公开(公告)号：US07554717B2

公开(公告)日：2009-06-30

申请号：US11473162

申请日：2006-06-23

Applicant: Hiroyuki Nakano ,  Tetsuya Uda ,  Yasuhiro Uchiyama

Inventor： Hiroyuki Nakano ,  Tetsuya Uda ,  Yasuhiro Uchiyama

IPC: H01S4/00 ,  G02B6/42 ,  H04B10/17

CPC classification number: H04B10/296

Abstract: Disclosed is an optical transmission device with a simple configuration that can attenuate an input optical power only when it is necessary so that it falls within a predetermined range, and can suppress insertion loss when it is unnecessary. A variable optical attenuator is configured pluggable. A pluggable variable optical attenuator is equipped with an optical connector that is an interface of an optical signal and an electrical signal connector for receiving an electrical signal that specifies the amount of control used for feedback-controlling the attenuation, and controls the attenuation depending on the input optical power of the optical transmission board. Moreover, an optical through that has the same shape as the variable optical attenuator being configured pluggable and that is configured pluggable is prepared.

Abstract translation: 公开了一种具有简单结构的光传输装置，其仅在需要时才能衰减输入光功率使其落在预定范围内，并且可以在不需要时抑制插入损耗。 可变光衰减器是可插拔的。 可插拔可变光衰减器配备有光连接器，光连接器是光信号和电信号连接器的接口，用于接收指定用于反馈控制衰减的控制量的电信号，并且根据 输入光传输板的光功率。 此外，制备具有与可变光衰减器相同形状的光学通孔，其被配置为可插拔并且被配置为可插拔的。

公开(公告)号：US20090060474A1

公开(公告)日：2009-03-05

申请号：US12191109

申请日：2008-08-13

Applicant: Hiroyuki Nakano

Inventor： Hiroyuki Nakano

IPC: H04N7/26

CPC classification number: H04N5/913 ,  H04N21/4184 ,  H04N21/42661 ,  H04N21/42684 ,  H04N21/4325 ,  H04N21/4623 ,  H04N2005/91342

Abstract: According to one embodiment, a broadcast receiving apparatus includes the following module. In other words, the broadcast receiving apparatus includes: a tuner receiving desired program data from a broadcast wave; a recording control module making the program data received by the tuner recorded in a recording medium, with associating the program data with an apparatus code specific for the very apparatus; a program reproducing module reproducing a program by using the program data recorded in the recording medium; a reading module reading the program data and the apparatus code associated with the program data from the recording medium, when the program reproducing module reproduces the program; and a judging module comparing the read apparatus code read from the recording medium by the reading module with the apparatus code and judging reproduction allowabillty about the program data by the program reproducing module.

Abstract translation: 根据一个实施例，广播接收设备包括以下模块。 换句话说，广播接收装置包括：调谐器，从广播波接收期望的节目数据; 记录控制模块，使由调谐器接收的程序数据记录在记录介质中，将程序数据与该装置专用的设备代码相关联; 程序再现模块，通过使用记录在记录介质中的程序数据来再现程序; 读取模块，当程序再现模块再现程序时，从记录介质读取与程序数据相关联的程序数据和装置代码; 以及判断模块，通过所述读取模块将从所述记录介质读取的读取装置代码与所述装置代码进行比较，并且通过所述程序再现模块来判断关于所述程序数据的再现允许。

公开(公告)号：US07492452B2

公开(公告)日：2009-02-17

申请号：US11626925

申请日：2007-01-25

Applicant: Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

Inventor： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

IPC: G01N21/00 ,  G01N21/88 ,  H01L27/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

Abstract: An inspection system includes: a facility that uses wide-band illumination light having different wavelengths and single-wavelength light to perform dark-field illumination on an object of inspection, which has the surface thereof coated with a transparent film, in a plurality of illuminating directions at a plurality of illuminating angles; a facility that detects light reflected or scattered from repetitive patterns and light reflected or scattered from non-repetitive patterns with the wavelengths thereof separated from each other; a facility that efficiently detects light reflected or scattered from a foreign matter or defect in the repetitive patterns or non-repetitive patterns or a foreign matter or defect on the surface of the transparent film; and a facility that removes light, which is diffracted by the repetitive patterns, from a diffracted light image of actual patterns or design data representing patterns. Consequently, a more microscopic defect can be detected stably.

