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    Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device
    92.
    发明授权
    Fine pattern inspection apparatus and method and managing apparatus and method of critical dimension scanning electron microscope device 失效
    临界尺寸扫描电子显微镜装置精细图案检测装置及方法及管理装置及方法

    公开(公告)号：US06642519B2

    公开(公告)日：2003-11-04

    申请号：US10254664

    申请日：2002-09-26

    申请人： Takahiro Ikeda

    发明人： Takahiro Ikeda

    IPC分类号： G01N23225

    CPC分类号： G06T7/0004 ,  G01N23/2206 ,  G01N23/2251 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J2237/221 ,  H01J2237/2817

    摘要： A fine pattern inspection apparatus includes: a first calculation unit which receives data of a first secondary electron signal obtained by irradiating a plurality of test patterns formed on a test substrate with an electron beam and receives data of an contour shape of a cross-section of each of the test patterns, the test substrate being the same as a substrate on which a pattern to be inspected is formed, the test patterns being formed with different cross-sectional shapes, and which separates the first secondary electron signal into variables of a first function containing the contour shape of the cross-section as arguments, a second function that is defined by a step function depending on respective materials constituting the test patterns and a third function that represents the size of a distortion of the signal; a storing unit which has a first storing area to store the first through third functions obtained from the first calculation unit; and a second calculation unit which receives data of a second secondary electron signal obtained by irradiating the pattern to be inspected with an electron beam, and executes calculations so as to extract components relating to the cross-sectional shape of the pattern to be inspected from the second secondary electron signal by using the first through third functions stored in the storing unit.

    摘要翻译： 精细图案检查装置包括：第一计算单元，其接收通过用电子束照射形成在测试基板上的多个测试图案而获得的第一二次电子信号的数据，并接收横截面的轮廓形状的数据 每个测试图案，测试基板与其上形成有待检查图案的基板相同，测试图案形成为不同的横截面形状，并且将第一二次电子信号分离成第一 功能，其包含横截面的轮廓形状作为参数，根据构成测试图案的各种材料的阶梯函数定义的第二函数和表示信号的失真大小的第三函数; 存储单元，具有用于存储从第一计算单元获得的第一至第三功能的第一存储区域; 以及第二计算单元，其接收通过用电子束照射被检查的图案而获得的第二二次电子信号的数据，并且执行计算，以便从所述检查的图案的截面形状提取与 通过使用存储在存储单元中的第一至第三功能来产生第二二次电子信号。

    Pattern lithography method
    94.
    发明授权
    Pattern lithography method 失效
    图案光刻法

    公开(公告)号：US5830623A

    公开(公告)日：1998-11-03

    申请号：US715375

    申请日：1996-09-12

    申请人： Yumiko Maruyama ,  Takahiro Ikeda

    发明人： Yumiko Maruyama ,  Takahiro Ikeda

    IPC分类号： G03F7/11 ,  G03F7/09 ,  G03F7/16 ,  G03F7/38 ,  H01L21/027 ,  G03C5/00

    CPC分类号： G03F7/091 ,  G03F7/11 ,  Y10S430/11 ,  Y10S430/151

    摘要： It is an object of the present invention to obtain a resist pattern of a high dimensional accuracy. In order to accomplish this object, a pattern lithography method according to the present invention comprises the steps of: forming a resist film 2 on a substrate 1 to be processed; applying a hydrous polymer solution 4 on the resist film 2; cross-linking polymers in the hydrous polymer solution to form a hydrogel film 4a of a predetermined thickness; and pattern-exposing the resist film 2 through the hydrogel film, and then, removing the hydrogel film 4a.

    摘要翻译： 本发明的目的是获得高尺寸精度的抗蚀剂图案。 为了实现该目的，根据本发明的图案光刻方法包括以下步骤：在待加工的基板1上形成抗蚀剂膜2; 在抗蚀剂膜2上施加含水聚合物溶液4; 在含水聚合物溶液中交联聚合物以形成预定厚度的水凝胶膜4a; 并通过水凝胶膜将抗蚀剂膜2图案曝光，然后除去水凝胶膜4a。

    Interchangeable lens and digital camera including controller for stopping zoom lens at one of discrete predetermined stop positions
    95.
    发明授权
    Interchangeable lens and digital camera including controller for stopping zoom lens at one of discrete predetermined stop positions 有权
    可互换镜头和数码相机包括用于在变化的预定停止位置之一处停止变焦镜头的控制器

    公开(公告)号：US08941759B2

    公开(公告)日：2015-01-27

    申请号：US13818707

    申请日：2011-08-24

    申请人： Takahiro Ikeda

    发明人： Takahiro Ikeda

    IPC分类号： H04N5/262 ,  G03B17/14 ,  G02B7/04 ,  H04N5/225 ,  G02B7/10

    CPC分类号： G03B17/14 ,  G02B7/04 ,  G02B7/102 ,  G03B2205/0046 ,  G03B2206/00 ,  H04N5/2254

    摘要： An interchangeable lens includes a zoom lens, a driver configured to drive the zoom lens, an operation unit configured to receive a user's operation for changing a magnification of the zoom lens, and a controller configured to control the driver according to the operation of the operation unit. The controller controls the driver in either one of a first operation mode for enabling the zoom lens to stop at an arbitrary position according to the operation of the operation unit and a second operation mode for enabling the zoom lens to stop at one of discrete predetermined stop positions according to the operation of the operation unit.

