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公开(公告)号：US10545287B1
公开(公告)日：2020-01-28
申请号：US16206058
申请日：2018-11-30
摘要： A manufacturing method for a waveguide includes forming a core including a first and a second layer. The first layer has a top surface including a first region opposed to a bottom surface of the second layer, and a second region not opposed to the bottom surface of the second layer. Forming the core includes a step of forming an initial first layer, an etching stopper layer on the second region of the top surface of the initial first layer, an initial second layer on the initial first layer and the etching stopper layer, and a step of etching the initial second layer until the etching stopper layer is exposed, to make the initial second layer into the second layer. A difference between the refractive index of the etching stopper layer and the core is smaller than or equal to 10% of the refractive index of the core.
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102.发明授权公开(公告)号：US10134430B1
公开(公告)日：2018-11-20
申请号：US15707277
申请日：2017-09-18
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Shigeki Tanemura , Hideo Mamiya , Masakazu Okada
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Hironori Araki , Shigeki Tanemura , Hideo Mamiya , Masakazu Okada
摘要： A thermally-assisted magnetic recording head includes a main pole, a plasmon generator and a heat sink. The main pole includes a first narrow portion and a first wide portion. The plasmon generator includes a second narrow portion and a second wide portion. The first narrow portion has a first side surface and a second side surface. The second narrow portion has a third side surface and a fourth side surface. The heat sink includes a first portion adjacent to the first side surface and the third side surface, and a second portion adjacent to the second side surface and the fourth side surface.
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103.发明授权公开(公告)号：US09761253B1
公开(公告)日：2017-09-12
申请号：US15282503
申请日：2016-09-30
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Hideo Mamiya , Shigeki Tanemura , Seiichiro Tomita , Hironori Araki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Hideo Mamiya , Shigeki Tanemura , Seiichiro Tomita , Hironori Araki
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/3163 , G11B5/3169 , G11B5/4866 , G11B5/6088 , G11B2005/0021
摘要： A main pole has a front end face including a first to a third end face portion. A plasmon generator has a near-field-light-generating surface. A surrounding layer has a first surrounding layer end face and a second surrounding layer end face. A gap film has a first gap film end face and a second gap film end face located on opposite sides of the near-field-light-generating surface in the track width direction. The first and second end face portions are interposed between the first and second surrounding layer end faces. The second end face portion is greater in width than the first end face portion. The third end face portion is greater in width than the second end face portion.
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公开(公告)号：US08848494B2
公开(公告)日：2014-09-30
申请号：US13783933
申请日：2013-03-04
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Ryuji Fujii
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Ryuji Fujii
CPC分类号： G11B13/08 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A plasmon generator has a front end face located in a medium facing surface of a magnetic head. The plasmon generator includes a first portion formed of a first metal material and a second portion formed of a second metal material. The first portion has an inclined surface facing toward the front end face. The second portion is located between the inclined surface and the front end face, and includes a first end face located in the front end face and a second end face in contact with the inclined surface. The second metal material is higher in Vickers hardness than the first metal material. The first portion has a plasmon exciting part. The front end face generates near-field light.
摘要翻译： 等离子体发生器具有位于磁头的介质面向表面中的前端面。 等离子体发生器包括由第一金属材料形成的第一部分和由第二金属材料形成的第二部分。 第一部分具有面向前端面的倾斜表面。 第二部分位于倾斜表面和前端面之间，并且包括位于前端面中的第一端面和与倾斜表面接触的第二端面。 第二种金属材料的维氏硬度高于第一种金属材料。 第一部分具有等离子体激元部分。 前端面产生近场光。
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105.发明授权公开(公告)号：US08760809B1
公开(公告)日：2014-06-24
申请号：US13892858
申请日：2013-05-13
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Ryuji Fujii
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Hironori Araki , Seiichiro Tomita , Ryuji Fujii
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： A thermally-assisted magnetic recording head includes a main pole, a waveguide, and a plasmon generator. The waveguide includes a core and a cladding. The plasmon generator is configured to excite a surface plasmon based on light propagating through the core. The plasmon generator has a front end face located in a medium facing surface, and a first inclined surface connected to the front end face and facing toward the medium facing surface. The main pole includes an interposition part interposed between the first inclined surface and the medium facing surface. The interposition part has a second inclined surface that is opposed to the first inclined surface with an insulating film interposed therebetween.