Abstract translation: 检查系统包括：使用具有不同波长的宽带照明光和单波长光的设备，在具有透明膜的表面上的多个照明中对被检查对象进行暗场照明 多个照明角度的方向; 检测从重复图案反射或散射的光和从彼此分离的波长的非重复图案反射或散射的光的设备; 有效地检测异物反射或散射的光或重复图案或非重复图案中的缺陷或透明膜表面上的异物或缺陷的设备; 以及通过重复图案衍射的光从实际图案的衍射光图像或表示图案的设计数据中去除的设施。 因此，能够稳定地检测出更微细的缺陷。

公开(公告)号：US07465935B2

公开(公告)日：2008-12-16

申请号：US11325550

申请日：2006-01-05

Applicant: Yuta Urano ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

Inventor： Yuta Urano ,  Hiroyuki Nakano ,  Shunji Maeda ,  Sachio Uto

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

Abstract: When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.

Abstract translation: 当在用于检查异物和缺陷的装置中使用CCD传感器作为光检测器时，存在在将由光电转换产生的信号电荷转换成电压并读取的同时将电噪声引起的问题。 因此，通过检测来自小异物和缺陷的反射和散射光获得的弱检测信号被埋在电噪声中，这是检测小异物和缺陷的障碍。 为了解决上述问题，根据本发明，使用电子倍增CCD传感器作为光检测器。 电子倍增CCD传感器能够通过将通过光电转换产生的电子与其进行读取而相对于电噪声放大由输入光产生的信号。 因此，与常规CCD传感器相比，它可以检测较弱的光，因此可以检测较小的异物和缺陷。

公开(公告)号：US07426023B2

公开(公告)日：2008-09-16

申请号：US11296290

申请日：2005-12-08

Applicant: Yoshimasa Ohshima ,  Hisafumi Iwata ,  Hiroyuki Nakano

Inventor： Yoshimasa Ohshima ,  Hisafumi Iwata ,  Hiroyuki Nakano

IPC: G01N21/00

CPC classification number: G01N21/47 ,  G01N21/21 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825

Abstract: There is disclosed a defect detecting apparatus that focuses a laser beam, irradiates it onto the surface of a sample to be examined, and detects a foreign substance/defect existing on the surface from the scattered light as a result of the irradiation of the beam onto the sample surface. In order to stably detect defects such as foreign substance, the defect detecting apparatus according to the invention is constructed to use a beam shape optical system by which the laser beam emitted from a laser source is shaped to change the illumination intensity from its Gauss distribution to a flat distribution so that the detected signal can be stably produced even if the relative position of a defect/foreign substance to the laser beam irradiation position is changed.

Abstract translation: 公开了一种将激光束聚焦并将其照射到待检查样品的表面上的缺陷检测装置，并且由于将光束照射到散射光上而检测存在于表面上的异物/缺陷 样品表面。 为了稳定地检测异物等缺陷，根据本发明的缺陷检测装置的结构是使用光束形状光学系统，通过该光束系统将从激光源发射的激光束成形为将照射强度从其高斯分布改变为 平坦分布，使得即使改变了缺陷/异物与激光束照射位置的相对位置，也能够稳定地产生检测信号。

公开(公告)号：US20080186984A1

公开(公告)日：2008-08-07

申请号：US11945353

申请日：2007-11-27

Applicant: Hiroyuki Nakano

Inventor： Hiroyuki Nakano

IPC: H04L12/56

CPC classification number: H04W40/28 ,  H04L45/22 ,  H04L45/28 ,  H04L47/10

Abstract: In an ad hoc network formed by a plurality of nodes, a process of transmitting a request to a plurality of adjacent nodes is repeated in a forward flooding process from a source node to a destination node, and information about a route including an adjacent node is registered in a node that has received a request from the adjacent node. A process of transmitting a reply to a plurality of adjacent nodes is repeated in an inverse flooding process from the destination node to the source node, and information about a route including an adjacent node is registered in a node that has received a reply from the adjacent node.

Abstract translation: 在由多个节点形成的自组织网络中，在从源节点到目的地节点的前向泛洪处理中重复发送对多个相邻节点的请求的处理，并且关于包括相邻节点的路由的信息是 注册在已经从相邻节点接收到请求的节点中。 在从目的地节点到源节点的反向洪泛处理中重复发送对多个相邻节点的应答的处理，并且关于包括相邻节点的路由的信息被登记在已经从相邻节点接收到回复的节点中 节点。

公开(公告)号：US20080144024A1

公开(公告)日：2008-06-19

申请号：US12029660

申请日：2008-02-12

Applicant: Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

Inventor： Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

IPC: G01N21/88

CPC classification number: G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/9513 ,  G01N2021/95638 ,  H01L22/12

Abstract: A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.