    摘要翻译： 可互换镜头包括变焦镜头，被配置为驱动变焦镜头的驱动器，被配置为接收用户改变变焦镜头的倍率的操作的操作单元，以及被配置为根据操作的操作来控制驾驶员的控制器 单元。 控制器根据操作单元的操作使第一操作模式中的任一个控制驱动器，使得变焦镜头能够在任意位置停止;以及第二操作模式，用于使得变焦镜头能够以离散的预定停止点之一停止 根据操作单元的操作进行定位。

    Cell observation device and cell observation method
    96.
    发明授权
    Cell observation device and cell observation method 有权
    细胞观察装置和细胞观察方法

    公开(公告)号：US08873027B2

    公开(公告)日：2014-10-28

    申请号：US13642027

    申请日：2011-04-13

    申请人： Norikazu Sugiyama ,  Takuji Kataoka ,  Takahiro Ikeda

    发明人： Norikazu Sugiyama ,  Takuji Kataoka ,  Takahiro Ikeda

    IPC分类号： G01B9/02 ,  G06T7/00 ,  G01N15/14 ,  G02B21/14 ,  C12M1/34 ,  G01N21/45

    CPC分类号： G01N21/45 ,  C12M41/46 ,  G01N15/1475 ,  G01N2021/451 ,  G02B21/14 ,  G06K9/0014 ,  G06K9/00147 ,  G06T7/0012 ,  G06T2207/10056 ,  G06T2207/30024

    摘要： A cell observation device is provided with a reflection interference shutter 106A which adjusts a light quantity of light emitted from a reflection interference measurement light source 106, a quantitative phase shutter 105A which adjusts a light quantity of light emitted from a quantitative phase measurement light source, a camera 110 which images reflected light from the reflection interference measurement light source 106 to generate a reflection interference image and which images transmitted light from a quantitative phase measurement light source 105 to generate a quantitative phase image, and a first extraction unit 204 and a second extraction unit 205 which extract first and second parameters from the reflection interference image generated by the camera 110. During generation of the reflection interference image, the quantitative phase shutter 105A blocks the light from the quantitative phase measurement light source 105. During generation of the quantitative phase image, the reflection interference shutter 106A blocks the light from the reflection interference measurement light source 106.

    摘要翻译： 电池观察装置设置有反射干涉光圈106A，该反射干涉光圈106A调节从反射干涉测量光源106发射的光的光量，调节从定量相位测量光源发射的光的光量的定量相位快门105A， 对来自反射干涉测量光源106的反射光进行成像以产生反射干涉图像的摄像机110，以及来自定量相位测量光源105的透射光以产生定量相位图像的图像，以及第一提取单元204和第二 提取单元205，其从由相机110产生的反射干涉图像中提取第一和第二参数。在产生反射干涉图像期间，定量相位快门105A阻挡来自定量相位测量光源105的光。在定量 相位图像， 反射干涉光闸106A阻挡来自反射干涉测量光源106的光。

    Interchangeable lens and camera body
    97.
    发明授权
    Interchangeable lens and camera body 有权
    可互换镜头和相机机身

    公开(公告)号：US08649675B2

    公开(公告)日：2014-02-11

    申请号：US13494405

    申请日：2012-06-12

    申请人： Junji Takahata ,  Takahiro Ikeda

    发明人： Junji Takahata ,  Takahiro Ikeda

    IPC分类号： G03B17/00 ,  G03B13/00 ,  H04N5/262 ,  G02B15/14 ,  G02B7/02

    CPC分类号： G03B17/14 ,  G03B17/18 ,  G03B2206/00 ,  H04N5/23209 ,  H04N5/23212 ,  H04N5/23296

    摘要： An interchangeable lens mountable to a camera body includes a zoom lens configured to adjust an angle of view of a subject image, a driver configured to move the zoom lens in an optical axis direction, a plurality of operating members configured to generate an operation signal for driving the driver according to operation performed by a user, a communication unit configured to receive, from the camera body, setting information for setting valid/invalid of at least one of the plurality of operating members, and a controller configured to control the driver. The controller drives and does not drive the driver based on the operation signal from the operating member having been set to valid and invalid, respectively, by the setting information received through the communication unit.

