and recovering the product 4,6-diaminoresorcinol (6) ##STR3## or a salt thereof.

Abstract translation: 制备4,6-二氨基间苯二酚的方法包括以下步骤：使式（4）的肟基（4）其中R是烷基或苯基进行贝克曼重排，从而产生4,6-二酰基氨基间苯二酚 式（5）其中R如上定义，并且使4,6-二酰基氨基间苯二酚水解并回收产物4,6-二氨基间苯二酚（6）或其盐 。

公开(公告)号：US5790630A

公开(公告)日：1998-08-04

申请号：US697863

申请日：1996-08-30

Applicant: Yutaka Watanabe ,  Shigeru Terashima

Inventor： Yutaka Watanabe ,  Shigeru Terashima

IPC: G21K5/00 ,  G21K5/02 ,  G21K5/04 ,  H01J5/18 ,  H05H7/00 ,  H05H13/04 ,  G21K1/00

CPC classification number: G21K5/04 ,  H01J5/18 ,  H05H7/00

Abstract: A radiation window includes a radiation transmitting window material, a supporting frame for gas-tightly supporting an outer periphery of the radiation transmitting window material, a flange for gas-tightly supporting an outer periphery of the supporting frame, and a structure for reducing a stress related to mounting the supporting frame onto the flange.

Abstract translation: 辐射窗包括辐射透射窗材料，用于气密地支撑辐射透射窗材料的外周的支撑框架，用于气密地支撑支撑框架的外周的凸缘和用于降低应力的结构 涉及将支撑框架安装到凸缘上。

公开(公告)号：US5761486A

公开(公告)日：1998-06-02

申请号：US638771

申请日：1996-04-29

Applicant: Yutaka Watanabe ,  Yasuaki Muraki ,  Takashi Nakagawa

Inventor： Yutaka Watanabe ,  Yasuaki Muraki ,  Takashi Nakagawa

IPC: G06F11/25 ,  G06F11/34 ,  G06F13/00 ,  G06F15/00 ,  H04L12/26 ,  G06F9/455

CPC classification number: H04L12/26 ,  H04L43/00 ,  G06F11/3457

Abstract: A simulator apparatus collects communication information on a transmission line by a line information collecting module, extracts the communication information between a server and clients from the collected communication information by an information extracting module, and further discriminates the communication information necessary for a simulation on a protocol unit basis from the communication information and converts to a simulating procedure by a procedure converting module. A simulation processing module performs a simulating operation of the client for the server in accordance with a simulation definition file of the simulating procedure and operating conditions and stores an operating situation to a performance log file.

Abstract translation: 模拟器装置通过线路信息采集模块收集传输线上的通信信息，通过信息提取模块从所收集的通信信息中提取服务器与客户端之间的通信信息，并进一步鉴别协议模拟所需的通信信息 从通信信息的单位基础，并通过程序转换模块转换成模拟过程。 模拟处理模块根据模拟过程和操作条件的模拟定义文件对服务器的客户端进行模拟操作，并将运行状况存储到演奏日志文件。

公开(公告)号：US5657113A

公开(公告)日：1997-08-12

申请号：US384373

申请日：1995-02-03

Applicant: Katsuhiko Ono ,  Tsuyoshi Seto ,  Yutaka Watanabe

Inventor： Katsuhiko Ono ,  Tsuyoshi Seto ,  Yutaka Watanabe

IPC: G03B27/52 ,  G03B27/54 ,  G03G15/00 ,  G03G15/04 ,  G03G15/043 ,  G03G21/00

CPC classification number: G03G15/043 ,  G03G15/605

Abstract: A document exposure apparatus includes a glass plate on which a document original is located, a press cover for covering the glass plate, an open/close discriminating unit for discriminating an open state and a close state of the press cover, an exposure unit, disposed under the glass plate, for illuminating the original with light, and a control unit for controlling the illuminating operation of the exposure unit according to an open/close state of the press cover, which is discriminated by the open/close discriminating unit.

Abstract translation: 文件曝光装置包括：文档原稿所在的玻璃板，用于覆盖玻璃板的压盖，用于识别压盖的打开状态和关闭状态的打开/关闭判别单元，设置在曝光单元 在玻璃板下面，用于用光照射原稿;以及控制单元，用于根据由打开/关闭识别单元区分的按压盖的打开/关闭状态来控制曝光单元的照明操作。

公开(公告)号：US5641593A

公开(公告)日：1997-06-24

申请号：US592607

申请日：1996-01-26

Applicant: Yutaka Watanabe ,  Masami Hayashida

Inventor： Yutaka Watanabe ,  Masami Hayashida

IPC: G03F1/22 ,  G03F1/24 ,  G03F1/32 ,  G03F1/54 ,  G03F1/68 ,  G03F7/20 ,  H01L21/027 ,  G03F9/00

CPC classification number: G03F1/24 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/32 ,  G03F1/54 ,  G03F7/2039 ,  G03F7/70233 ,  G03F7/70283 ,  G03F7/70575

Abstract: A reflection type mask includes a reflective portion effective to reflect soft X-rays or vacuum ultraviolet rays, and an absorbent material pattern formed on the reflecting portion, wherein, when the wavelength of the soft X-rays or vacuum ultraviolet rays is denoted by .lambda. and the optical constant of the material constituting the absorbent material pattern is denoted by 1-.delta.-ik (where .delta. and k are real numbers while i is an imaginary number), a relation 0.29

