Anti-vibration system for use in exposure apparatus

    公开(公告)号:US07073644B2

    公开(公告)日:2006-07-11

    申请号:US10329828

    申请日:2002-12-27

    申请人: Hiroaki Kato

    发明人: Hiroaki Kato

    IPC分类号: F16F7/10 F16M1/00 F16M13/00

    CPC分类号: F16F15/0275

    摘要: In order to control an internal pressure of an air spring appropriately without being influenced by a change in supply pressure, an anti-vibration system includes an air spring as an actuator for an anti-vibration table, a pressure control valve for controlling the internal pressure of the air spring, a pressure sensor for detecting the air supply pressure to the pressure control valve, a driving system for actuating the pressure control valve in accordance with a detection signal of the pressure sensor, and a variable gain compensation system for performing variable gain compensation to an input signal to the driving system for the pressure control valve, on the basis of the detection signal of the pressure sensor.

    Vehicle steering apparatus and control method therefor
    92.
    发明申请
    Vehicle steering apparatus and control method therefor 失效
    车辆转向装置及其控制方法

    公开(公告)号:US20050273235A1

    公开(公告)日:2005-12-08

    申请号:US11139695

    申请日:2005-05-31

    CPC分类号: B62D6/003 B62D5/008 B62D6/005

    摘要: When a variable value indicates that a steering characteristic is understeer, a control unit controls a variable transmission ratio device to change a second steering angle such that the greater the understeer indicated by the variable value, the smaller the steering angle of steered wheels relative to the turning angle of a steering wheel becomes. When the differentiated value of the variable value indicates that the understeer is changing to increase, a correction unit corrects the variable value such that the greater the degree of change of the understeer indicated by the differentiated value, the greater the understeer indicated by the variable value becomes. Hence, the attitude of a vehicle in understeer is stabilized with a simple configuration.

    摘要翻译: 当可变值表示转向特性不足时,控制单元控制可变变速比装置以改变第二转向角,使得由可变值指示的转向不足转向越大,转向轮相对于转向角的转向角越小 方向盘的转角变成了。 当可变值的微分值表示不足转向增加时,校正单元校正变量值,使得由微分值表示的不足转换程度越大,变量值指示的转向不足越大 成为 因此,通过简单的结构,车辆在转向不足中的姿态稳定。

    Fluid compressor
    95.
    发明申请
    Fluid compressor 审中-公开
    流体压缩机

    公开(公告)号:US20050112014A1

    公开(公告)日:2005-05-26

    申请号:US10996585

    申请日:2004-11-24

    摘要: A fluid compressor that ensures the discharge of water from a discharge port when water is drawn into or condensed in a pump chamber. The compressor includes a pump chamber for drawing in fluid. The pump chamber includes a bottom part located in a lower portion of the pump chamber. Two rotors arranged in the pump chamber are rotated to compress the fluid in the pump chamber. A discharge port located in the bottom part discharges the compressed fluid out of the pump chamber. The bottom part defines a guide surface formed continuously from the discharge port. The guide surface is sloped downward so that water on the guide surface moves downward to the discharge port due to gravitational force.

    摘要翻译: 一种流体压缩机,当水被抽入或冷凝在泵室中时,确保从排放口排放水。 压缩机包括用于吸入流体的泵室。 泵室包括位于泵室的下部的底部。 设置在泵室中的两个转子旋转以压缩泵室中的流体。 位于底部的排出口将压缩流体排出泵室。 底部限定从排出口连续形成的引导表面。 引导面向下倾斜,使得引导面上的水由于重力而向下移动到排出口。

    Vibration isolator, device manufacturing apparatus and method, semiconductor manufacturing plant and method of maintaining device manufacturing apparatus
    96.
    发明授权
    Vibration isolator, device manufacturing apparatus and method, semiconductor manufacturing plant and method of maintaining device manufacturing apparatus 失效
    隔振器,装置制造装置及方法,半导体制造工厂及维持装置制造装置的方法

    公开(公告)号:US06825635B2

    公开(公告)日:2004-11-30

    申请号:US10102726

    申请日:2002-03-22

    申请人: Hiroaki Kato

    发明人: Hiroaki Kato

    IPC分类号: H01L2130

    摘要: A vibration isolator includes a vibration isolation platform, a vibration sensor installed on the vibration isolation platform, and an angle sensor for sensing an inclination angle of the vibration isolation platform. A detection signal from the vibration sensor is corrected based upon an output from the angle sensor, and the corrected detection signal is used in order to suppress vibration of the vibration isolation platform.

