公开(公告)号：US09082585B2

公开(公告)日：2015-07-14

申请号：US13143345

申请日：2009-11-27

申请人： Go Kotaki ,  Atsushi Miyamoto ,  Ryo Nakagaki ,  Takehiro Hirai

发明人： Go Kotaki ,  Atsushi Miyamoto ,  Ryo Nakagaki ,  Takehiro Hirai

IPC分类号： H04N7/18 ,  H01J37/22 ,  G06T7/00 ,  H01J37/26 ,  H01J37/28 ,  H01L21/66

CPC分类号： H01J37/222 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12

摘要： An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.

摘要翻译： 搜索能够在低放大倍率领域中获取的高倍率参考图像的成像区域，而不将舞台从低倍率下的缺陷区域成像的位置移动，并且如果搜索成功，则 获取成像区域本身的图像并获取高倍率参考图像。 如果搜索不成功，则将成像方案切换到从与缺陷区相邻的芯片获取高倍率参考图像的方案。

公开(公告)号：US09057873B2

公开(公告)日：2015-06-16

申请号：US13988547

申请日：2011-11-22

申请人： Atsushi Miyamoto ,  Naoki Hosoya ,  Toshikazu Kawahara ,  Akihiro Onizawa

发明人： Atsushi Miyamoto ,  Naoki Hosoya ,  Toshikazu Kawahara ,  Akihiro Onizawa

IPC分类号： G06K9/00 ,  G02B21/00 ,  G03F9/00 ,  H01J37/22

CPC分类号： G02B21/0016 ,  G03F9/7003 ,  G03F9/7092 ,  H01J37/222

摘要： In order to provide a technique for performing global alignment (detecting position shift and rotation of a wafer) stably and automatically using an optical microscope, as a pattern for global alignment, multiple alignment pattern candidates are calculated (107), multiple data for matching are created for each alignment pattern (108), matching is performed with respect to the data for matching for each alignment pattern in descending order of appropriateness as an alignment pattern with an image (113) based on an image signal from the optical microscope (114), and the amount of position shift and the amount of rotation of the wafer are calculated (116) on the basis of the results of matching (115).

摘要翻译： 为了提供使用光学显微镜稳定自动地进行全局对准（检测位置偏移和晶片旋转）的技术，作为全局对准的图案，计算多个取向图案候选（107），用于匹配的多个数据 根据来自光学显微镜（114）的图像信号，针对每个对准图案（108）创建匹配，以相对于每个对齐图案的匹配数据，以适当的顺序作为与图像（113）的对准图案进行匹配， ，并且基于匹配结果（115）计算晶片的位置偏移量和旋转量（116）。

公开(公告)号：US08730318B2

公开(公告)日：2014-05-20

申请号：US13160108

申请日：2011-06-14

申请人： Kenji Nakahira ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

发明人： Kenji Nakahira ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

IPC分类号： H04N9/47 ,  H04N5/235 ,  G06K9/00

CPC分类号： H04N5/265 ,  H04N5/217 ,  H04N5/2628 ,  H04N7/183

摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.

摘要翻译： 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含 信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元， 由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像 合成单位。

公开(公告)号：US08704464B2

公开(公告)日：2014-04-22

申请号：US13995606

申请日：2011-12-19

申请人： Shigemi Sasaki ,  Atsushi Miyamoto

发明人： Shigemi Sasaki ,  Atsushi Miyamoto

IPC分类号： H05H11/00

CPC分类号： H01J3/34 ,  H05H7/04 ,  H05H7/06 ,  H05H13/04 ,  H05H2007/046

摘要： A charged particle orbit control device (100) is used in a ring-shaped charged particle accelerator or a charged particle storage ring. The charged particle orbit control device (100) is configured to enable the orbit of a charged particle to return to the original orbit in multiple cycles. The charged particle orbit control device (100) includes multiple bending magnets (1) that bend the charged particle (3). In the charged particle orbit control device (100), the bending angle and relative position of each bending magnet (1) are prescribed such that every time the charged particle (3) passes through, the orbit of the charged particle (3) in each bending magnet (1) alternately switches between two orbits.

摘要翻译： 带电粒子轨道控制装置（100）用于环形带电粒子加速器或带电粒子储存环。 带电粒子轨道控制装置（100）被配置为使得带电粒子的轨道能够以多个周期返回原始轨道。 带电粒子轨道控制装置（100）包括使带电粒子（3）弯曲的多个弯曲磁体（1）。 在带电粒子轨道控制装置（100）中，规定每个弯曲磁体（1）的弯曲角度和相对位置，使得每次带电粒子（3）通过时，带电粒子（3）的轨道在每个 弯曲磁体（1）交替地在两个轨道之间切换。

公开(公告)号：US20130270452A1

公开(公告)日：2013-10-17

申请号：US13995606

申请日：2011-12-19

申请人： Shigemi Sasaki ,  Atsushi Miyamoto

发明人： Shigemi Sasaki ,  Atsushi Miyamoto

IPC分类号： H01J3/34

CPC分类号： H01J3/34 ,  H05H7/04 ,  H05H7/06 ,  H05H13/04 ,  H05H2007/046

摘要： A charged particle orbit control device (100) is used in a ring-shaped charged particle accelerator or a charged particle storage ring. The charged particle orbit control device (100) is configured to enable the orbit of a charged particle to return to the original orbit in multiple cycles. The charged particle orbit control device (100) includes multiple bending magnets (1) that bend the charged particle (3). In the charged particle orbit control device (100), the bending angle and relative position of each bending magnet (1) are prescribed such that every time the charged particle (3) passes through, the orbit of the charged particle (3) in each bending magnet (1) alternately switches between two orbits.

