公开(公告)号：US20110183448A1

公开(公告)日：2011-07-28

申请号：US13014647

申请日：2011-01-26

申请人： Hiroyuki Abo ,  Taichi Yonemoto ,  Shuji Koyama ,  Kenta Furusawa ,  Keisuke Kishimoto

发明人： Hiroyuki Abo ,  Taichi Yonemoto ,  Shuji Koyama ,  Kenta Furusawa ,  Keisuke Kishimoto

IPC分类号： H01L21/306 ,  C09K13/02

CPC分类号： H01L21/30608 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  C09K13/02

摘要： A liquid composition used to carry out crystal anisotropic etching of a silicon substrate provided with an etching mask formed of a silicon oxide film with the silicon oxide film used as a mask includes cesium hydroxide, an alkaline organic compound, and water.

摘要翻译： 用于对硅基板进行晶体各向异性蚀刻的液体组合物包括氢氧化铯，碱性有机化合物和水，所述硅基板具有由氧化硅膜形成的蚀刻掩模。

公开(公告)号：US20080074470A1

公开(公告)日：2008-03-27

申请号：US11860330

申请日：2007-09-24

申请人： Ken Ikegame ,  Shuji Koyama

发明人： Ken Ikegame ,  Shuji Koyama

IPC分类号： B41J2/05 ,  G03G15/10

CPC分类号： B41J2/1645 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  G03G15/10 ,  G03G2215/0658

摘要： An ink jet recording head includes a substrate having a plurality of energy-generating elements that generate energy for discharging ink droplets and an ink supply port extending in a direction in which the energy-generating elements are arranged, a plurality of discharge ports that are provided correspondingly to the energy-generating elements, a discharge-port-forming member provided on the substrate and including a plurality of ink passages that include the energy-generating elements and connect the supply port and each of the discharge ports, and a rib provided on a surface of the discharge-port-forming member opposite the supply port and extending in a direction in which the energy-generating elements are arranged. A surface of the rib opposite the supply port has a protective layer.

摘要翻译： 一种喷墨记录头包括：具有产生用于排出墨滴的能量的多个能量产生元件的基板和沿排列有能量产生元件的方向延伸的供墨口;多个排出口， 相应于能量产生元件的排出口形成部件，设置在基板上并且包括多个墨通道，其包括能量产生元件并连接供给口和每个排出口， 所述排出口形成部件的表面与所述供给口相对并沿所述能量产生元件的排列方向延伸。 与供给口相对的肋的表面具有保护层。

公开(公告)号：US20070211115A1

公开(公告)日：2007-09-13

申请号：US11674710

申请日：2007-02-14

申请人： Satoshi IBE ,  Shuji Koyama ,  Yoshiaki Suzuki ,  Hiroto Komiyama

发明人： Satoshi IBE ,  Shuji Koyama ,  Yoshiaki Suzuki ,  Hiroto Komiyama

IPC分类号： B41J2/05

CPC分类号： B41J2/14072 ,  B41J2/1603 ,  B41J2/1643 ,  Y10T29/49401

摘要： For providing a producing method for a liquid discharge head having an excellent reliability in the insulation of test electrode pad, the invention provides a method for producing a liquid discharge head including a liquid discharge energy generating element for generating a liquid discharge energy, a liquid discharge port, a liquid flow path, an electric circuit for driving the liquid discharge energy generating element, a first electrode pad for exchanging electrical signals with the exterior and a second electrode pad for testing the electric circuit, the method including, preparing a substrate provided with a first wiring layer for forming the first electrode pad and a second wiring layer for forming the second electrode pad, forming an insulating film on the substrate so as to expose the first wiring layer and to cover the second wiring layer, forming a metal film by an electroless plating method on the surface of the first wiring layer, and stripping the insulating film.

摘要翻译： 为了提供一种具有优异的测试电极焊盘绝缘可靠性的液体排出头的制造方法，本发明提供了一种用于生产液体排出头的方法，该排液头包括用于产生液体排出能量的液体排出能量产生元件， 液体流路，用于驱动液体排出能量产生元件的电路，用于与外部交换电信号的第一电极焊盘和用于测试电路的第二电极焊盘，所述方法包括：制备具有 用于形成第一电极焊盘的第一布线层和用于形成第二电极焊盘的第二布线层，在基板上形成绝缘膜，以暴露第一布线层并覆盖第二布线层，通过 在第一布线层的表面上形成化学镀方法，剥离绝缘膜。

