公开(公告)号：US20030165178A1

公开(公告)日：2003-09-04

申请号：US10090287

申请日：2002-03-01

发明人： Peter G. Borden ,  Ji-Ping Li

IPC分类号： G01N025/72

CPC分类号： H01L22/34 ,  G01N25/72 ,  H01L2924/3011

摘要： Heat is applied to a conductive structure that includes one or more vias, and the temperature at or near the point of heat application is measured. The measured temperature indicates the integrity or the defectiveness of various features (e.g. vias and/or traces) in the conductive structure, near the point of heat application. Specifically, a higher temperature measurement (as compared to a measurement in a reference structure) indicates a reduced heat transfer from the point of heat application, and therefore indicates a defect. The reference structure can be in the same die as the conductive structure (e.g. to provide a baseline) or outside the die but in the same wafer (e.g. in a test structure) or outside the wafer (e.g. in a reference wafer), depending on the embodiment.

摘要翻译： 将热施加到包括一个或多个通孔的导电结构，并且测量在加热点处或附近的温度。 测量的温度表示导热结构中靠近加热点的各种特征（例如通路和/或迹线）的完整性或缺陷。 具体而言，较高的温度测量（与参考结构中的测量相比）表示从加热点减少的热传递，因此表示缺陷。 参考结构可以与导电结构（例如，提供基线）或模具外部在相同的晶片（例如，在测试结构中）或晶片外部（例如，在参考晶片中）处于相同的裸片中，这取决于 该实施例。

公开(公告)号：US20020110176A1

公开(公告)日：2002-08-15

申请号：US09784597

申请日：2001-02-15

申请人： THE UNIVERSITY OF CHICAGO

发明人： Jiangang Sun ,  William A. Ellingson ,  Chris M. Deemer

IPC分类号： G01N025/72

CPC分类号： G01N25/72

摘要： A method and apparatus are provided for automated non-destructive evaluation (NDE) thermal imaging tests of combustor liners and other products. The apparatus for automated NDE thermal imaging testing of a sample includes a flash lamp positioned at a first side of the sample. An infrared camera is positioned near a second side of the sample. A linear positioning system supports the sample. A data acquisition and processing computer is coupled to the flash lamp for triggering the flash lamp. The data acquisition and processing computer is coupled to the infrared camera for acquiring and processing image data. The data acquisition and processing computer is coupled to the linear positioning system for positioning the sample for sequentially acquiring image data.

摘要翻译： 提供了一种用于燃烧器衬管和其他产品的自动化非破坏性评估（NDE）热成像测试的方法和装置。 用于样品的自动NDE热成像测试的装置包括位于样品第一侧的闪光灯。 红外线摄像机位于样品第二侧附近。 线性定位系统支持样品。 数据采集​​和处理计算机耦合到闪光灯以触发闪光灯。 数据采集​​和处理计算机耦合到红外摄像机，用于获取和处理图像数据。 数据采集​​和处理计算机耦合到线性定位系统，用于定位样本以顺序地获取图像数据。

公开(公告)号：US20020018508A1

公开(公告)日：2002-02-14

申请号：US09176580

申请日：1998-10-21

发明人： RAMESH SUNDARAM ,  WEI H. YAO

IPC分类号： G01N025/72 ,  G01N025/00

CPC分类号： G11B33/10 ,  G01N25/72 ,  G11B5/012 ,  G11B5/6076 ,  G11B23/505 ,  G11B2005/001 ,  Y10T29/49041 ,  Y10T29/49048

摘要： Glide heads for the detection of asperities on a storage disc have a thermal transducer oriented along the air bearing surface. The thermal transducer generally is in electrical contact with a circuit to measure the electrical resistance of the thermal transducer. Preferred methods of depositing the thermal transducer involve the deposition of the thermal transducer on the smooth surface of a wafer prior to the slicing of individual sliders.

