Method and apparatus for process monitoring
    93.
    发明授权
    Method and apparatus for process monitoring 失效
    过程监控的方法和装置

    公开(公告)号:US06936842B2

    公开(公告)日:2005-08-30

    申请号:US10186270

    申请日:2002-06-26

    IPC分类号: H01J37/32 H01L23/58

    CPC分类号: H01J37/321 H01J37/32935

    摘要: Embodiments of the invention provide an apparatus and method to determine the health of a substrate process such as, for example, a pre-clean process using plasma to remove copper oxide from a copper layer on a substrate, and the point at which the process has ended. In one aspect, optical characteristics and/or chamber impedance are used to determine the process end-point and/or process chamber health.

    摘要翻译: 本发明的实施例提供了一种确定衬底工艺的健康状况的装置和方法,例如,使用等离子体从基底上的铜层除去氧化铜的预清洁工艺,以及该工艺具有的 结束了。 在一个方面,光学特性和/或室阻抗用于确定过程终点和/或处理室健康。

    Implantable biosensor
    94.
    发明申请
    Implantable biosensor 有权
    植入式生物传感器

    公开(公告)号:US20050107677A1

    公开(公告)日:2005-05-19

    申请号:US10948954

    申请日:2004-09-24

    IPC分类号: A61B5/00 C12Q1/00 A61B5/05

    摘要: The invention consists of a sensor with multiple indicating (sensing) electrodes covered with a selectively permeable membrane for monitoring fluid concentrations in a biological environment. The indicating electrodes respond to changes in certain analytes, such as glucose, through an enzyme-mediated reaction. The currents generated from the enzyme-mediated reactions are transmitted through radio signals to an external receiver where the information is processed and recorded. Through the use of various biomaterials and biochemicals associated with the sensor, the monitoring accuracy is improved and the overall viability is prolonged. The process of foreign body fibrosis (formation of a scar capsule around the implanted sensor) eventually limits the functional life of the device. We teach methods of delivery of certain biochemicals that can increase the functional life of the sensor by inhibiting the formation of the foreign body capsule or by stimulating the growth of capillaries into the capsule.

    摘要翻译: 本发明包括具有多个指示(感测)电极的传感器,该电极覆盖有用于监测生物环境中的流体浓度的选择性渗透膜。 指示电极通过酶介导的反应响应某些分析物(例如葡萄糖)的变化。 从酶介导的反应产生的电流通过无线电信号传输到信息被处理和记录的外部接收器。 通过使用与传感器相关的各种生物材料和生物化学品,提高了监测精度,延长了整体的生存能力。 异物纤维化(植入传感器周围形成疤痕胶囊)的过程最终限制了器械的功能寿命。 我们教导了递送某些生物化学物质的方法,这些化学物质可以通过抑制异物胶囊的形成或通过刺激毛细血管进入胶囊来增加传感器的功能寿命。

    Post metal barrier/adhesion film
    95.
    发明授权
    Post metal barrier/adhesion film 有权
    后金属屏障/粘合膜

    公开(公告)号:US06753248B1

    公开(公告)日:2004-06-22

    申请号:US10352505

    申请日:2003-01-27

    IPC分类号: H01L214763

    摘要: A method for processing a substrate. The method generally includes forming a copper interconnect in a sacrificial layer deposited on the substrate by patterning the sacrifical layer to form an interconnect and filling the interconnect with copper. The method additionally includes removing at least a portion of the sacrificial layer upon copper interconnect formation, depositing a barrier layer on the copper interconnect, and depositing a dielectric layer on the barrier layer.

    摘要翻译: 一种处理衬底的方法。 该方法通常包括通过图案化牺牲层以形成互连并用铜填充互连件在沉积在衬底上的牺牲层中形成铜互连。 该方法还包括在铜互连形成时去除牺牲层的至少一部分,在铜互连上沉积阻挡层,以及在阻挡层上沉积电介质层。

    Oligonucleotides containing base-free linking groups with
photoactivatable side chains
    96.
    发明授权
    Oligonucleotides containing base-free linking groups with photoactivatable side chains 失效
    含有无光连接基团和可光活化侧链的寡核苷酸

    公开(公告)号:US5767259A

    公开(公告)日:1998-06-16

    申请号:US487034

    申请日:1995-06-07

    摘要: Methods and compositions are provided for detecting nucleic acid sequences. In particular, pairs of probes are employed, where the pair defines a substantially contiguous sequence on a target nucleic acid. Each of the pairs has a side chain which forms a stem of the two side chains which non-covalently binds and is capable of forming a cross-link upon activation, when the probes and sample nucleic acid are base paired. Each of the nucleic acids is initially present as single stranded nucleic acid to allow for base pairing, so that the probes bind to homologous target nucleic acid. The assay mixture is activated to provide cross-linking, the double stranded nucleic acid melted, and the process of base pairing, activation and melting repeated, a sufficient number of cycles, to provide a detectable amount of cross-linked probes. Also provided are kits comprising reagents, as well as automatic devices, for carrying out the subject method.

    摘要翻译: 提供了用于检测核酸序列的方法和组合物。 特别地,使用成对的探针,其中该对在靶核酸上限定基本上连续的序列。 每个对具有侧链,其形成两个侧链的茎,其非共价结合,并且当探针和样品核酸是碱基配对时能够在激活时形成交联。 每个核酸最初作为单链核酸存在以允许碱基配对,使得探针结合同源的靶核酸。 活化测定混合物以提供交联,双链核酸被熔化,重复碱基配对,活化和熔化的过程,足够数量的循环,以提供可检测量的交联探针。 还提供了用于实施本发明方法的试剂盒以及自动装置。