Dual interferometer spectroscopic imaging system
    92.
    发明授权
    Dual interferometer spectroscopic imaging system 失效
    双干涉仪光谱成像系统

    公开(公告)号:US5285261A

    公开(公告)日:1994-02-08

    申请号:US909277

    申请日:1992-07-06

    摘要: To obtain spectra from the surface of a sample, a first of a pair of interferometers includes a broadband radiation source and modulates the radiation at a frequency which is inversely proportional to wavelength. The modulated radiation impinges on the surface of interest where it is absorbed. The absorption of radiation causes the surface of the sample to expand. This change in dimension is then detected by a second interferometer which employs a monochromatic radiation source to measure the instantaneous distance between the sample surface and the second interferometer. The detection system of the second interferometer can be an imaging device such as a video camera to obtain the spatial distribution of chemical composition of the sample surface.

    摘要翻译: 为了从样品的表面获得光谱,一对干涉仪中的第一个包括宽带辐射源并以与波长成反比的频率调制辐射。 调制的辐射照射在感兴趣的表面上,在其被吸收的地方。 辐射的吸收导致样品的表面膨胀。 然后通过采用单色辐射源测量样品表面和第二干涉仪之间的瞬时距离的第二干涉仪检测尺寸变化。 第二干涉仪的检测系统可以是诸如摄像机的成像装置,以获得样品表面的化学成分的空间分布。