Sensor chip used for multi-physical quantity measurement and preparation method thereof

    公开(公告)号:US10942048B2

    公开(公告)日:2021-03-09

    申请号:US15318481

    申请日:2015-06-12

    摘要: A sensor chip is used for multi-physical quantity measurement. This sensor chip comprises a substrate and at least two of the following sensors: a temperature sensor, a humidity sensor, or a pressure sensor, which are integrated onto the same substrate, wherein the pressure sensor consists of electrically interconnected resistive elements. The humidity sensor is an interdigitated structure. Thermistor elements are placed around the pressure sensor and the humidity sensor to form a temperature sensor. The temperature sensor has a resistance adjusting circuit. A microcavity is etched on the back of the substrate in a place on the opposite side pressure sensor's location. Also disclosed is a preparation method for a sensor chip used for multi-physical quantity measurement. This multi-physical quantity measurement single chip sensor chip has the advantages of low cost, low power consumption, easy fabrication, and wide applicability.

    MODULATED MAGNETORESISTIVE SENSOR
    102.
    发明申请

    公开(公告)号:US20200217908A1

    公开(公告)日:2020-07-09

    申请号:US16500912

    申请日:2018-04-04

    IPC分类号: G01R33/09

    摘要: A modulated magnetoresistive sensor consists of a substrate located on a substrate in an XY plane, magnetoresistive sensing elements, a modulator, electrical connectors, an electrical insulating layer, and bonding pads. The sensing direction of the magnetoresistive sensing elements is parallel to the X axis. The magnetoresistive sensing elements are connected in series into a magnetoresistive sensing element string. The modulator is comprised of multiple elongated modulating assemblies. The elongated modulating assemblies consist of three layers—FM1 layer, NM layer, and FM2 layer. The ends of the elongated modulating assemblies are electrically connected to form a serpentine current path. The electrical insulating layer is set between the elongated modulating assemblies and the magnetoresistive sensing elements to separate the elongated modulating assemblies from the magnetoresistive sensing elements. The current modulates the permeability of the elongated modulating assemblies, and it is regulated in order to keep the modulated signal in the linear range of the magnetoresistive sensors. This technique suppresses sensor noise.

    Magnetoresistive sensor wafer layout used for a laser writing system, and corresponding laser scanning method

    公开(公告)号:US10663536B2

    公开(公告)日:2020-05-26

    申请号:US16333121

    申请日:2017-09-13

    摘要: A magnetoresistive sensor wafer layout scheme used for a laser writing system and laser scanning method are disclosed. The layout scheme comprises a magnetoresistive multilayer film including an antiferromagnetic pinning layer arranged into a rectangular array of sensor dice on the wafer surface. Pinning layers of magnetoresistive sensing units are magnetically oriented and directionally aligned by the laser writing system. Sensing units are electrically connected into bridge arms electrically connected into a magnetoresistive sensor. Magnetoresistive sensing units in the dice are arranged into at least two spatially-isolated magnetoresistive orientation groups. In the magnetoresistive orientation groups, pinning layers of the sensing units have an angle of magnetic orientation of 0-360 degrees. Angles of magnetic orientation of two adjacent magnetoresistive orientation groups are different. Each orientation group is adjacent to an orientation group with the same angle of magnetic orientation in at least one adjacent die.

    Push-pull X-axis magnetoresistive sensor

    公开(公告)号:US10330748B2

    公开(公告)日:2019-06-25

    申请号:US15578508

    申请日:2016-06-01

    IPC分类号: G01R33/09 G01R33/00

    摘要: A push-pull X-axis magnetoresistive sensor, comprising: a substrate upon which an interlocked array of soft ferromagnetic flux concentrators and a push-pull magnetoresistive sensor bridge unit are placed. It further may comprise calibration coils and/or initialization coils. At least one of each of the soft ferromagnetic flux concentrators is present such that an interlocking structure may be formed such that there are alternately interlocked and non-interlocked gaps along the X direction. Push/pull magnetoresistive sensing unit strings are respectively located in the interlocked and non-interlocked gaps and are electrically connected to form a push-pull magnetoresistive bridge sensing unit. This magnetoresistive sensing unit is sensitive to magnetic field along the X direction. The calibration coils and initialization coils are respectively compromised of straight calibration conductors and straight initialization conductors that run parallel and perpendicular to the push-pull magnetoresistive sensing unit strings. The structure of this push-pull X-axis magnetoresistive sensor is simple to implement. It has the advantages of high magnetic field sensitivity comparing to a referenced bridge X-axis magnetoresistive sensor as well as low power consumption.

    Single chip Z-axis linear magnetoresistive sensor with calibration/initialization coil

    公开(公告)号:US10228426B2

    公开(公告)日:2019-03-12

    申请号:US15542324

    申请日:2016-01-05

    IPC分类号: G01R33/00 G01R33/02 G01R33/09

    摘要: A single chip Z-axis linear magnetoresistive sensor with a calibration/initialization coil comprises a single chip Z-axis linear magnetoresistive sensor, and a calibration coil and/or an initialization coil. The calibration coil and the initialization coil are planar coils or three-dimensional coils. The planar coils are located above a substrate and below a magnetoresistive sensing unit, between a magnetoresistive sensing unit and a soft ferromagnetic flux concentrator, above a soft ferromagnetic flux concentrator, or in a gap of the soft ferromagnetic flux concentrator. The three-dimensional coil is wound around the soft ferromagnetic flux concentrator and the magnetoresistive sensing unit. The calibration coil and the initialization coil respectively comprise straight wires which are parallel to a magnetization direction of a pinned layer/free layer, wherein the calibration coil generates an equivalent calibration magnetic field parallel/anti-parallel to the direction of the pinned layer of a push or a pull magnetoresistive unit string, and the initialization coil generates a uniform initializing magnetic field in the direction of the free layer at all magnetoresistive sensing units. By controlling the current in the calibration coil/initialization coil, calibration and magnetic state initialization of the single chip Z-axis linear magnetoresistive sensor can be achieved. The sensor has advantages of being highly efficient, quick, and convenient.

