公开(公告)号：US5082484A

公开(公告)日：1992-01-21

申请号：US583553

申请日：1990-09-17

申请人： Tadao Koseki ,  Akihiko Koseki ,  Kohichi Hirata ,  Haruhiko Itoh

发明人： Tadao Koseki ,  Akihiko Koseki ,  Kohichi Hirata ,  Haruhiko Itoh

IPC分类号： C03B20/00 ,  C03B19/09

CPC分类号： C03B19/095 ,  Y02P40/57 ,  Y10S425/201

摘要： An apparatus for making a quartz glass crucible comprises a housing having a first chamber and a second chamber therein, a rotation crucible having an inner surface corresponding in configuration to the quartz glass crucible, means for rotating the rotation crucible, means for shifting the rotation crucible and the rotating means together between the first and second chambers, means placed in the first chamber for feeding a grain material into the rotation crucible, means placed in the first chamber for shaping the grain material in the rotation crucible so as to form a shaped body in the shape of the quartz glass crucible when the rotation crucible rotates, and means placed in the second chamber for heating and fusing the shaped body within the rotation crucible so as to make the quartz glass crucible.

摘要翻译： 一种用于制造石英玻璃坩埚的装置，包括：具有第一室和第二室的壳体，具有与石英玻璃坩埚构造对应的内表面的旋转坩埚，用于旋转旋转坩埚的装置，用于使旋转坩埚移动的装置 第一和第二室之间的旋转装置一起设置在第一室中，用于将颗粒材料送入旋转坩埚中，装置放置在第一室中，用于使旋转坩埚中的颗粒材料成形，以形成成形体 当旋转坩埚旋转时，以石英玻璃坩埚的形状，以及放置在第二室中的装置，用于在旋转坩埚内加热和熔合成形体以制造石英玻璃坩埚。

公开(公告)号：US4979973A

公开(公告)日：1990-12-25

申请号：US404585

申请日：1989-09-08

申请人： Masatoshi Takita ,  Takaaki Shimizu

发明人： Masatoshi Takita ,  Takaaki Shimizu

IPC分类号： C03B19/09 ,  C03B20/00 ,  C03C1/00 ,  C03C3/06 ,  C30B15/10 ,  C30B35/00

CPC分类号： C03C1/006 ,  C03B19/095 ,  C03B20/00 ,  C03C3/06 ,  C30B15/10 ,  C30B35/002 ,  C03C2201/02 ,  C03C2203/26 ,  C03C2203/32 ,  Y10S65/90 ,  Y10S65/901

摘要： The invention provides a method for the preparation of synthetic fused silica glass containing a very small amount of hydroxyl groups and has a high viscosity at high temperatures suitable for use as a material of articles for semiconductor processing at high temperatures, such as a crucible for Czochralski single crystal growing of semiconductor silicon. The method comprises hydrolyzing methyl silicate in a medium containing a specified amount of ammonia as a hydrolysis catalyst to form silica particles which are heat-treated in several successive steps.

公开(公告)号：US4949095A

公开(公告)日：1990-08-14

申请号：US277179

申请日：1988-11-29

申请人： Jeffrey T. Neil ,  Leslie J. Bowen ,  Brett E. Michaud

发明人： Jeffrey T. Neil ,  Leslie J. Bowen ,  Brett E. Michaud

IPC分类号： H01Q1/42

CPC分类号： H01Q1/42 ,  C03B19/095

摘要： A new and improved fused silica radome is discussed. The radome has a density equal to or greater than 95 percent of theoretical density, an average bend strength equal to or greater than 10 Kpsi, a thermal expansion of about 0.3.times.10.sup.-6 .degree. C., a dielectric constant of about 3.8 at X-Band frequencies, a loss tangent of about 0.002 at X-Band frequencies, an average modulus of rupture greater than 10 Kpsi from room temperature to 1000.degree. C., and no crystalline phase present. The radome is made by an arc fusion process in which a quartz powder is placed within a graphite mold, then shaped by centrifugal force as the mold is rotated. An arc is then struck between electrodes within the mold cavity. The quartz powder fuses to form a dense silica radome which is removed from the mold after the fusion occurs.