公开(公告)号：US06834943B2

公开(公告)日：2004-12-28

申请号：US10071799

申请日：2002-02-11

申请人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

发明人： Hiroaki Mihara ,  Masahiko Ogawa ,  Kazuaki Masuda ,  Masami Ikeda ,  Ichiro Saito ,  Hiroyuki Ishinaga ,  Toshio Kashino ,  Shuji Koyama ,  Tomoyuki Hiroki ,  Yoshiyuki Imanaka ,  Teruo Ozaki ,  Masahiko Kubota

IPC分类号： B41J205

CPC分类号： B41J2/14129 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  Y10S29/016 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A liquid discharge head is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in the liquid, and movable members facing the heat generating members and being arranged in the liquid flow paths. The movable members have a free end on the discharge port side with a specific gap with respect to the heat generating members. The movable member is fixed to the substrate above the heat generating member on the substrate.

摘要翻译： 液体排出头设置有用于排出液体的排出口，与用于向排出口供给液体的排出口连通的液体流路，具有用于在液体中产生气泡的发热元件的基板，以及面向发热元件的可动件 并且布置在液体流动路径中。 可动构件在排出口侧具有相对于发热构件具有特定间隙的自由端。 可移动部件固定在基板上的发热部件上方的基板上。

公开(公告)号：US06609783B1

公开(公告)日：2003-08-26

申请号：US09191535

申请日：1998-11-13

申请人： Shuji Koyama ,  Masashi Kitani ,  Toshihiro Mori ,  Teruo Ozaki ,  Masahiko Kubota

发明人： Shuji Koyama ,  Masashi Kitani ,  Toshihiro Mori ,  Teruo Ozaki ,  Masahiko Kubota

IPC分类号： B41J205

CPC分类号： B41J2/14129 ,  B41J2/14072 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2202/03 ,  Y10T29/49401

摘要： An ink jet recording head with a heat-generating resistance layer for generating thermal energy used for ink discharge, and a wiring electrode layer electrically connected to the heat-generating resistance layer to form an electro-thermal converting element, an insulating protective layer covering the electro-thermal converting element, and an external electrical connection portion electrically connected to the electro-thermal converting element and configured to connect to an external wiring for applying a voltage to the electro-thermal converting element. Further, the external electrical connection portion is formed by a layer grown by electroless plating from the wiring electrode layer through a through hole formed in the insulating protective layer. The external electrical connection portion projects beyond the insulating protective layer and has a flat surface at the most extended projection of the external electrical connection portion.

摘要翻译： 具有用于产生用于排墨的热能的发热电阻层的喷墨记录头和与发热电阻层电连接以形成电热转换元件的布线电极层，覆盖该热电转换元件的绝缘保护层 电热转换元件和电连接到电热转换元件的外部电连接部分，并且被配置为连接到用于向电热转换元件施加电压的外部布线。 此外，外部电连接部分由通过在绝缘保护层中形成的通孔从布线电极层通过化学镀生长的层形成。 外部电连接部突出超过绝缘保护层，并且在外部电连接部分的最大延伸的突起处具有平坦表面。

公开(公告)号：US06527377B1

公开(公告)日：2003-03-04

申请号：US09483954

申请日：2000-01-18

申请人： Ken Ikegame ,  Yoshiaki Suzuki ,  Toshio Kashino ,  Shuji Koyama ,  Masashi Miyagawa ,  Junji Tatsumi ,  Hiroaki Mihara ,  Miki Ito

发明人： Ken Ikegame ,  Yoshiaki Suzuki ,  Toshio Kashino ,  Shuji Koyama ,  Masashi Miyagawa ,  Junji Tatsumi ,  Hiroaki Mihara ,  Miki Ito

IPC分类号： B41J205

CPC分类号： B41J2/1632 ,  B41J2/14024 ,  B41J2/1433 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1637 ,  B41J2202/11 ,  B41J2202/21

摘要： A liquid discharge head having plural liquid paths and plural discharge openings is formed by joining an adhesion face of an orifice plate with an adhesion face of a head main body. The liquid paths are provided in the head main body, and the adhesion face of the head main body has apertures of the liquid paths. The adhesion face of the orifice plate has recessed portions and protruding portions. The protruding portions have a shape corresponding to the cross-sectional shape of the liquid paths, and the discharge openings are provided in the protruding portions. The protruding portions or parts thereof fit into the liquid paths, and are inserted into the liquid paths for joining the adhesion face of the orifice plate with the adhesion face of the head main body.