    Magnetic absolute rotary encoder
    106.
    发明授权

    公开(公告)号:US10197419B2

    公开(公告)日:2019-02-05

    申请号:US14765250

    申请日:2014-01-29

    摘要: Provided is a magnetic absolute rotary encoder, comprising a rotation shaft, multiple rotating wheels that can rotate along the rotation shaft, multiple encoding units that correspond to the multiple rotating wheels one-to-one, and one or more permanent magnet assemblies that provide the magnetic bias to the multiple encoding units. Each encoding unit comprises a magnetically permeable encoder disc, the structure thereof enabling the magnetic permeability thereof to be different according to the different positions of the rotation shaft, and comprises multiple sensor units that comprise multiple magnetic sensors. The sensor units are used to sense the magnetic permeability of the magnetically permeable encoder disc and to output the sensor signals that characterize the relative position of the magnetically permeable encoder disc. According to the sensor signals of the sensor units, each encoding unit outputs the value that characterizes the selected rotation position of the corresponding rotation wheel, thereby enabling an absolute magnetic rotating encoder that is simple and low in cost and has more precise magnetic encoder discs.

    Magnetoresistive audio pickup
    107.
    发明授权

    公开(公告)号:US10187731B2

    公开(公告)日:2019-01-22

    申请号:US15127663

    申请日:2015-03-19

    摘要: A magnetoresistive audio pickup comprises an audio detection circuit. The audio detection circuit comprises at least one linear magnetoresistive sensor, a coupling capacitance, an AC amplifier, and a signal processing circuit comprising an additional amplifier. The linear magnetoresistive sensor comprises at least one single-axis linear magnetoresistive sensor unit. The linear magnetoresistive sensors are placed in a measurement plane above a speaker's voice coil, the signal output end of each single-axis linear magnetoresistive sensor unit is capacitively coupled to the AC amplifier which provides AC signals through electrical connection to the amplifier, these signals are combined within the signal processing unit into an audio signal, and the audio signal is output from the circuit; each single-axis linear sensor unit is located in the linear response area of the measurement plane. The present invention detects a speaker's audio signals via magnetic field coupling between a speaker and a linear magnetoresistive sensor. The magnetoresistive audio pickup's structure is simple and it also provides low power consumption.

    Single-chip Z-axis linear magnetic resistance sensor

    公开(公告)号:US10126378B2

    公开(公告)日:2018-11-13

    申请号:US14917784

    申请日:2014-09-10

    发明人: James Geza Deak

    摘要: A single-chip Z-axis linear magnetoresistive sensor is provided. The sensor comprises a substrate, magnetoresistive sensing elements, and flux guides, wherein the magnetoresistive sensing elements are mutually electrically connected to form push arms and pull arms of a bridge; the push arms and the pull arms are alternately arranged, and the magnetoresistive sensing elements on the push arms and the pull arms are respectively located at two sides beneath the flux guides; the magnetization direction of a pinning layer of each magnetoresistive sensing element is the same and is in an X-axis direction. An external magnetic field in a Z-axis direction is converted into a magnetic field with components in an X-axis direction by the flux guides, and thus the magnetoresistive sensing elements beneath the flux guides can detect this component. The sensor has the advantages of the small size, simple manufacturing, simple packaging, high sensitivity, good linearity, wide operating range, low offset, good temperature compensation, and capability to measure high magnetic fields, etc.

    Liquid level sensor system
    110.
    发明授权

    公开(公告)号:US09964427B2

    公开(公告)日:2018-05-08

    申请号:US14894271

    申请日:2014-05-30

    IPC分类号: G01F23/54 G01F23/38

    摘要: A liquid level sensor system is disclosed for remotely monitoring the liquid level in a tank. The system comprises a first fixed portion with a first liquid level response unit, and a second fixed portion with a second liquid level response unit. A guide tube is inserted into the tank and attached to the bottom of the first fixed portion. The guide tube is provided with a multitude of ports, such that the liquid level in the guide tube is flush with the liquid level in the tank. The first liquid level response unit comprises a float floating up and down with the variation of the liquid level in the guide tube, a rotating shaft rotating around a relatively fixed axis of rotation in the up and down floating process of the float, and a permanent magnet. The second fixed portion is attached to the top of the first fixed portion. The second liquid level response unit comprises a PCB, a magnetoresistive angle sensor chip, and a control circuit electrically connected to the magnetoresistive angle sensor chip. The magnetoresistive angle sensor chip outputs an analog voltage signal to the control circuit according to the rotation angle of the permanent magnet, and the control circuit calculates the height of the liquid level according to the analog voltage signal.