摘要翻译： 带电粒子轨道控制装置（100）用于环形带电粒子加速器或带电粒子储存环。 带电粒子轨道控制装置（100）被配置为使带电粒子的轨道能够以多个周期返回原始轨道。 带电粒子轨道控制装置（100）包括使带电粒子（3）弯曲的多个弯曲磁体（1）。 在带电粒子轨道控制装置（100）中，规定每个弯曲磁体（1）的弯曲角度和相对位置，使得每次带电粒子（3）通过时，带电粒子（3）的轨道在每个 弯曲磁体（1）交替地在两个轨道之间切换。

公开(公告)号：US08481936B2

公开(公告)日：2013-07-09

申请号：US13348813

申请日：2012-01-12

申请人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto

发明人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto

IPC分类号： H01J37/26

CPC分类号： G03F1/84 ,  G03F1/86 ,  G03F7/70625

摘要： The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to generate a local projection waveform by projecting the scanning electron microscope image in the tangential direction with respect to the pattern edge at each point of the pattern edge of the scanning electron microscope image, estimate the cross-sectional shape of the pattern transferred on the sample by applying the local projection waveform generated at each point to a library, which has previously been created, correlating the cross-sectional shape with the electron beam signal waveform, obtain position coordinate of the edge end fitting in with the cross-sectional shape, and output the contour of the pattern as a range of position coordinates.

摘要翻译： 本发明提供一种扫描电子显微镜系统，其适于输出与样品的实际图案边缘端相匹配的轮廓信息，并且被布置成通过相对于扫描电子显微镜图像沿切线方向投影而产生局部投影波形 到扫描电子显微镜图像的图案边缘的每个点处的图案边缘，通过将在每个点处生成的局部投影波形应用到先前已经创建的库来估计在样本上传送的图案的横截面形状 将横截面形状与电子束信号波形相关联，以横截面形状获得边缘端配件的位置坐标，并将图案的轮廓作为位置坐标的范围输出。

公开(公告)号：US20120112067A1

公开(公告)日：2012-05-10

申请号：US13348813

申请日：2012-01-12

申请人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto

发明人： Chie Shishido ,  Maki Tanaka ,  Atsushi Miyamoto

IPC分类号： H01J37/28

CPC分类号： G03F1/84 ,  G03F1/86 ,  G03F7/70625

摘要： The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to generate a local projection waveform by projecting the scanning electron microscope image in the tangential direction with respect to the pattern edge at each point of the pattern edge of the scanning electron microscope image, estimate the cross-sectional shape of the pattern transferred on the sample by applying the local projection waveform generated at each point to a library, which has previously been created, correlating the cross-sectional shape with the electron beam signal waveform, obtain position coordinate of the edge end fitting in with the cross-sectional shape, and output the contour of the pattern as a range of position coordinates.

摘要翻译： 本发明提供一种扫描电子显微镜系统，其适于输出与样品的实际图案边缘端相匹配的轮廓信息，并且被布置成通过相对于扫描电子显微镜图像沿切线方向投影而产生局部投影波形 到扫描电子显微镜图像的图案边缘的每个点处的图案边缘，通过将在每个点处生成的局部投影波形应用到先前已经创建的库来估计在样本上传送的图案的横截面形状 将横截面形状与电子束信号波形相关联，以横截面形状获得边缘端配件的位置坐标，并将图案的轮廓作为位置坐标的范围输出。

公开(公告)号：US20120041312A1

公开(公告)日：2012-02-16

申请号：US13145129

申请日：2010-04-26

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： A61B8/14 ,  G06K9/00

CPC分类号： G06T5/50 ,  G01S7/52077 ,  G06T5/002 ,  G06T2207/10132 ,  G06T2207/20212

摘要： In an ultrasonic diagnosis device, while a signal component is preserved, a factor of degrading image quality such as a flicker of a noise is suppressed. An input image is separated into a signal component image and a noise component image. After frame synthesis processing is performed on the noise component image, the signal component image is synthesized with the noise component image having undergone the frame synthesis. Thus, the noise is suppressed. Otherwise, after the input image is separated into the signal component image and noise component image, the frame synthesis processing is performed on the signal component image. The noise component image is then synthesized with the signal component image having undergone the frame synthesis. Thus, discernment of a signal can be improved.

摘要翻译： 在超声波诊断装置中，在保持信号分量的同时，抑制噪声的闪烁等图像质量下降的因素。 输入图像被分成信号分量图像和噪声分量图像。 在对噪声分量图像执行帧合成处理之后，信号分量图像与已经进行帧合成的噪声分量图像合成。 因此，噪声被抑制。 否则，在将输入图像分离成信号分量图像和噪声分量图像之后，对信号分量图像执行帧合成处理。 然后，噪声分量图像与经过帧合成的信号分量图像合成。 因此，可以提高对信号的识别。

公开(公告)号：US20120026317A1

公开(公告)日：2012-02-02

申请号：US13160108

申请日：2011-06-14

申请人： Kenji NAKAHIRA ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

发明人： Kenji NAKAHIRA ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

IPC分类号： H04N7/18

CPC分类号： H04N5/265 ,  H04N5/217 ,  H04N5/2628 ,  H04N7/183

摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.

摘要翻译： 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含 信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元， 由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像 合成单位。

公开(公告)号：US08106357B2

公开(公告)日：2012-01-31

申请号：US12016290

申请日：2008-01-18

申请人： Kenji Nakahira ,  Toshifumi Honda ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Toshifumi Honda ,  Atsushi Miyamoto

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  G01N2223/401

摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.

摘要翻译： 在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。 基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨力退化因子作为劣化模式的目标来执行图像恢复，使得高 可以在各种条件下获得分辨率的图像。 在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类 做出高精度。