Abstract translation: 缺陷检查装置包括照射光学系统20，检测光学系统30和图像处理器40。 在照射光学系统中，设置反射镜2603以向下反射已经被引导到第一或第二光路的光束，并且设置柱面透镜251和倾斜镜2604以聚焦已经被定向的光束 作为狭缝状光束90，通过反射镜向下倾斜，从与水平方向延伸的所需倾斜方向倾斜的角度，到被检查的基板1上。

公开(公告)号：US07369223B2

公开(公告)日：2008-05-06

申请号：US11086442

申请日：2005-03-23

Applicant: Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

Inventor： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

IPC: G01N21/00

CPC classification number: G01N21/956

Abstract: An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.

Abstract translation: 用于检查图案以检测小图案缺陷的装置具有照明光源，作为具有多个照明部的照明光学系统，所述照明光学系统具有多个照明部分，用于将照明光束的光路从多个照明部分切换到构成被检查物体的板的表面 方向不同的检测光学系统，使用用于聚焦来自照明板的反射衍射光的物镜具有可变放大倍数的检测光学系统，具有可变倍率的聚焦光学系统，其能够通过会聚的反射衍射光聚焦光学图像，具有期望的 聚焦放大率和用于检测由聚焦光学系统聚焦的光学图像以将其转换成图像信号的光学检测器，用于将图像信号转换为数字图像信号的A / D转换器和用于处理数字图像信号的图像信号处理器 图像信号来检测缺陷。

公开(公告)号：US20080060677A1

公开(公告)日：2008-03-13

申请号：US11889802

申请日：2007-08-16

Applicant: Hiroyuki Nakano

Inventor： Hiroyuki Nakano

IPC: B08B3/10 ,  B08B1/00 ,  B60S1/46

CPC classification number: B60S1/486 ,  Y10S318/02

Abstract: In a low speed wiping mode, reciprocal wiping movement of a wiper is executed at a first wiping speed without spraying the washer fluid from washer nozzles. In a high speed wiping mode, reciprocal wiping movement of the wiper is executed at a second wiping speed that is higher than the first wiping speed without spraying the washer fluid from the washer nozzles. In a wash and wipe mode, washer fluid is sprayed from the washer nozzles over the windshield, and reciprocal wiping movement of the wiper is executed a plurality of times. A wiping speed of the wiper in the wash and wipe mode in at least one of a running state and a stopped state of the vehicle is set to be lower than the first wiping speed of the wiper that is set for the low speed wiping mode.

Abstract translation: 在低速擦拭模式中，擦拭器的往复擦拭运动以第一擦拭速度执行，而不从垫圈喷嘴喷射洗涤剂流体。 在高速擦拭模式中，擦拭器的往复擦拭运动以比第一擦拭速度高的第二擦拭速度执行，而不从垫圈喷嘴喷射洗涤剂流体。 在洗涤和擦拭模式中，清洗液从洗涤器喷嘴喷射到挡风玻璃上，擦拭器的往复擦拭运动多次执行。 在车辆的行驶状态和停止状态中的至少一个中，洗涤和擦拭模式中的擦拭器的擦拭速度被设定为低于为低速擦拭模式设定的刮水器的第一擦拭速度。

公开(公告)号：US20070206184A1

公开(公告)日：2007-09-06

申请号：US11626925

申请日：2007-01-25

Applicant: Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

Inventor： Sachio Uto ,  Hiroyuki Nakano ,  Yukihiro Shibata ,  Akira Hamamatsu ,  Yuta Urano

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/956

Abstract: An inspection system includes: a facility that uses wide-band illumination light having different wavelengths and single-wavelength light to perform dark-field illumination on an object of inspection, which has the surface thereof coated with a transparent film, in a plurality of illuminating directions at a plurality of illuminating angles; a facility that detects light reflected or scattered from repetitive patterns and light reflected or scattered from non-repetitive patterns with the wavelengths thereof separated from each other; a facility that efficiently detects light reflected or scattered from a foreign matter or defect in the repetitive patterns or non-repetitive patterns or a foreign matter or defect on the surface of the transparent film; and a facility that removes light, which is diffracted by the repetitive patterns, from a diffracted light image of actual patterns or design data representing patterns. Consequently, a more microscopic defect can be detected stably.

Abstract translation: 检查系统包括：使用具有不同波长的宽带照明光和单波长光的设备，在具有透明膜的表面上的多个照明中对被检查对象进行暗场照明 多个照明角度的方向; 检测从重复图案反射或散射的光和从彼此分离的波长的非重复图案反射或散射的光的设备; 有效地检测异物反射或散射的光或重复图案或非重复图案中的缺陷或透明膜表面上的异物或缺陷的设备; 以及通过重复图案衍射的光从实际图案的衍射光图像或表示图案的设计数据中去除的设施。 因此，能够稳定地检测出更微细的缺陷。