公开(公告)号：US5922179A

公开(公告)日：1999-07-13

申请号：US954080

申请日：1997-10-20

申请人： Richard J. Mitro ,  Reza Alani ,  Leszek Malaszewski

发明人： Richard J. Mitro ,  Reza Alani ,  Leszek Malaszewski

IPC分类号： C23C14/02 ,  C23C14/46 ,  C23C14/56 ,  C23F4/00 ,  G01N1/32 ,  H01J37/305 ,  H01J37/317 ,  C23C14/34

CPC分类号： C23C14/566 ,  C23C14/022 ,  C23C14/46 ,  G01N1/32 ,  H01J37/3053 ,  H01J37/34

摘要： An apparatus and process for the etching and coating of samples in a single vacuum chamber, thus minimizing handling and transfer of the samples is provided. The apparatus includes a sealed chamber and a vacuum pump for forming and maintaining a vacuum in the chamber, a first ion gun positioned in the chamber to etch a sample, a sputtering target in the chamber, and at least one additional ion gun positioned in the chamber to cause material from the target to be directed onto the sample.

摘要翻译： 提供了用于在单个真空室中蚀刻和涂覆样品的设备和方法，从而最小化样品的处理和转移。 该装置包括密封室和用于在室中形成和保持真空的真空泵，定位在室中的第一离子枪以蚀刻样品，在室中的溅射靶，以及至少一个位于 将来自目标的材料引导到样品上。

公开(公告)号：US5753924A

公开(公告)日：1998-05-19

申请号：US815685

申请日：1997-03-12

申请人： Peter R. Swann

发明人： Peter R. Swann

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/2001

摘要： An ultra-high tilt cryotransfer holder is provided which is capable of rotating a specimen through a full 360.degree. tilt angle (180.degree. from horizontal in both clockwise and counterclockwise directions) without spillage of cryogenic liquid, and while maintaining proper protection and cooling of the specimen. The cryotransfer holder includes a holder body having a specimen tip and a source of cooling for the specimen tip. The specimen tip includes a specimen grid of a thermally conductive material which has a plurality of grid openings between crossing grid bars. The grid may be extended from the holder into a forward viewing position or retracted into a protected position within a cryoshield.

摘要翻译： 提供了一种超高倾斜式低温转印架，能够使样品以360度垂直的倾斜角度（顺时针和逆时针方向的水平方向180度）旋转，而不会溢出低温液体，同时保持适当的保护和冷却 标本。 低温转印架包括具有试样尖端的保持器主体和用于试样尖端的冷却源。 样品末端包括导热材料的样品网格，其在交叉网格条之间具有多个网格开口。 网格可以从保持器延伸到向前观察位置或缩回到冷冻空间内的受保护位置。

公开(公告)号：US5472566A

公开(公告)日：1995-12-05

申请号：US339483

申请日：1994-11-14

申请人： Peter R. Swann ,  Reza Alani

发明人： Peter R. Swann ,  Reza Alani

IPC分类号： G01N1/28 ,  G01N1/32 ,  H01J37/20 ,  H01J37/30 ,  H01L21/00 ,  B44C1/22 ,  C03C15/00 ,  H01L21/306

CPC分类号： H01J37/20 ,  G01N1/32 ,  H01J2237/2007

摘要： An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.

摘要翻译： 提供了一种设备和样品架，适用于允许从试样两侧以非常小的角度入射到0°的同时进行双面离子束研磨，并包括用于双面离子束铣削的样品架， 具有适于接合样本的周边边缘的至少一个延伸的样本支撑臂的基座。 样品被固定到至少一个样品支撑臂上，优选地允许离子束以非常低的入射角向下定向到试样的第一和第二主表面。 快速研磨以及减少伪影提供了高质量的样品用于透射电子显微镜分析。

公开(公告)号：US5065029A

公开(公告)日：1991-11-12

申请号：US562667

申请日：1990-08-03

申请人： Ondrej L. Krivanek

发明人： Ondrej L. Krivanek

IPC分类号： G01Q30/02 ,  G01Q30/16 ,  H01J37/18 ,  H01J37/22

CPC分类号： H01J37/224 ,  H01J37/18

摘要： An apparatus comprising a cooled slow-scan charge-coupled device camera mounted in a chamber attached to a projection or specimen chamber of an electron microscope, and a vacuum valve separating the camera chamber from the microscope chamber. The operation of the vacuum valve is linked to the microscope vacuum system such that the valve remains open while the microscope chamber is under vacuum, but closes if the microscope chamber is about to be let up to atmospheric pressure, and stays closed until the microscope chamber is evacuated again. In an alternate embodiment of the invention, the camera is inserted by a pneumatically operated piston to the microscope chamber, and is withdrawn and sealed off in a separate vacuum chamber in the microscope chamber is about to be let up to air.