摘要翻译： 用于检测存储盘上的凹凸的滑动头具有沿空气轴承表面定向的热传感器。 热传感器通常与电路电接触以测量热传感器的电阻。 沉积热变换器的优选方法包括在各个滑块的切片之前将热变换器沉积在晶片的光滑表面上。

公开(公告)号：US20010017878A1

公开(公告)日：2001-08-30

申请号：US09725900

申请日：2000-11-30

发明人： Mari Nozoe ,  Hidetoshi Nishiyama ,  Shigeaki Hijikata ,  Kenji Watanabe ,  Koji Abe

IPC分类号： G01N025/72 ,  G01N025/00

CPC分类号： G06T7/0004 ,  G01N23/20 ,  G06T2207/30148 ,  H01J2237/2487 ,  H01J2237/2817

摘要： There are provided an inline inspection system and inspection method for inspecting the substrate surface on which semiconductors and circuit patterns are formed by radiating thereto white beam, laser beam or electron beam, and reviewing, inspecting and discriminating the detected roughness and figure defect, particle and moreover electrical defect on the surface with higher accuracy within a short period of time with the same instrument. Thereby, automatic movement to the position to be reviewed, acquisition of image and classification can be realized. On the occasion of identifying the position to be reviewed on a sample and forming an image through irradiation of electron beam on the basis of the positional information of defect detected with the other inspection instrument, an electrical defect can be reviewed with the voltage contrast mode by designating the electron beam irradiation condition, detectors and detecting condition depending on a kind of defect to be reviewed. The image obtained is automatically classified in the image processing unit and the result is then additionally output to the defect file.

摘要翻译： 提供了一种在线检查系统和检查方法，用于通过向其发射白光束，激光束或电子束来检查其上形成有半导体和电路图案的衬底表面，并且检查和检查检测到的粗糙度和图形缺陷，颗粒和 此外，在相同仪器的短时间内，表面具有较高精度的电气缺陷。 因此，可以实现自动移动到要检查的位置，获取图像和分类。 在通过基于用其他检查仪检测到的缺陷的位置信息的基础上，通过照射电子束来识别要检查的位置并形成图像的情况下，可以通过电压对比度模式来检查电缺陷 指定电子束照射条件，检测器和检测条件取决于要检查的缺陷的种类。 所获得的图像被自动分类到图像处理单元中，然后将结果另外输出到缺陷文件。

公开(公告)号：US20040050164A1

公开(公告)日：2004-03-18

申请号：US10380409

申请日：2003-07-16

发明人： Daniel Bates

IPC分类号： G01N029/14 ,  G01N025/72

CPC分类号： G01N29/345 ,  G01N25/72 ,  G01N29/045 ,  G01N29/40 ,  G01N33/20 ,  G01N2021/1731 ,  G01N2291/014 ,  G01N2291/0231 ,  G01N2291/106 ,  G01N2291/2694

摘要： Apparatus for non-destructively testing material to enable detection of any damage sites, comprising means for generating localised heating at any damage site in the material, and means for imaging the material to enable detection of any localised heating at the damage site.

摘要翻译： 用于非破坏性地测试材料以使得能够检测任何损伤部位的装置，包括用于在所述材料中的任何损伤部位产生局部加热的装置，以及用于使材料成像以使得能够检测损伤部位的任何局部加热的装置。

公开(公告)号：US20030219059A1

公开(公告)日：2003-11-27

申请号：US10154470

申请日：2002-05-23

发明人： William R. Scott

IPC分类号： G01N025/72

CPC分类号： G01N25/72

摘要： A system employing thermographic techniques is provided for inspecting materials and detecting defects therein such as void, inclusions, interlaminar disbonds, or porosity. The system utilizes a composite material and a source of pulsed current which is delivered to conductive elements within the composite material which, in turn, heats the material being inspected allowing thermographic techniques to be employed to measure the temperature distributions related to the application of the heat source and indicative of the defects of the material being measured.

摘要翻译： 提供采用热成像技术的系统用于检查材料并检测其中的缺陷，例如空隙，夹杂物，层间剥离或多孔性。 该系统利用复合材料和脉冲电流源，其被递送到复合材料内的导电元件，其又加热待检查的材料，允许使用热成像技术来测量与施加热量相关的温度分布 来源并指示被测材料的缺陷。

公开(公告)号：US20020126730A1

公开(公告)日：2002-09-12

申请号：US09761732

申请日：2001-01-18

发明人： Jiangang Sun ,  Chris Deemer

IPC分类号： G01N025/20 ,  G01N025/72

CPC分类号： G01N25/72

摘要： A system and method for determining lateral thermal diffusivity of a material sample using a heat pulse; a sample oriented within an orthogonal coordinate system; an infrared camera; and a computer that has a digital frame grabber, and data acquisition and processing software. The mathematical model used within the data processing software is capable of determining the lateral thermal diffusivity of a sample of finite boundaries. The system and method may also be used as a nondestructive method for detecting and locating cracks within the material sample.