摘要翻译： 通过将孔板的粘合面与头主体的粘合面接合而形成具有多个液体通道和多个排出口的排液头。 液体通道设置在头主体中，头主体的粘附面具有液体通道的孔。 孔板的粘合面具有凹部和突出部。 突出部分具有与液体通道的横截面形状对应的形状，并且排出口设置在突出部分中。 其突出部分或部分装配到液体通道中，并插入到用于将孔板的粘合面与头主体的粘合面接合的液体通道中。

公开(公告)号：US06378993B1

公开(公告)日：2002-04-30

申请号：US09452184

申请日：1999-12-02

申请人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

发明人： Teruo Ozaki ,  Ichiro Saito ,  Toshio Kashino ,  Yoshiyuki Imanaka ,  Masahiko Kubota ,  Muga Mochizuki ,  Yoshiaki Kurihara ,  Masashi Miyagawa ,  Shuji Koyama

IPC分类号： B41J205

CPC分类号： B41J2/14048 ,  B41J2/055

摘要： There is provided a liquid discharge head provided with an element substrate and a ceiling plate fixed in a mutually opposed state, plural liquid path lateral walls provided between the ceiling plate and the element substrate and defining plural light flow paths, plural discharge energy generating elements arranged in parallel on the surface of the element substrate so as to be respectively positioned in the plural liquid paths, plural movable members in the form of a beam supported at an end, provided on the element substrate so as to be respectively opposed to the plural discharge energy generating elements and provided with fixed ends at the upstream side in the liquid flowing direction in the liquid paths and free ends at the downstream ends, and plural projections provided on the ceiling plate for respectively limiting the amount of displacement of the plural movable members, the element substrate and the ceiling plate being composed of similar materials, wherein the liquid path lateral walls are formed on the element substrate, and, on the ceiling plate, there is provided an engaging layer having recesses for fitting with the upper end faces of the liquid path lateral walls.

摘要翻译： 设置有设置有相互相对的状态的元件基板和顶板的液体排出头，设置在顶板与元件基板之间并限定多个光流路的多个液体流路侧壁，多个排出能量产生元件 在元件基板的表面上平行地分别设置在多个液体通道中的多个可移动部件，其形式为支撑在一端的梁，设置在元件基板上，以分别与多个放电 能量产生元件，并且在液体流道的上游侧和下游端的自由端处设置有固定端，并且在顶板上设置有分别限制多个可动构件的位移量的多个突起， 元件基板和顶板由类似的材料组成，其中液体路径1 在该元件基板上形成有一个隔壁，并且在顶板上设有一个接合层，该接合层具有用于与液体通道侧壁的上端面相配合的凹槽。

公开(公告)号：US06378992B2

公开(公告)日：2002-04-30

申请号：US08890335

申请日：1997-07-09

申请人： Kiyomitsu Kudo ,  Hiroshi Sugitani ,  Kazuaki Masuda ,  Masami Ikeda ,  Akio Saito ,  Tsuyoshi Orikasa ,  Toshio Kashino ,  Shuji Koyama ,  Hiroyuki Sugiyama

发明人： Kiyomitsu Kudo ,  Hiroshi Sugitani ,  Kazuaki Masuda ,  Masami Ikeda ,  Akio Saito ,  Tsuyoshi Orikasa ,  Toshio Kashino ,  Shuji Koyama ,  Hiroyuki Sugiyama

IPC分类号： B41J205

CPC分类号： B41J2/17553 ,  B41J2/14024 ,  B41J2/14048 ,  B41J2/17526 ,  B41J2002/14379

摘要： The present invention provides a liquid discharging head comprising a substrate having a plurality of heat generating elements for generating a bubble in liquid and a grooved member having a plurality of grooves constituting a plurality of liquid passages and wherein the liquid passages for respective heat generating elements are formed by joining the grooved member to the substrate and further wherein the grooved member has an opening portion into which the substrate is inserted and the opening portion has the plurality of grooves which constitute the liquid passages for the respective heat generating elements when the substrate is inserted into the opening portion.

摘要翻译： 本发明提供了一种液体排放头，其包括具有多个用于在液体中产生气泡的发热元件的基板和具有构成多个液体通道的多个槽的带槽部件，并且其中各个发热元件的液体通道为 通过将开槽部件接合到基板而形成，并且其中，所述带槽部件具有开口部，所述基板被插入到所述开口部中，并且当所述基板被插入时，所述开口部具有构成所述各个发热元件的液体通路的多个槽 进入开口部分。

公开(公告)号：US06328420B1

公开(公告)日：2001-12-11

申请号：US09110025

申请日：1998-07-02

申请人： Shuji Koyama ,  Kazuaki Masuda ,  Ken Ikegame ,  Hiroaki Mihara ,  Toshio Kashino ,  Hiroyuki Ishinaga

