公开(公告)号：US08730318B2

公开(公告)日：2014-05-20

申请号：US13160108

申请日：2011-06-14

申请人： Kenji Nakahira ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

发明人： Kenji Nakahira ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

IPC分类号： H04N9/47 ,  H04N5/235 ,  G06K9/00

CPC分类号： H04N5/265 ,  H04N5/217 ,  H04N5/2628 ,  H04N7/183

摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.

摘要翻译： 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含 信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元， 由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像 合成单位。

公开(公告)号：US20120026317A1

公开(公告)日：2012-02-02

申请号：US13160108

申请日：2011-06-14

申请人： Kenji NAKAHIRA ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

发明人： Kenji NAKAHIRA ,  Atsushi Miyamoto ,  Naoki Hosoya ,  Minoru Yoshida

IPC分类号： H04N7/18

CPC分类号： H04N5/265 ,  H04N5/217 ,  H04N5/2628 ,  H04N7/183

摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.

摘要翻译： 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含 信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元， 由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像 合成单位。

公开(公告)号：US20090266985A1

公开(公告)日：2009-10-29

申请号：US12414759

申请日：2009-03-31

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  G06T5/002 ,  G06T5/008 ,  G06T7/11 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/24495

摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.

摘要翻译： 使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分 图片。 此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。

公开(公告)号：US09460889B2

公开(公告)日：2016-10-04

申请号：US14110758

申请日：2012-04-11

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： H01J37/00 ,  H01J37/26 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809

摘要： A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.

摘要翻译： 使用带电粒子显微镜装置的标本图像捕获方法包括：第一图像获取步骤，其中将带电粒子显微镜中的检测器的增益设置为第一增益值，对样本进行带电粒子束扫描， 获得第一个图像; 第二图像获取步骤，其中检测器的增益被设置为与第一增益值不同的第二增益值，对样本进行带电粒子束扫描，并获得第二图像; 以及其中使用第一增益值和第二增益值并且组合第一图像和第二图像的图像组合步骤。

公开(公告)号：US09341584B2

公开(公告)日：2016-05-17

申请号：US13379663

申请日：2010-06-18

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  G06T5/00

CPC分类号： G01N23/2251 ,  G01N23/2255 ,  G06T5/001 ,  G06T2207/10061 ,  G06T2207/20012 ,  G06T2207/20021 ,  G06T2207/30148 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.

摘要翻译： 对拍摄图像执行能够提高低分辨率区域的图像质量（多层中的下层图案，孔图案中的孔的底部等）的高性能图像质量改进处理。 使用包含在设计数据中的高度信息或从拍摄图像计算的样本高度信息的估计值来计算定义增强强度，并且使用定义增强强度对拍摄图像执行图像质量改善处理。

公开(公告)号：US09245323B2

公开(公告)日：2016-01-26

申请号：US12936769

申请日：2009-04-02

申请人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto

发明人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： A61B6/00 ,  G06T5/00 ,  G06T5/30

CPC分类号： G06T5/002 ,  G06T5/30 ,  G06T2207/20036 ,  G06T2207/20192

摘要： A medical diagnostic device is characterized in that an image processing unit (22) includes an image noise removal part (211, 211′) which removes the noise in the generated image of a person to be examined, a signal component enhancement processing part (212, 212′) which generates an enhanced-signal component image by performing signal component enhancement processing of the image from which the noise is removed by the image noise removal part, and an image combining part (213, 213′) which generates a combined image by combining the image of the person to be examined, the image from which the noise is removed by the image noise removal part, and an enhanced-signal component image subjected to signal component enhancement processing by the signal component enhancement processing part.

摘要翻译： 一种医疗诊断装置的特征在于，图像处理单元（22）包括去除被检查者的生成图像中的噪声的图像噪声去除部（211,211'），信号分量增强处理部（212 ，212'），其通过对由图像噪声去除部除去噪声的图像执行信号分量增强处理来生成增强信号分量图像;以及图像合成部（213,213'），其生成组合图像 通过组合被检查者的图像，由图像噪声去除部分去除噪声的图像和经过信号分量增强处理部分进行信号分量增强处理的增强信号分量图像。

公开(公告)号：US20120098952A1

公开(公告)日：2012-04-26

申请号：US13379663

申请日：2010-06-18

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： H04N7/18

CPC分类号： G01N23/2251 ,  G01N23/2255 ,  G06T5/001 ,  G06T2207/10061 ,  G06T2207/20012 ,  G06T2207/20021 ,  G06T2207/30148 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.

