摘要:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
摘要:
An E-mail communication apparatus relays an E-mail transmitted from a source to a destination, stores information indicating a destination and an electronic certificate of the destination in a correspondence, receives the E-mail in which an address of the source and an address of the destination are specified; refers a certificate storage unit when a transmit command for the E-mail is issued for the E-mail received by a receiving unit, determines whether or not the electronic certificate of the destination of the E-mail is stored and, when the electronic certificate is stored, encrypts the E-mail with the electronic certificate, requests the destination to transmit the electronic certificate when it is determined that the electronic certificate is not stored, and transmits the encrypted request mail to the destination.
摘要:
A capacitance type sensor includes a substrate, a group of electrodes fixed on an upper face of the substrate, a movable electrode plate having an electrode on its lower side and a gap between the group of fixed electrodes on the substrate and the electrode on the movable electrode plate. The gap is formed with a solder layer, a conductive elastomer layer, a conductive paint layer, or a conductive adhesive material layer provided on the substrate. The electrode on the movable electrode plate is made of conductive rubber plate or conductive elastomer plate.
摘要:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
摘要:
A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60–63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101–109) and analog adders/subtracters (111–113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4–E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′).
摘要:
The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected. A pair of contacting electrodes E15 and E16 are formed on the substrate, and when an external force with a predetermined strength or more is applied, the elastic deformable body deforms, and the displacing conductive layer 26 comes into contact with both electrodes E15 and E16, simultaneously. The potential of the electrode E16 is taken-in from the terminal T5, and when said potential is Vcc, the C/V converter circuit 50 is operated in a standby mode with less power consumption, and when said potential is GND, the circuit is operated in a normal mode.
摘要:
A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F1 to F5: F1 and F2 are disposed at front and back of F5) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E1 to E5) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity ωx about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E5, F5) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. Thus, a Coriolis force Fy proportional to the angular velocity ωx is applied to the oscillator in the Y-axis. By this Coriolis force Fy, the oscillator is caused to undergo displacement in the Y-axis direction. As a result, the distance between opposite electrode layers (E3, F3) arranged in the positive direction of the Y-axis becomes smaller, and the distance between opposite electrode layers (E4, F4) arranged in the negative direction of the Y-axis becomes greater. Thus, capacitance value C3 increases and capacitance value C4 decreases. By change of the capacitance value, it is possible to detect the magnitude of the Coriolis force Fy, and to determine angular velocity ωx. Similarly, it is possible to detect an angular velocity ωy about the Y-axis and an angular velocity ωz about the Z-axis.
摘要:
A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′).
摘要:
An angular velocity sensor for detecting an angular velocity component includes an oscillator having mass, a sensor casing for accommodating the oscillator therewithin, a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to the sensor casing, and capacitance elements including a first electrode provided on a surface of the oscillator and a second electrode provided on a surface of a fixed member fixed to the sensor casing.
摘要:
The invention provides a force detector in which power consumption is suppressed. Four electrodes (E11-E14) are formed on a substrate, and an elastic deformable body formed of a ruber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer (26). Four capacitance elements (C11-C14) are comprised by the electrodes (E11-E14) and the displacing conductive layer (26) opposed to the electrodes. The capacitance values thereof are converted into voltage values (V11-V14) by C/V converter circuit (50), and based on operation by signal processing circuit (60), an external force applied to the elastic deformable body is detected. A pair of contacting electrodes (E15) and (E16) are formed on the substrate, and when an external force with a predetermined strength or more is applied, the elastic deformable body deforms, and the displacing conductive layer (26) comes into contact with both electrodes (E15) and (E16). The potential of the electrode (E16) is taken-in from the terminal (T5), and when said potential is Vcc, the C/V converter circuit (50) is operated in a standby mode with less power consumption, and when said potential is GND, the circuit is operated in a normal mode.