摘要翻译： 一种使用热脉冲确定材料样品的横向热扩散率的系统和方法; 在正交坐标系中定向的样本; 红外摄像机; 以及具有数字帧抓取器，数据采集和处理软件的计算机。 数据处理软件中使用的数学模型能够确定有限边界样本的横向热扩散系数。 该系统和方法也可以用作用于检测和定位材料样品中的裂纹的非破坏性方法。

公开(公告)号：US20010019573A1

公开(公告)日：2001-09-06

申请号：US09778698

申请日：2001-02-07

发明人： John J. Dougherty ,  Bo L. Andersen

IPC分类号： G01N025/72 ,  G01R031/327 ,  B65B057/02

CPC分类号： H01H1/0015 ,  H01H71/123 ,  H01H71/125 ,  H01H2011/0068

摘要： A method of determining contact wear in a trip unit of a circuit breaker and a circuit breaker employing such a method are presented. The trip unit includes a microcontroller and associated memories. An algorithm (program) stored in a memory of the trip unit calculates cumulative energy dissipated in the breaker contacts using the current signal detected at the time of separation. Measurement of cumulative energy dissipated in the breaker contacts is proportional to contact wear. Maintenance setpoints are determined based on industry standard endurance tests and alarm threshold and trip thresholds further based on industry standards are provided within the algorithm for notifying local or remote personnel of a necessary maintenance procedure.

摘要翻译： 介绍了一种确定断路器跳闸单元和采用这种方法的断路器的接触磨损的方法。 跳闸单元包括微控制器和相关联的存储器。 存储在跳闸单元的存储器中的算法（程序）使用在分离时检测到的当前信号来计算在断路器触点中消耗的累积能量。 断路器触点中消耗的累积能量的测量与接触磨损成比例。 维护设定值是根据行业标准耐久性测试确定的，并且在算法内提供进一步基于行业标准的报警阈值和跳闸阈值，以通知本地或远程人员必要的维护程序。

公开(公告)号：US20040244509A1

公开(公告)日：2004-12-09

申请号：US10250741

申请日：2003-07-07

发明人： Alexander Savitski

IPC分类号： G01N025/72

CPC分类号： B29C65/82 ,  B29C37/04 ,  B29C65/20 ,  B29C65/8253 ,  B29C66/1142 ,  B29C66/5221 ,  B29C66/71 ,  B29C66/9141 ,  B29C66/91411 ,  B29C66/91421 ,  B29C66/919 ,  B29C66/91921 ,  G01N1/286 ,  G01N19/06 ,  G01N21/29 ,  G01N21/8803 ,  B29K2023/12 ,  B29K2023/065 ,  B29K2023/06

摘要： A non-destructive plastic butt weld inspection method in which the weld bead 42 is removed from an exterior surface of a weld zone region 44 of a butt weld and the weld zone region 44 is heated to a temperature sufficient to visualize the weld zone 44. After heating, defective joints are readily identified by the appearance of a bond line 40 in the weld zone 44 while satisfactory joints merely show the weld zone 44 with no evidence of a bond line 40. Surface irregularities such as ridges 46 and indentations 48 may also form in the weld zone during the heating step.

摘要翻译： 将焊接胎圈42从对接焊缝的焊接区域44的外表面去除并且焊接区域44被加热到足以使焊接区44可视化的温度的非破坏性塑料对接焊检查方法。 在加热之后，焊接区44中的接合线40的外观易于识别缺陷接头，而令人满意的接头只显示没有接合线40的迹象的焊接区44.表面不规则如脊46和凹陷48也可以 在加热步骤期间在焊接区形成。

公开(公告)号：US20040190586A1

公开(公告)日：2004-09-30

申请号：US10708571

申请日：2004-03-11

发明人： Peng Lee ,  Kevin J. Seddon

IPC分类号： G01N025/72 ,  G01J005/00

CPC分类号： G01N25/72

摘要： This invention provides an apparatus for nondestructive residential inspection and various methods for using a thermal imaging apparatus coupled to inspect exterior residential components, interior residential components, a pitched roof and basement of a residential building and the electrical system of a residential building.

摘要翻译： 本发明提供了一种用于非破坏性住宅检查的装置，以及使用耦合以检查住宅建筑物的外部住宅部件，室内住宅部件，倾斜屋顶和地下室以及住宅建筑物的电气系统的热成像设备的各种方法。