    摘要翻译: 振动隔离器包括隔振平台,安装在振动隔离平台上的振动传感器和用于感测隔振平台倾斜角度的角度传感器。 基于来自角度传感器的输出来校正来自振动传感器的检测信号,并且使用校正的检测信号来抑制隔振平台的振动。

    Negatively chargeable toner and image-forming method
    97.
    发明授权
    Negatively chargeable toner and image-forming method 失效
    带负电荷的调色剂和成像方法

    公开(公告)号:US06777151B2

    公开(公告)日:2004-08-17

    申请号:US10334221

    申请日:2002-12-31

    IPC分类号: G03G908

    摘要: The present invention relates to a negatively chargeable toner, comprising: toner particles prepared by means of a wet granulation method; and external additives externally added to the toner particles, wherein the external additives comprises a first hydrophobic silica having a mean primary particle size of 5 nm to 18 nm, a second hydrophobic silica having a mean primary particle size of 18 nm to 50 nm, which is greater than that of the first hydrophobic silica, and a hydrophobic titanium oxide having a mean primary particle size of 10 nm to 40 nm, and a full color image-forming method using the negatively chargeable toner.

    摘要翻译: 本发明涉及带负电的调色剂,其包括:通过湿式造粒法制备的调色剂颗粒; 外部添加剂外部添加到调色剂颗粒中,其中外部添加剂包括平均一次粒径为5nm至18nm的第一疏水性二氧化硅,第一疏水性二氧化硅的平均一次粒径为18nm至50nm,其为 大于第一疏水性二氧化硅和平均一次粒径为10nm至40nm的疏水性氧化钛,以及使用可带负电荷的调色剂的全色图像形成方法。

    Control device for electric-powered motor and designing method thereof
    98.
    发明授权
    Control device for electric-powered motor and designing method thereof 失效
    电动马达控制装置及其设计方法

    公开(公告)号:US06717381B2

    公开(公告)日:2004-04-06

    申请号:US10197404

    申请日:2002-07-18

    IPC分类号: G05B1101

    CPC分类号: H02P25/098

    摘要: A control device of an electric motor which can compatible high robust stability performance and a tracking performance and a designing method thereof. A feedback correction is obtained based on a detected motor rotation speed and a feedforward correction amount is obtained based on a calculated target torque by a controller of a microcomputer. The microcomputer commands torque control to an SR motor based on the feedback correction amount and the feedforward correction amount.

    摘要翻译: 一种电动马达的控制装置,其能够兼容高稳健性能和跟踪性能及其设计方法。 基于检测到的电动机转速获得反馈校正,并且基于由微型计算机的控制器计算出的目标转矩来获得前馈校正量。 微型计算机根据反馈校正量和前馈校正量,向SR电机指令转矩控制。

    Failure detecting system of exhaust purification apparatus
    100.
    发明授权
    Failure detecting system of exhaust purification apparatus 失效
    排气净化装置故障检测系统

    公开(公告)号:US06185931B1

    公开(公告)日:2001-02-13

    申请号:US09365823

    申请日:1999-08-03

    IPC分类号: F01N300

    摘要: A failure detecting system of an exhaust purification apparatus includes, a catalyst unit including an electrically heated catalyst and intervened in an engine exhaust path, an air pump supplying a secondary air to the engine exhaust path, a first electric current sensor detecting electric current value for the electrically heated catalyst, and a second electric current sensor detecting electric current value for the air pump. The electrically heated catalyst and air pump are supplied with current upon a cold start of an engine. Presence of failures in the electrically heated catalyst and air pump is discerned on the basis of the electric current value each of the first and second electric current sensors, and the detection of the current value of the first electric current sensor starts prior to the detection of the current value of the second electric current sensor.

    摘要翻译: 排气净化装置的故障检测系统包括:催化剂单元,其包括电加热的催化剂并且介于发动机排气路径中;向发动机排气路径供给二次空气的空气泵;检测电流值的第一电流传感器, 所述电加热催化剂和检测所述气泵的电流值的第二电流传感器。 电加热的催化剂和空气泵在发动机的冷启动时被供给电流。 基于第一和第二电流传感器的电流值,识别电加热的催化剂和空气泵中的故障的存在,并且在检测到第一电流传感器之前开始检测第一电流传感器的当前值 第二电流传感器的当前值。