Abstract translation: 反射型掩模包括有效地反射软X射线或真空紫外线的反射部分和形成在反射部分上的吸收材料图案，其中当软X射线或真空紫外线的波长由λ 并且构成吸收材料图案的材料的光学常数由1-Δ-ik（其中δ和k是实数，而i是虚数）表示，关系0.29

公开(公告)号：US5494539A

公开(公告)日：1996-02-27

申请号：US297051

申请日：1994-08-29

Applicant: Hiroshi Tsujimura ,  Yasumasa Tamai ,  Masayuki Kurihara ,  Seiichi Toyoda ,  Yutaka Watanabe ,  Koichi Kurosawa

Inventor： Hiroshi Tsujimura ,  Yasumasa Tamai ,  Masayuki Kurihara ,  Seiichi Toyoda ,  Yutaka Watanabe ,  Koichi Kurosawa

IPC: B23P6/04 ,  C21D1/00 ,  C21D9/50

CPC classification number: B23P6/04 ,  C21D1/00 ,  C21D2221/00

Abstract: By applying spot welding along a crack which has occurred in an austenitic stainless steel structure without use of welding material so that spot welds are connected, melting and solidifying of the crack can be achieved, thereby to provide a metal structure which is rich with delta ferrite of the austenitic stainless steel structure or prevent propagation of the crack by enclosing it into the interior of the austenitic stainless steel structure.

Abstract translation: 通过在不使用焊接材料的情况下沿着奥氏体不锈钢结构中发生的裂纹进行点焊，使得点焊连接，可以实现裂纹的熔融固化，从而提供富含δ铁素体的金属结构体 的奥氏体不锈钢结构，或通过将其包围在奥氏体不锈钢结构的内部来防止裂纹扩展。

公开(公告)号：US5461657A

公开(公告)日：1995-10-24

申请号：US266749

申请日：1994-06-28

Applicant: Masami Hayashida ,  Yutaka Watanabe

Inventor： Masami Hayashida ,  Yutaka Watanabe

IPC: G03F7/20 ,  G21K1/06 ,  G21K1/00

CPC classification number: G03F7/70058 ,  G03F7/708 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An X-ray mirror has a silicon carbide substrate having a convex cylindrical surface, and a carbon layer coated on a surface of said substrate to a thickness ranging from 10 nm to 1 .mu.m by evaporation, such as CVD. In the X-ray mirror in which the carbon layer is coated thereon beforehand, changes in the intensity of reflected light, caused by a contaminating carbon layer attached to the surface of the mirror, can be restricted. When such a mirror is used in an X-ray lithographic apparatus, the number of times the intensity of X-rays is measured or corrected or the mirror is cleaned can be greatly reduced.

Abstract translation: X射线镜具有具有凸圆柱形表面的碳化硅衬底和通过诸如CVD的蒸发在所述衬底的表面上涂覆至10nm至1μm的厚度的碳层。 在预先涂覆有碳层的X射线反射镜中，可以限制由附着在反射镜表面上的污染碳层引起的反射光强度的变化。 当在X射线光刻设备中使用这样的镜子时，可以大大减少测量或校正X射线强度或镜子被清洁的次数。

公开(公告)号：US5433988A

公开(公告)日：1995-07-18

申请号：US323592

申请日：1994-10-17

Applicant: Yasuaki Fukuda ,  Yutaka Watanabe ,  Shigetaro Ogura ,  Takashi Iizuka

Inventor： Yasuaki Fukuda ,  Yutaka Watanabe ,  Shigetaro Ogura ,  Takashi Iizuka

IPC: B32B15/08 ,  G02B1/10 ,  G21K1/06 ,  G02B5/28

CPC classification number: B32B15/08 ,  B82Y10/00 ,  G02B5/0833 ,  G02B5/0891 ,  G02B5/26 ,  G21K1/062 ,  G21K2201/061 ,  Y10S428/913 ,  Y10T428/24355 ,  Y10T428/30

Abstract: A multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray, comprises a substrate, a plurality of first layers, and a plurality of second layers formed on the substrate alternately with the first layers. The first layers primarily consists of at least one of single elements, such as ruthenium, or of a boride carbide, silicate, nitride oxide of a transition metal. The second layers primarily consists of at least one of compounds of carbon, silicon (e.g. carbide, nitride and oxide of silicon), boron (e.g. carbide, nitride and oxide of boron), beryllium (e.g. carbide, nitride and oxide of beryllium) and aluminum (e.g. carbide, nitride and oxide of aluminum).

Abstract translation: 用于软X射线至真空紫外线的多层反射镜包括与第一层交替地形成在基板上的基板，多个第一层和多个第二层。 第一层主要由单一元素中的至少一种组成，例如钌，或硼化物碳化物，硅酸盐，过渡金属的氮氧化物。 第二层主要由碳，硅（例如碳化物，氮化物和硅的氧化物），硼（例如碳化物，氮化物和硼的氧化物），铍（例如碳化物，氮化物和铍氧化物）的化合物中的至少一种和 铝（例如碳化物，氮化物和铝的氧化物）。