摘要翻译： 一种装置，包括安装在附接到电子显微镜的投影或样本室的室中的冷却慢扫描电荷耦合器件照相机，以及将相机室与显微镜室分开的真空阀。 真空阀的操作与显微镜真空系统相关联，使得当显微镜室处于真空状态时，阀保持打开，但如果显微镜室将要放大气压力关闭，并保持关闭直到显微镜室 再次撤离。 在本发明的替代实施例中，相机由气动操作的活塞插入到显微镜室，并且在显微镜室中的单独的真空室中被取出并密封即将被放出空气。

公开(公告)号：US4831255A

公开(公告)日：1989-05-16

申请号：US160016

申请日：1988-02-24

申请人： Ondrej L. Krivanek

发明人： Ondrej L. Krivanek

IPC分类号： G01Q60/00 ,  G01T1/16 ,  G01T1/29 ,  G01T7/00 ,  G21K1/08 ,  G21K3/00 ,  H01J37/04 ,  H01J37/244 ,  H01J49/06

CPC分类号： H01J37/045 ,  G01T1/16 ,  G01T1/29 ,  G21K1/08

摘要： An electron beam attenuator decreases the intensity of an electron beam incident on a parallel electron detector by alternately deflecting the electron beam onto and away from the detector. A power supply controlling the attenuator is synchronized with the operation of the detector such that the electron beam only strikes the detector when the detector is not being read-out. The ratio of the time that the electron beam is incident on the detector to the time that the beam is off the detector is varied to give an adjustable attenuation of the detected electron signal. The intensity of the electron beam incident on the detector is monitored by a sensor separate from the parallel detector. When the beam intensity exceeds a pre-determined threshold, the attenuator is automatically activated, in order to prevent damage to the detector.

摘要翻译： 电子束衰减器通过将电子束交替地偏转到和远离检测器来降低入射在平行电子检测器上的电子束的强度。 控制衰减器的电源与检测器的操作同步，使得当检测器未被读出时，电子束仅撞击检测器。 电子束入射到检测器上的时间与光束离开检测器的时间的比率是变化的，以给出检测到的电子信号的可调衰减。 入射到检测器上的电子束的强度由与平行检测器分开的传感器监测。 当光束强度超过预定阈值时，衰减器被自动激活，以防止对检测器的损坏。

公开(公告)号：US4739399A

公开(公告)日：1988-04-19

申请号：US82273

申请日：1987-08-06

申请人： Peter R. Swann ,  Bernd Kraus

发明人： Peter R. Swann ,  Bernd Kraus

IPC分类号： G01Q30/02 ,  G01Q30/04 ,  H01J37/22 ,  H04N7/18

CPC分类号： H01J37/224

摘要： A device comprising a television camera mounted inside the projection chamber of a transmission electron microscope with the imaging surface perpendicular to the optical axis of the microscope. The electron image is converted to a light image by high efficiency YAG transmission scintillator and transferred by a low loss fiber optic plate to a CCD imaging device. The camera is moved by a pneumatic piston between the operating position where it intercepts the electron beam and a position where the electron beam can pass unobstructed to the main microscope viewing screen.

摘要翻译： 一种装置，包括安装在透射电子显微镜的投影室内的成像表面垂直于显微镜的光轴的电视摄像机。 电子图像通过高效YAG透射闪烁体转换成光图像，并通过低损耗光纤板转移到CCD成像装置。 摄像机通过气动活塞在其拦截电子束的操作位置和电子束能够通过到主显微镜观察屏幕的位置之间移动。

公开(公告)号：US4703181A

公开(公告)日：1987-10-27

申请号：US848970

申请日：1986-04-07

申请人： Peter R. Swann ,  Bernd Kraus

发明人： Peter R. Swann ,  Bernd Kraus

IPC分类号： H01J37/20

CPC分类号： H01J37/20

摘要： A device interposed between an electron microscope specimen holder and a microscope translation stage constructed of a special combination of materials arranged in such a manner that little or no specimen drift occurs when the temperature of the complete assembly is changed. In the first and more common arrangement, the device is placed in the nose of the standard microscope specimen holder and consists of a silica rod inside a metal tube, the material of the tube having a larger coefficient of thermal expansion than the material of the specimen rod. In the second, and less common arrangement the device is placed on the opposite side of the specimen away from the nose of the holder and consists of one tube, the material of which must have a larger coefficient of thermal expansion than the material of the specimen holder.

摘要翻译： 插入在电子显微镜样品架和显微平移台之间的装置，其由以完全组装件的温度改变很少或没有样品漂移发生的方式布置的材料的特殊组合构成。 在第一和更常见的布置中，将装置放置在标准显微镜样品架的鼻部，并由金属管内的二氧化硅棒组成，该管的材料具有比样品材料更大的热膨胀系数 竿。 在第二个较不常见的布置中，该装置被放置在离开保持器的鼻部的试样的相对侧上，并且由一个管组成，其中一个管的材料必须具有比试样的材料更大的热膨胀系数 持有人

公开(公告)号：US4672797A

公开(公告)日：1987-06-16

申请号：US747255

申请日：1985-06-21

申请人： Herbert K. Hagler

发明人： Herbert K. Hagler

IPC分类号： G01N1/28 ,  B65B5/04 ,  B65B7/26 ,  B65B67/02

CPC分类号： G01N1/28

摘要： An apparatus (10) for use in securing a specimen (S) in a folding specimen holder (58) having an arm blade (12). A spring clip (26) releasably secures the grid (58) to the arm blade (12) so that one or more specimens may be loaded into the holder (58). A slider (22) mounted on the arm blade (12) operates to fold the holder (58) upon itself in order to secure the specimens (S) in the holder (58). The spring clip (26) is thereafter operated to release the holder (58) after the holder (58) has been transferred from a first workstation (48) to a second workstation (62).

摘要翻译： 一种用于将试样（S）固定在具有臂片（12）的折叠试样架（58）中的装置（10）。 弹簧夹（26）可释放地将格栅（58）固定到臂片（12）上，使得一个或多个试样可以装载到保持器（58）中。 安装在臂式刀片（12）上的滑动件（22）用于将保持器（58）折叠在其自身上，以将样本（S）固定在保持器（58）中。 此后，在保持器（58）已经从第一工作站（48）传送到第二工作站（62）之后，弹簧夹（26）被操作以释放保持器（58）。