摘要翻译： 热辅助磁记录头包括主极，波导和等离子体发生器。 波导包括芯和包层。 等离子体激元产生器被配置为基于通过芯传播的光来激发表面等离子体激元。 所述等离子体发生器具有位于介质相对表面中的前端面，以及连接到所述前端面并面向所述介质面向表面的第一倾斜面。 主极包括插入在第一倾斜表面和介质面对表面之间的插入部分。 插入部分具有与第一倾斜表面相对的第二倾斜表面，其间插入绝缘膜。
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公开(公告)号：US08703619B2
公开(公告)日：2014-04-22
申请号：US13353834
申请日：2012-01-19
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： G11B5/31 , B44C1/22 , G02B6/1226 , G11B5/3163 , G11B7/22 , G11B2005/0021
摘要： A method of taper-etching a layer to be etched that is made of a dielectric material and has a top surface. The method includes the steps of: forming an etching mask with an opening on the top surface of the layer to be etched; and taper-etching a portion of the layer to be etched, the portion being exposed from the opening, by reactive ion etching so that a groove having two wall faces intersecting at a predetermined angle is formed in the layer to be etched. The step of taper-etching employs an etching gas containing a first gas contributing to the etching of the layer to be etched and a second gas contributing to the deposition of a sidewall protective film, and changes, during the step, the ratio of the flow rate of the second gas to the flow rate of the first gas so that the ratio increases.
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107.发明授权公开(公告)号：US08391109B2
公开(公告)日：2013-03-05
申请号：US13538996
申请日：2012-06-29
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , Y10T29/49032
摘要： A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.
摘要翻译： 一种热辅助磁记录头的制造方法，包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体，并且在初始支撑体上执行两个锥形蚀刻处理，使得初始支撑体设置有第一和第二倾斜表面。
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108.发明授权公开(公告)号：US08270110B2
公开(公告)日：2012-09-18
申请号：US12318412
申请日：2008-12-29
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/315 , Y10T29/49048
摘要： A magnetic head includes a side shield layer and an encasing layer. The side shield layer has a first end face located in the medium facing surface, a second end face opposite to the first end face, and a first groove accommodating a portion of a pole layer. The first end face includes two portions located on both sides of an end face of the pole layer that are opposite to each other in a track width direction. The encasing layer is formed of a nonmagnetic material and disposed on a side of the side shield layer opposite to a medium facing surface. The encasing layer has a front end face touching the second end face of the side shield layer, and a second groove accommodating another portion of the pole layer. The distance from the medium facing surface to an arbitrary point on the second end face of the side shield layer decreases with decreasing distance from the arbitrary point to the top surface of a substrate.
摘要翻译： 磁头包括侧屏蔽层和封装层。 侧面屏蔽层具有位于介质面对表面中的第一端面，与第一端面相对的第二端面和容纳极层的一部分的第一凹槽。 第一端面包括在磁极层的端面的沿着磁道宽度方向彼此相对的两侧的两个部分。 封装层由非磁性材料形成，并且设置在侧面屏蔽层的与介质相对表面相对的一侧上。 封装层具有接触侧屏蔽层的第二端面的前端面和容纳极层的另一部分的第二槽。 从侧面屏蔽层的第二端面到中间面向任意点的距离随着从任意点到基板顶面的距离的减小而减小。
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109.发明授权公开(公告)号：US08173028B2
公开(公告)日：2012-05-08
申请号：US12457090
申请日：2009-06-01
申请人： Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
发明人： Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.
摘要翻译： 磁头包括极层，第一和第二侧屏蔽以及包含第一至第三沟槽的封装层，其容纳极层和第一和第二侧屏蔽。 磁头的制造方法包括通过使用具有第一至第三开口的蚀刻掩模层在非磁性层中形成第一至第三沟槽的步骤。 该步骤包括通过使用第一开口蚀刻非磁性层来形成第一凹槽的步骤，其中第二和第三开口被第一掩模覆盖; 以及通过使用所述第二和第三开口蚀刻所述非磁性层来形成所述第二和第三凹槽，其中所述第一开口被第二掩模覆盖。
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公开(公告)号：US20110149426A1
公开(公告)日：2011-06-23
申请号：US12654553
申请日：2009-12-23
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , Y10T29/49032
摘要： A heat-assisted magnetic recording head has an internal mirror that includes a reflecting film support body and a reflecting film. The internal mirror reflects light that comes from above a waveguide so that the reflected light travels through the waveguide toward a medium facing surface. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the reflecting film support body includes two-taper etching operations to be performed on an initial support body.
摘要翻译： 热辅助磁记录头具有内反射镜，其包括反射膜支撑体和反射膜。 内部反射镜反射来自波导上方的光，使得反射光通过波导朝向介质面向表面传播。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成反射膜支撑体的步骤包括对初始支撑体执行的双锥蚀刻操作。
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