摘要翻译： 讨论了一种新的改进的熔融二氧化硅天线罩。 雷达罩的密度等于或大于理论密度的95％，平均弯曲强度等于或大于10Kpsi，热膨胀约为0.3×10 -6℃，X-射线介电常数约为3.8， 频带频率，X频带频率下的损耗角正切大约为0.002，从室温到1000℃的平均断裂模数大于10 Kpsi，并且不存在结晶相。 雷达罩通过电弧熔合法制成，其中将石英粉置于石墨模具内，然后在模具旋转时通过离心力成形。 然后在模腔内的电极之间撞击电弧。 石英粉熔融形成密集的二氧化硅天线罩，在发生融合后从模具中取出。

公开(公告)号：US4416680A

公开(公告)日：1983-11-22

申请号：US247394

申请日：1981-03-25

申请人： Rolf Bruning ,  Friedhelm Habegger

发明人： Rolf Bruning ,  Friedhelm Habegger

IPC分类号： C03B20/00 ,  C03B19/09 ,  C03C3/06 ,  C30B15/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  Y10S425/06

摘要： To make quartz glass crucibles suitable for drawing of single crystal silicon for electronic semiconductor applications, granular crystalline quartz or amorphous quartz glass is introduced into a rotating hollow mold which has gas-pervious wall regions at the side walls and bottom thereof, for example by having bores extending through a metal mold or being made of porous, sintered material. After introducing the raw material, a heat source, such as an electric arc, is introduced into the hollow mold, causing first sintering and then melting of an inner layer; upon introduction of the hollow mold, a vacuum is applied to the outside of the hollow mold, for example between the housing and the mold body, and, during continued rotation, to draw out any included gases and cause melting-together of vacuoles which, otherwise, might form due to included spaces and gases within the granular filling material. The vacuum is maintained during melting and rotation, heating being interrupted when a sufficienty thick inner wall of molten material has been formed, with an adjacent layer of sintered material leaving, however, granular material immediately adjacent the inner walls of the hollow mold to provide for heat insulation of the molten layer with respect to the hollow mold and protect the surface of the mold. The finished crucible can be ejected by introducing compressed air, rather than vacuum, to the outside of the hollow mold. Suitable vacuum is a pressure of less than 5,000 Pa, preferably less than 1,000 Pa.

摘要翻译： 为了制造适用于电子半导体应用的单晶硅拉制的石英玻璃坩埚，将颗粒状晶体石英或无定形石英玻璃引入旋转的中空模具中，该空心模具在侧壁及其底部具有气体可渗透的壁区域，例如通过 孔穿过金属模具或由多孔烧结材料制成。 在引入原料之后，将诸如电弧的热源引入中空模具中，从而首先烧结然后熔化内层; 在引入中空模具时，将真空施加到中空模具的外部，例如在壳体和模具体之间，并且在连续旋转期间，抽出任何所包含的气体并使空泡熔化在一起， 否则，可能由于颗粒填充材料中包含的空间和气体而形成。 在熔化和旋转期间保持真空，当形成足够厚的熔融材料内壁时，加热中断，邻近的烧结材料层离开直接邻近中空模的内壁的颗粒材料，以提供 熔融层相对于中空模具的隔热并保护模具的表面。 可以通过将压缩空气而不是真空引入到中空模具的外部来喷射成品坩埚。 合适的真空度是小于5,000Pa，优选小于1,000Pa的压力。

