APPARATUS AND METHOD FOR MEASURING SURFACE TOPOGRAPHY OPTICALLY

    公开(公告)号:US20190262108A1

    公开(公告)日:2019-08-29

    申请号:US16287120

    申请日:2019-02-27

    Abstract: An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe and an illumination unit configured to output a plurality of light beams. In many embodiments, the apparatus includes a light focusing assembly. The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic.

    VCSEL BASED LOW COHERENCE EMITTER FOR CONFOCAL 3D SCANNER

    公开(公告)号:US20190252854A1

    公开(公告)日:2019-08-15

    申请号:US16192359

    申请日:2018-11-15

    Abstract: Methods and apparatus for measuring objects comprise a plurality of light sources to generate a plurality of light beams directed toward a spot generator array comprising a plurality of spot generating lenses. The plurality of light sources is separated from the spot generator array with a separation distance sufficient to overlap the plurality of light beams at each of the spot generating lenses. The overlap of each of the beams at each of the spot generating lenses provides smoothing of the energy profile of the light energy incident on the spot generating lenses. The spot generator array generates focused spots comprising overlapping focused beams. The overlapping beams may comprise overlapping beams of a vertical cavity surface emitting laser (VCSEL) array, and the overlapping focused beams can decrease optical artifacts.

    Speckle reduction method and apparatus

    公开(公告)号:US09651419B2

    公开(公告)日:2017-05-16

    申请号:US13905038

    申请日:2013-05-29

    Abstract: An apparatus adapted for confocal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at least one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.

    APPARATUS AND METHOD FOR MEASURING SURFACE TOPOGRAPHY OPTICALLY
    95.
    发明申请
    APPARATUS AND METHOD FOR MEASURING SURFACE TOPOGRAPHY OPTICALLY 审中-公开
    光学测量表面形貌的装置和方法

    公开(公告)号:US20170027670A1

    公开(公告)日:2017-02-02

    申请号:US15220336

    申请日:2016-07-26

    Abstract: An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe and an illumination unit configured to output a plurality of light beams. In many embodiments, the apparatus includes a light focusing assembly. The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic.

    Abstract translation: 描述了一种用于确定三维结构的表面形貌的装置。 该装置可以包括探针和被配置为输出多个光束的照明单元。 在许多实施例中,该装置包括光聚焦组件。 光聚焦组件可以将多个光束中的每一个接收并聚焦到相应的外部焦点。 光聚焦组件可以被配置为与聚焦改变组件内的多个光束重叠,以沿着光束的传播方向移动外部焦点。 该装置可以包括检测器,其具有被配置为测量从照明点返回的多个光束中的每一个的特性的感测元件的阵列,以及耦合到检测器的处理器,并且被配置为产生代表结构的形貌的数据,基于 测量特性。

    Apparatus and method for measuring surface topography optically
    96.
    发明授权
    Apparatus and method for measuring surface topography optically 有权
    光学测量表面形貌的装置和方法

    公开(公告)号:US09439568B2

    公开(公告)日:2016-09-13

    申请号:US14323215

    申请日:2014-07-03

    Abstract: An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe and an illumination unit configured to output a plurality of light beams. In many embodiments, the apparatus includes a light focusing assembly. The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic.

    Abstract translation: 描述了一种用于确定三维结构的表面形貌的装置。 该装置可以包括探针和被配置为输出多个光束的照明单元。 在许多实施例中,该装置包括光聚焦组件。 光聚焦组件可以将多个光束中的每一个接收并聚焦到相应的外部焦点。 光聚焦组件可以被配置为与聚焦改变组件内的多个光束重叠,以沿着光束的传播方向移动外部焦点。 该装置可以包括检测器,其具有被配置为测量从照明点返回的多个光束中的每一个的特性的感测元件的阵列,以及耦合到检测器的处理器,并且被配置为产生代表结构的形貌的数据,基于 测量特性。

    APPARATUS FOR DENTAL CONFOCAL IMAGING
    97.
    发明申请
    APPARATUS FOR DENTAL CONFOCAL IMAGING 审中-公开
    用于牙科协同成像的装置

    公开(公告)号:US20160000332A1

    公开(公告)日:2016-01-07

    申请号:US14741172

    申请日:2015-06-16

    Abstract: An apparatus for dental confocal imaging comprises an illumination module for generating an array of light beams, an optics system for confocal focusing of the array of light beams and a probe head with a light-guiding part having an entrance face and an exit face. The illumination module, the optics system and the probe head are arranged such that the array of light beams from the illumination module passes through the optics system, enters the light-guiding part via the entrance face and exits the light-guiding part via the exit face. The optics system is configured such that, after having passed through the optics system, the outermost marginal rays of the outermost light beams with respect to the optical axis of the optics system are parallel or divergent to the optical axis.

    Abstract translation: 用于牙科共聚焦成像的装置包括用于产生光束阵列的照明模块,用于光束阵列的共焦聚焦的光学系统和具有具有入射面和出射面的光导部分的探针头。 照明模块,光学系统和探针头被布置成使得来自照明模块的光束阵列通过光学系统,经由入射面进入导光部分,并经由出射口离开导光部分 面对。 光学系统被配置为使得在已经通过光学系统之后,相对于光学系统的光轴的最外侧光束的最外边缘的光线平行或发散到光轴。

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