发明人： Shuji Koyama ,  Kazuaki Masuda ,  Ken Ikegame ,  Hiroaki Mihara ,  Toshio Kashino ,  Hiroyuki Ishinaga

IPC分类号： B41J2135

CPC分类号： B41J2/1625 ,  B41J2/162 ,  B41J2/1643 ,  B41J2202/03

摘要： A method for manufacturing an orifice plate used for a liquid discharge provided with discharge port for discharging liquid comprises the steps of preparing a non-conductive plate having recessed portion formed on the circumference of the flat portion corresponding to the discharge port, forming a first conductive material peelable from the non-conductive plate only in the recessed portion of the non-conductive plate, forming a plate member by plating the first conductive material with a second conductive material by electroforming method after the formation of the first conductive material, and obtaining the orifice plate having the discharge port by peeling off the plate member from the non-conductive plate. With the method thus arranged, it is possible to materialize the same precision as in the glass mask used for photolithography, and make the variation of orifice areas smaller for the formation of highly densified orifices.

摘要翻译： 一种用于制造用于液体排出口的孔板的方法，其具有用于排出液体的排出口，包括以下步骤：制备具有形成在与排出口对应的平坦部分的圆周上的凹部的非导电板，形成第一导电 仅在非导电板的凹部中从非导电板剥离的材料，在形成第一导电材料之后，通过电铸法通过用第二导电材料电镀第一导电材料形成板构件，并且获得 通过从非导电板剥离板构件而具有排出口的孔板。 通过如此布置的方法，可以实现与用于光刻的玻璃掩模相同的精度，并且使得孔面积的变化更小以形成高密度孔。

公开(公告)号：US6074543A

公开(公告)日：2000-06-13

申请号：US632097

申请日：1996-04-15

申请人： Aya Yoshihira ,  Hiroshi Sugitani ,  Tadayoshi Inamoto ,  Makiko Kimura ,  Toshio Kashino ,  Shuji Koyama ,  Takeshi Okazaki ,  Kiyomitsu Kudo ,  Yoshie Nakata ,  Toshihiro Mori

发明人： Aya Yoshihira ,  Hiroshi Sugitani ,  Tadayoshi Inamoto ,  Makiko Kimura ,  Toshio Kashino ,  Shuji Koyama ,  Takeshi Okazaki ,  Kiyomitsu Kudo ,  Yoshie Nakata ,  Toshihiro Mori

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  B41J2/21 ,  C25D1/08

CPC分类号： B41J2/1601 ,  B41J2/14024 ,  B41J2/1404 ,  B41J2/14048 ,  B41J2/14056 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1643 ,  B41J2/211 ,  B41J2002/14379 ,  B41J2202/21 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A method to produce a liquid ejecting head having an ejection outlet for ejecting a liquid, a heat generating element for applying thermal energy to the liquid, a liquid flow path comprised of a first path portion in fluid communication with the ejection outlet and a second path portion disposed below the first path portion and provided with the heat generating element in a bottom surface thereof, a partition wall for partitioning the liquid flow path into the first path portion and second path portion, and a movable member disposed above the heat generating element in the portion wall and arranged as displaceable to a side of the first path portion in accordance with a bubble generated in the liquid by the thermal energy in which upon generation of the bubble the first path portion and the second path portion are in fluid communication with each other and the pressure is directed toward said ejection outlet by the movable member displaced to eject the liquid droplet. The method comprises a step of preparing a substrate provided with the heat generating element, a step of forming a grooved partition wall having the movable member and side walls of the second path portion, and a step of joining the grooved partition wall to the substrate to form the second path portion.

摘要翻译： 一种用于产生具有用于喷射液体的喷射出口的液体喷射头的方法，用于向液体施加热能的发热元件，由与喷射出口流体连通的第一路径部分和第二路径 设置在第一路径部分下方并在其底面设置有发热元件的部分，用于将液体流动路径分隔成第一路径部分和第二路径部分的分隔壁，以及设置在发热元件上方的可动件 所述部分壁并且被布置为根据在所述液体中由所述热能产生的气泡可移动到所述第一路径部分的一侧，其中在产生所述气泡时，所述第一路径部分和所述第二路径部分与每个所述第一路径部分和所述第二路径部分流体连通 另一个，并且通过移动以喷射液滴的可移动部件将压力引向所述喷射出口。 该方法包括制备设置有发热元件的基板的步骤，形成具有可移动部件和第二通路部分侧壁的带槽分隔壁的步骤，以及将带槽隔壁连接到基板的步骤 形成第二路径部分。