公开(公告)号：US3902885A

公开(公告)日：1975-09-02

申请号：US49082974

申请日：1974-07-22

申请人： HERAEUS SCHOTT QUARZSCHMELZE

发明人： RAU KARLHEINZ

IPC分类号： C03B5/033 ,  C03B19/09 ,  C03B19/04

CPC分类号： C03B5/0338 ,  C03B5/0336 ,  C03B19/095 ,  Y10S65/04

摘要： Hollow cylinders and tubes are made from vitreous silica by placing granular or powdered quartz or silica starting material on a granular bedding layer in a hollow form revolving about its axis and, as the rotation of the hollow form continues, melting by means of an electrical power source, and solidifying the starting material. An electrically heated hollow cylinder of carbonaceous material is disposed in the hollow form and the apertures thereof are hermetically closed with covers after the starting material has been put in. The sealed inner chamber thus formed is slowly evacuated with a vacuum to a pressure ranging from 10 to 0.0001 mm Hg. The starting material is slowly heated to the melting point while sustaining this pressure. After complete melting, the electric power source is shut off and the fused article is cooled while rotation continues. Thereafter, the vacuum pump is shut off and the inner chamber is aired before removing the cover. Lastly, the vitreous silica hollow cylinder which is still at temperatures between room temperature and 1400*C., is removed from the hollow form. Apparatus for making hollow cylinders from vitreous silica via the above-described process includes horizontally disposed, rotatable hollow form means adapted to be hermetically sealed with a cover means having a vacuum connection connected to vacuum means. Crucible means are positioned within the form means and a graphite vacuum baffle means extends into the hollow form means and the crucible means. A filling of refractory thermal insulation material is between the crucible means and the hollow form means.

摘要翻译： 中空圆柱体和管由玻璃状二氧化硅制成，将颗粒状或粉状的石英或二氧化硅起始材料放置在围绕其轴线旋转的中空形式的颗粒状垫层上，随着中空形式的旋转继续，通过电力 来源和固化原料。 一种电加热的含碳材料的中空圆筒以中空的形式设置，并且其起始材料已经被放入之后，其孔被盖密封。将如此形成的密封的内部腔室真空缓慢地抽真空到10 至0.0001 mm Hg。 将起始材料缓慢加热至熔点同时维持该压力。 完全熔化后，切断电源，同时旋转继续冷却熔融制品。 此后，在移除盖之前，关闭真空泵并且内室被播出。 最后，仍然处于室温至1400℃之间的玻璃状二氧化硅中空圆柱体从空心形状中去除。

公开(公告)号：US3607163A

公开(公告)日：1971-09-21

申请号：US3607163D

申请日：1968-06-12

申请人： BARR & STROUD LTD

发明人： SMITH HOWARD CAMERON ,  ALLAN WILLIAM BELL

IPC分类号： C03B19/09 ,  C03B37/012 ,  C03B37/027 ,  C03B19/04 ,  C03B37/02

CPC分类号： C03B37/027 ,  C03B19/095 ,  C03B37/01271 ,  C03B37/01297 ,  C03B2201/86 ,  C03B2203/16

摘要： This invention relates to a method of producing a tube from a glass that gives off undesirable vapors when heated in which glass cullet is placed into a horizontally disposed forming tube that is made of a material which is not wetted by the glass and has a lower coefficient of expansion (for instance the forming tube may be made of a borosilicate glass). The cullet is heated to melt the cullet while the forming tube rotates so that it coats the tube. The forming tube is cooled until the glass from the cullet has solidified as a tube. This tube may be used for making fibers in which a rod is subsequently inserted into this tube.

公开(公告)号：US1232785A

公开(公告)日：1917-07-10

申请号：US12927916

申请日：1916-11-03

申请人： FROST ARMIN

发明人： FROST ARMIN

CPC分类号： C03B19/095

公开(公告)号：US20170066686A1

公开(公告)日：2017-03-09

申请号：US15354924

申请日：2016-11-17

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Taira SATO ,  Shuichi IKEHATA ,  Manabu SHONAI ,  Takuji NISHI ,  Takaya SATOU ,  Shinsuke YAMAZAKI

IPC分类号： C03C23/00 ,  C30B15/10 ,  C30B35/00 ,  C03B19/09

CPC分类号： C03C23/0025 ,  C03B19/095 ,  C30B15/00 ,  C30B15/10 ,  C30B35/002 ,  Y10T117/10

摘要： A method of manufacturing a vitreous silica crucible includes: a taking-out process of taking out the vitreous silica crucible from the mold, a honing process of removing the unfused silica powder layer on the outer surface of the vitreous silica crucible, and further comprising, after the taking-out process and before the honing process, a marking process of marking an identifier comprised of one or more groove line on the outer surface of the vitreous silica crucible, wherein the groove line after the honing process has a cross-sectional shape of an inverse trapezoid and a depth of 0.2 to 0.5 mm, and a width of 0.8 mm or more at the opening of the groove line. The groove line is formed by repeating shifting a focal point of a laser.