摘要翻译： 对拍摄图像执行能够提高低分辨率区域的图像质量（多层中的下层图案，孔图案中的孔的底部等）的高性能图像质量改进处理。 使用包含在设计数据中的高度信息或从拍摄图像计算的样本高度信息的估计值来计算定义增强强度，并且使用定义增强强度对拍摄图像执行图像质量改善处理。

公开(公告)号：US20100280378A1

公开(公告)日：2010-11-04

申请号：US12599056

申请日：2008-05-09

申请人： Kenji Nakahira ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Atsushi Miyamoto

IPC分类号： A61B8/14 ,  G06T7/00

CPC分类号： G01S7/52046 ,  A61B8/00 ,  G01S7/52026 ,  G06T5/002 ,  G06T5/10 ,  G06T2207/10132 ,  G06T2207/20016 ,  G06T2207/20064 ,  G06T2207/30048

摘要： It is possible to improve an image quality of an ultrasonographic device and improve visibility of a tissue structure and a lesion. According to a noise amount estimated for each of at least two resolution levels and reliability of the noise amount estimation, a corrected noise amount is calculated. An intensity conversion is performed on a decomposition coefficient obtained by a multi-resolution decomposition process using the corrected noise amount. Moreover, by performing intensity conversion of the respective decomposition coefficients according to a plurality of decomposition coefficients, it is possible to generate a high-quality image. Furthermore, by switching processing parameters in accordance with the imaging condition, the image type, and the imaging object, it is possible to simultaneously realize the processing time and the image quality appropriate for the purpose.

摘要翻译： 可以提高超声波装置的图像质量，并提高组织结构和病变的可见性。 根据针对至少两个分辨率级别和噪声量估计的可靠性估计的噪声量，计算校正噪声量。 对通过使用校正噪声量的多分辨率分解处理获得的分解系数执行强度转换。 此外，通过根据多个分解系数执行各个分解系数的强度转换，可以生成高质量的图像。 此外，通过根据成像条件，图像类型和成像对象切换处理参数，可以同时实现适合于该目的的处理时间和图像质量。

公开(公告)号：US09019362B2

公开(公告)日：2015-04-28

申请号：US13513280

申请日：2010-11-08

申请人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto ,  Chie Shishido ,  Hideyuki Kazumi

发明人： Jie Bai ,  Kenji Nakahira ,  Atsushi Miyamoto ,  Chie Shishido ,  Hideyuki Kazumi

IPC分类号： H04N7/18 ,  G01N23/00 ,  G21K7/00 ,  G06K9/00 ,  G06K9/46 ,  G06K9/66 ,  H01J37/28 ,  H01J37/244 ,  H01L21/66

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2817 ,  H01L22/12

摘要： The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.

摘要翻译： 本发明涉及一种通过根据图案布置使用合适的分配比例来合成来自多个检测器的检测信号来提高多层下层图案的对比度的技术。 在能够通过使用从多个检测器获得的检测图像来提高图像质量的带电粒子束装置中，以及提高图像质量的方法中，提供一种从与检测器的各个输出对应的检测图像生成一个或多个输出图像的方法 通过使用从设计数据或检测到的图像计算的图案方向，边缘强度或其他的信息来控制布置在不同位置处的位置。 以这种方式，可以通过使用多个检测器来扩展检测信号的检测区域，并且可以通过使用从设计计算出的图案方向或边缘强度合成检测信号来提高诸如对比度的图像质量 数据或检测到的图像。

公开(公告)号：US08461527B2

公开(公告)日：2013-06-11

申请号：US13362536

申请日：2012-01-31

申请人： Kenji Nakahira ,  Toshifumi Honda ,  Atsushi Miyamoto

发明人： Kenji Nakahira ,  Toshifumi Honda ,  Atsushi Miyamoto

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  G01N2223/401

摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.

摘要翻译： 在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。 基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨率劣化因子作为劣化模式的目标来执行图像恢复，使得高 可以在各种条件下获得分辨率的图像。 在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类 做出高精度。