    摘要翻译： 可安装到相机主体的可互换镜头包括被配置为调节被摄体图像的视角的变焦镜头，配置成沿光轴方向移动变焦镜头的驱动器，多个操作部件，其被配置为产生用于 根据用户执行的操作来驱动驾驶员;通信单元，被配置为从所述照相机主体接收用于设置所述多个操作构件中的至少一个的设置有效/无效的设置信息;以及控制器，其被配置为控制所述驾驶员。 控制器基于通过通信单元接收到的设置信息，分别基于已经被设置为有效和无效的操作构件的操作信号来驱动驱动器。

    Imaging apparatus
    99.
    发明授权
    Imaging apparatus 有权
    成像设备

    公开(公告)号：US08416333B2

    公开(公告)日：2013-04-09

    申请号：US12869834

    申请日：2010-08-27

    申请人： Yasunori Nakai ,  Takahiro Ikeda

    发明人： Yasunori Nakai ,  Takahiro Ikeda

    IPC分类号： H04N5/222

    CPC分类号： H04N5/23293 ,  H04N5/2251

    摘要： An imaging apparatus for capturing an image includes a first display unit, a second display unit capable of being in a set-in state in which the second display unit is set in a body of the imaging apparatus or a non-set-in state in which the second display unit is not set in the body of the imaging apparatus, a proximity sensor operable to sense proximity of an object, and a controller operable to allow the first display unit to display an image when the proximity sensor senses the proximity of the object, and allows the second display unit to display an image when the proximity sensor does not sense the proximity of the object. The controller controls a sensing function of the proximity sensor according to whether the second display unit is in the set-in state or the non-set-in state. For example, the proximity sensor may sense the proximity of the object when the object is continuously sensed for a predetermined sensing time or more. The controller may set the predetermined sensing time for the second display unit being in the non-set-in state to be longer than the predetermined sensing time for the second display unit being in the set-in state.

    摘要翻译： 一种用于拍摄图像的成像设备包括：第一显示单元，能够处于第二显示单元被设置在成像设备的主体中的设定状态或第二显示单元的未设定状态的第二显示单元 其中第二显示单元未设置在成像设备的主体中，可接近传感器可操作以感测物体的接近度;以及控制器，其可操作以允许第一显示单元在接近传感器感测到 并且当接近传感器不感测物体的接近时允许第二显示单元显示图像。 控制器根据第二显示单元是处于设置状态还是非设置状态来控制接近传感器的感测功能。 例如，当物体在预定的感测时间或更长时间连续感测时，接近传感器可以感测物体的接近度。 控制器可以将处于非设置状态的第二显示单元的预定感测时间设置为比第二显示单元处于置入状态的预定感测时间长。

    Image processing system, image processing apparatus and program
    100.
    发明授权
    Image processing system, image processing apparatus and program 有权
    图像处理系统，图像处理装置和程序

    公开(公告)号：US08213028B2

    公开(公告)日：2012-07-03

    申请号：US11905616

    申请日：2007-10-02

    申请人： Takahiro Ikeda ,  Tomonari Yoshimura ,  Masakazu Murakami ,  Mitsuzo Iwaki ,  Okihisa Yoshida

    发明人： Takahiro Ikeda ,  Tomonari Yoshimura ,  Masakazu Murakami ,  Mitsuzo Iwaki ,  Okihisa Yoshida

    IPC分类号： G06K1/00

    CPC分类号： H04N1/00222 ,  H04N2201/001 ,  H04N2201/0094 ,  H04N2201/3276

    摘要： An image processing system and a software program which simplify customizations when a program for operations in connection with image processing is installed in a plural number of image processing apparatuses. When a program for operations in connection with image processing is newly installed in a first MFP, the first MFP makes an inquiry to other MFPs which are connected to the first MFP via a network. When a second MFP is already installed with the same program and has information on individual users' settings for the program, the first MFP receives the setting information from the second MFP. Then, referring to history information and device information, the first MFP judges whether to store the setting information therein and whether to make modifications to the setting information.

    摘要翻译： 当在多个图像处理装置中安装用于与图像处理有关的操作的程序时，简化定制的图像处理系统和软件程序。 当在第一MFP中新安装用于与图像处理有关的操作的程序时，第一MFP经由网络向连接到第一MFP的其他MFP进行查询。 当第二个MFP已经安装了相同的程序并且具有关于该程序的各个用户设置的信息时，第一个MFP从第二个MFP接收设置信息。 然后，参考历史信息和设备信息，第一MFP判断是否存储设置信息，以及是否对设置信息进行修改。