摘要翻译： 一种石英玻璃坩埚的制造方法，其特征在于，包括从所述模具取出所述二氧化硅玻璃坩埚的取出工序，除去所述石英玻璃坩埚的外表面的未熔融二氧化硅粉末层的珩磨处理， 在掏取处理之后并且在珩磨处理之前，对在石英玻璃坩埚的外表面上由一条或多条槽线组成的标识符进行标记处理，其中，在珩磨处理之后的槽线具有横截面形状 反向梯形，深度为0.2〜0.5mm，宽度为0.8mm以上。 通过重复移动激光的焦点来形成凹槽线。

公开(公告)号：US09534318B2

公开(公告)日：2017-01-03

申请号：US13335885

申请日：2011-12-22

申请人： Toshiaki Sudo ,  Taira Sato ,  Shuichi Ikehata ,  Manabu Shonai ,  Takuji Nishi ,  Takaya Satou ,  Shinsuke Yamazaki

发明人： Toshiaki Sudo ,  Taira Sato ,  Shuichi Ikehata ,  Manabu Shonai ,  Takuji Nishi ,  Takaya Satou ,  Shinsuke Yamazaki

IPC分类号： C30B19/02 ,  C30B35/00 ,  C30B15/00

CPC分类号： C03C23/0025 ,  C03B19/095 ,  C30B15/00 ,  C30B15/10 ,  C30B35/002 ,  Y10T117/10

摘要： The present invention provides a method of manufacturing a vitreous silica crucible including: a taking-out process of taking out the vitreous silica crucible from the mold, a honing process of removing the unfused silica powder layer on the outer surface of the vitreous silica crucible, and further comprising, after the taking-out process and before the honing process, a marking process of marking an identifier comprised of one or more groove line on the outer surface of the vitreous silica crucible, wherein the groove line after the honing process has a depth of 0.2 to 0.5 mm, and a width of 0.8 mm or more at the opening of the groove line.

摘要翻译： 本发明提供了一种制造石英玻璃坩埚的方法，包括：从模具中取出玻璃状石英坩埚的取出工序，除去石英玻璃坩埚外表面的未熔融二氧化硅粉末层的珩磨处理， 并且还包括在所述取出处理之后并且在所述珩磨处理之前，对所述石英玻璃坩埚的外表面上的由一条或多条槽线组成的标识符进行标记处理，其中，所述珩磨处理后的所述槽线具有 深度为0.2〜0.5mm，宽度为0.8mm以上。

公开(公告)号：US09527763B2

公开(公告)日：2016-12-27

申请号：US14979431

申请日：2015-12-27

申请人： SUMCO CORPORATION

发明人： Toshiaki Sudo ,  Ken Kitahara ,  Takuma Yoshioka

IPC分类号： C03B19/09 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00

CPC分类号： C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/10

摘要： A method of manufacturing a composite crucible includes: supplying mullite material powder to an upper region of a mold, and supplying second silica powder to a lower region provided below the upper region while rotating the mold; supplying third silica powder on an inner surface side of a layer made of the mullite material powder and the second silica powder; heating and fusing the mullite material powder, the second silica powder, and the third silica powder to form an opaque vitreous silica layer provided on the outer surface of the crucible, a transparent vitreous silica layer provided on an inner surface side of the crucible, and a mullite reinforcement layer provided on the outer surface side of an upper end portion of the crucible.

摘要翻译： 制造复合坩埚的方法包括：将莫来石材料粉末供给到模具的上部区域，并且在旋转模具的同时将第二二氧化硅粉末供给到设置在上部区域下方的下部区域; 在由莫来石材料粉末和第二二氧化硅粉末制成的层的内表面侧上供给第二二氧化硅粉末; 加热熔融莫来石材料粉末，第二二氧化硅粉末和第三二氧化硅粉末，以形成设置在坩埚外表面上的不透明玻璃状二氧化硅层，设置在坩埚内表面侧的透明氧化硅玻璃层，以及 在所述坩埚的上端部的外表面侧设置的莫来石加强层。