Film measuring device and method, coater equipped with film measuring device, and coating method using film measuring method
    112.
    发明申请
    Film measuring device and method, coater equipped with film measuring device, and coating method using film measuring method 审中-公开
    薄膜测量装置和方法,装有薄膜测量装置的涂布机和使用薄膜测量方法的涂布方法

    公开(公告)号:US20070062447A1

    公开(公告)日:2007-03-22

    申请号:US11507620

    申请日:2006-08-22

    IPC分类号: B05C11/00 B05C1/00

    摘要: Provided is a film measuring device capable of accurately and easily measuring the thickness of a film formed on a film-like or sheet-like base member of an object under test. A color CCD sensor 8 shoots the object under test. A video board 11 converts a color tone of a color image signal concerning the film obtained by the image pickup into gradation data of respective color components of RGB. Then, an image processing board 12 extracts line images of the respective color components. A calculator 14 obtains the thickness of the film of the object under test by referring to pre-measured film thickness reference values corresponding to the gradation data of the green or blue color component, which are stored in a table storage 13 as reference thickness table data, using the gradation data of the line image of the green or blue color component as lookup data.

    摘要翻译: 本发明提供一种能够准确且容易地测定被测定物体的膜状或片状的基材上形成的膜的厚度的膜测定装置。 彩色CCD传感器8拍摄被测物体。 视频板11将通过图像拾取获得的与胶片相关的彩色图像信号的色调转换为RGB的各颜色分量的灰度数据。 然后,图像处理板12提取各个颜色分量的线图像。 计算器14通过参照存储在表存储器13中的作为参考厚度表数据的绿色或蓝色分量的灰度数据对应的预先测量的膜厚参考值来获得被测物体的胶片的厚度 使用绿色或蓝色分量的行图像的灰度数据作为查找数据。