Cathode arrangement, electron gun, and lithography system comprising such electron gun
    94.
    发明申请
    Cathode arrangement, electron gun, and lithography system comprising such electron gun 有权
    阴极装置,电子枪和包括这种电子枪的光刻系统

    公开(公告)号:US20150187541A1

    公开(公告)日:2015-07-02

    申请号:US14578525

    申请日:2014-12-22

    Abstract: The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及一种阴极装置,其包括:热离子阴极,其包括具有用于发射电子的发射表面的发射部分和用于保持材料的储存器,其中所述材料在被加热时释放向发射扩散的功函数降低颗粒 以第一蒸发速率发射在发射表面; 聚焦电极,其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 以及可调节热源,其被配置为将聚焦表面保持在防止在聚焦表面上降低颗粒的功函数积累的温度。

    SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
    95.
    发明申请
    SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION 有权
    包含用于均质电子发射的分配器阴极的多光束光刻的系统,方法和装置

    公开(公告)号:US20110180721A1

    公开(公告)日:2011-07-28

    申请号:US13082333

    申请日:2011-04-07

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

    SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION
    96.
    发明申请
    SYSTEM, METHOD AND APPARATUS FOR MULTI-BEAM LITHOGRAPHY INCLUDING A DISPENSER CATHODE FOR HOMOGENEOUS ELECTRON EMISSION 有权
    包含用于均质电子发射的分配器阴极的多光束光刻的系统,方法和装置

    公开(公告)号:US20100219357A1

    公开(公告)日:2010-09-02

    申请号:US12750619

    申请日:2010-03-30

    Abstract: A dispenser cathode which is comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, and emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当加热时,功能降低颗粒和用于允许功能降低颗粒从所述储存器扩散到所述排放表面的至少一个通道,以及 发射表面包括至少一个发射区域和被发射抑制材料覆盖并围绕每个发射区域的至少一个非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道并在 与发射区域的扩散长度距离,用于允许作业功能降低颗粒从所述储存器扩散到所述发射区域。

    Cathode structure, and production method therefor and electron gun and cathode ray tube
    97.
    发明申请
    Cathode structure, and production method therefor and electron gun and cathode ray tube 审中-公开
    阴极结构及其制造方法以及电子枪和阴极射线管

    公开(公告)号:US20030117054A1

    公开(公告)日:2003-06-26

    申请号:US10220020

    申请日:2002-10-28

    CPC classification number: H01J1/16 H01J1/13 H01J1/28 H01J9/04 H01J29/04

    Abstract: To obtain a cathode electrode (a cathode structure) where the electron beam spot diameter or size is reduced, the cathode driving voltage is lowered and the cathode current is stabilized for a long period, a recess or a region which does not radiate electron beams is formed near the central portion or near the outer circumference portion of an electrode radiation substance 9 of a cathode electrode 1, and hollow electron beams are obtained related to a cathode electrode, its manufacturing method, an electron gun and a cathode-ray tube.

    Abstract translation: 为了获得电子束斑直径或尺寸减小的阴极电极(阴极结构),阴极驱动电压降低,阴极电流长时间稳定,凹部或不辐射电子束的区域为 形成在阴极电极1的电极辐射物质9的中央部分附近或其外周部附近形成中空电子束,其制造方法,电子枪,阴极射线管等。

    Impregnated cathode for low power cathode-ray tube
    98.
    发明授权
    Impregnated cathode for low power cathode-ray tube 失效
    用于低功率阴极射线管的浸渍阴极

    公开(公告)号:US6016026A

    公开(公告)日:2000-01-18

    申请号:US987199

    申请日:1997-12-09

    Applicant: Jong Hwan Lee

    Inventor: Jong Hwan Lee

    CPC classification number: H01J1/26 H01J1/28

    Abstract: A low power impregnated cathode consisting of a pallet, a cup, an inner sleeve, a cap, and an outer sleeve, is characterized in that the diameter of the pellet is less than at least one and half times of the thickness of the pellet, and is characterized in that an outer diameter of the bottom part of the outer sleeve is larger than an outer diameter of the top part thereof.

    Abstract translation: 由托盘,杯子,内套筒,帽和外套筒组成的低功率浸渍阴极的特征在于,颗粒的直径小于颗粒厚度的至少一倍半, 其特征在于,外套筒的底部的外径大于其顶部的外径。

    Impregnated cathode with composite top coat
    99.
    发明授权
    Impregnated cathode with composite top coat 失效
    浸渍阴极与复合面漆

    公开(公告)号:US5936334A

    公开(公告)日:1999-08-10

    申请号:US332620

    申请日:1994-10-31

    CPC classification number: H01J9/042 H01J1/28

    Abstract: A cathode having a matrix body (1) impregnated with an alkaline earth compound, whose surface is provided with a top coat (2, 3, 4) comprising a high melting point metal, such as particularly tungsten, and scandium. A high emission at a low operating temperature and simultaneously a rapid recuperation after ion bombardment as well as a long lifetime are achieved in that the top coat comprises at least two layers of different composition, with a purely metallic layer (5, 6, 7) being provided on the impregnated matrix body (1), which layer comprises scandium and a high melting point metal such as particularly tungsten and/or rhenium, and in that a metallic layer of a high melting point metal such as particularly tungsten is provided as a sealing layer.

    Abstract translation: 一种阴极,其具有浸渍有碱土金属化合物的基体(1),其表面设置有包括高熔点金属(例如钨)和钪的面漆(2,3,4)。 实现了在低工作温度下的高发射以及离子轰击之后的快速还原以及长寿命,其中顶涂层包含至少两层不同组成,其中纯金属层(5,6,7) 提供在浸渍的基质体(1)上,该层包括钪和特别是钨和/或铼的高熔点金属,并且提供诸如特别是钨的高熔点金属的金属层作为 密封层。

    Method of manufacturing a dispenser cathode
    100.
    发明授权
    Method of manufacturing a dispenser cathode 失效
    制造分配器阴极的方法

    公开(公告)号:US5890941A

    公开(公告)日:1999-04-06

    申请号:US824025

    申请日:1997-03-25

    CPC classification number: H01J9/047 H01J1/28 H01J2201/2892

    Abstract: A method of manufacturing a dispenser cathode, in which method a powder of a refractory metal and a scandium-containing powder are mixed with each other and pressed to form a cathode body. According to the invention at least both these powders and a suitable binder are mixed with each other to form a homogeneous suspension prior to the pressing operation and the whole mixture is subsequently cured and ground to granules having a larger average size and hence a greater fluidity than the grains of the starting powders. Subsequently the granules thus obtained are pressed to form a cathode body (2). The invention leads to a better processibility and greater convenience of handling of the starting powders so that notably very fine staring powders can be used, which results in cathodes (1) having a better recovery after ion bombardment as compared with cathodes manufactured in conventional manners which are necessarily based on relatively coarse powders.

    Abstract translation: 一种制造分配器阴极的方法,其中将难熔金属和含钪粉末的粉末彼此混合并压制以形成阴极体。 根据本发明,至少将这两种粉末和合适的粘合剂彼此混合以在压制操作之前形成均匀的悬浮液,然后将整个混合物固化并研磨成具有较大平均尺寸的颗粒,因此流动性大于 起始粉末的颗粒。 随后将由此获得的颗粒压制以形成阴极体(2)。 本发明导致更好的加工性和更好的处理起始粉末的方便性,使得可以使用显着非常精细的起始粉末,这导致与以常规方法制造的阴极相比,在离子轰击之后具有更好恢复的阴极(1),其中 必须基于较粗的粉末。

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