公开(公告)号：US20170218534A1

公开(公告)日：2017-08-03

申请号：US15488342

申请日：2017-04-14

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Masami OHARA

IPC分类号： C30B15/10 ,  C30B15/14 ,  C30B29/06

CPC分类号： H01J37/32935 ,  C30B15/00 ,  C30B15/10 ,  C30B15/14 ,  C30B29/06 ,  C30B35/002 ,  G01N21/3563 ,  G01N21/65 ,  G01N21/68 ,  G01N21/95 ,  G01N2021/8477 ,  G01N2201/105 ,  G01N2201/12

摘要： A quality-evaluated vitreous silica crucible for pulling silicon single crystal is provided, wherein an inner surface of the vitreous silica crucible has regions where surface defects including brown rings are to be generated when pulling silicon single crystal. The regions are distinguished using an infrared absorption spectrum or a Raman shift of the regions, wherein a position of each region and/or a density of the regions are/is specified.

公开(公告)号：US20160153116A1

公开(公告)日：2016-06-02

申请号：US14901017

申请日：2013-06-29

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Eriko KITAHARA

IPC分类号： C30B15/10 ,  C30B29/06

CPC分类号： C30B15/10 ,  C30B29/06

摘要： A method for pulling silicon single crystal includes a process of placing a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of the inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is placed between the susceptor's inner surface and the crucible's outer surface.

摘要翻译： 拉硅单晶的方法包括将成形体放置在基座的内表面和坩埚的外表面之间的工序。 基于可以容纳玻璃状石英坩埚的基座的内表面形状和坩埚的三维数据的三维数据形成成型体，以使得基座的中心轴线和坩埚的中心轴基本上对齐， 它被放置在基座的内表面和坩埚的外表面之间。

公开(公告)号：US20170292901A1

公开(公告)日：2017-10-12

申请号：US15512535

申请日：2015-09-24

申请人： SUMCO CORPORATION

发明人： Ken KITAHARA ,  Tadahiro SATO ,  Toshiaki SUDO ,  Eriko KITAHARA ,  Takashi WATANABE

IPC分类号： G01N3/307

CPC分类号： G01N3/307 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  G01N2203/001 ,  G01N2203/0035 ,  G01N2203/0064

摘要： A destructive inspection method of a vitreous silica crucible for pulling a silicon single crystal evaluates a crack state of an inner surface of the vitreous silica crucible supported by a graphite susceptor when a load is instantaneously applied to at least one point on the inner surface via an automatic center punch while pushing the tip portion of the automatic center punch against the inner surface. The destructive inspection method can inspect the vitreous silica crucible under conditions as close to the actual conditions of use as possible.

公开(公告)号：US20170088973A1

公开(公告)日：2017-03-30

申请号：US15377963

申请日：2016-12-13

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Masami OHARA

IPC分类号： C30B15/10 ,  C03B19/09 ,  G01N21/3563 ,  C30B29/06 ,  G01N21/95 ,  G01N21/65

CPC分类号： H01J37/32935 ,  C30B15/00 ,  C30B15/10 ,  C30B15/14 ,  C30B29/06 ,  C30B35/002 ,  G01N21/3563 ,  G01N21/65 ,  G01N21/68 ,  G01N21/95 ,  G01N2021/8477 ,  G01N2201/105 ,  G01N2201/12

摘要： A method of manufacturing a vitreous silica crucible includes an inspection method comprising: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether a surface defect region is generated or not in the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.

公开(公告)号：US20160200617A1

公开(公告)日：2016-07-14

申请号：US14901034

申请日：2013-06-30

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Makiko HINOOKA

IPC分类号： C03B1/00 ,  C30B15/10 ,  C03B19/09 ,  G02B21/00 ,  G01N15/08

CPC分类号： C03B1/00 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  G01N15/088 ,  G01N21/55 ,  G01N2015/0015 ,  G01N2015/0096 ,  G01N2033/0091 ,  G02B21/008 ,  Y02P40/57

摘要： An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.

摘要翻译： 用于形成用于拉制硅单晶的玻璃状石英坩埚的无气泡层的合适的二氧化硅粉末的评价方法包括：测定二氧化硅粉末中的二氧化硅粒子之间的孔隙率的方法，二氧化硅粉末的熔融过程 测定由二氧化硅粉末熔融而得到的玻璃态二氧化硅嵌段的气泡含有率的测定方法，以及确定二氧化硅粉末是否适合于二氧化硅粉末的孔隙率和玻璃质的气泡含有率的方法 二氧化硅块。

公开(公告)号：US20160115625A1

公开(公告)日：2016-04-28

申请号：US14979431

申请日：2015-12-27

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Ken KITAHARA ,  Takuma YOSHIOKA

IPC分类号： C30B35/00 ,  C03B19/09

CPC分类号： C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/10

摘要： A method of manufacturing a composite crucible includes: supplying mullite material powder to an upper region of a mold, and supplying second silica powder to a lower region provided below the upper region while rotating the mold; supplying third silica powder on an inner surface side of a layer made of the mullite material powder and the second silica powder; heating and fusing the mullite material powder, the second silica powder, and the third silica powder to form an opaque vitreous silica layer provided on the outer surface of the crucible, a transparent vitreous silica layer provided on an inner surface side of the crucible, and a mullite reinforcement layer provided on the outer surface side of an upper end portion of the crucible.

摘要翻译： 制造复合坩埚的方法包括：将莫来石材料粉末供给到模具的上部区域，并且在旋转模具的同时将第二二氧化硅粉末供给到设置在上部区域下方的下部区域; 在由莫来石材料粉末和第二二氧化硅粉末制成的层的内表面侧上供给第二二氧化硅粉末; 加热熔融莫来石材料粉末，第二二氧化硅粉末和第三二氧化硅粉末，以形成设置在坩埚外表面上的不透明玻璃状二氧化硅层，设置在坩埚内表面侧的透明氧化硅玻璃层，以及 在所述坩埚的上端部的外表面侧设置的莫来石加强层。

公开(公告)号：US20180045639A1

公开(公告)日：2018-02-15

申请号：US15783969

申请日：2017-10-13

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Eriko KITAHARA

IPC分类号： G01N21/23 ,  C03C3/04 ,  H04N5/232 ,  C30B29/06 ,  G01L5/00 ,  G01L1/24 ,  C30B15/10

CPC分类号： G01N21/23 ,  C03C3/04 ,  C30B15/10 ,  C30B29/06 ,  G01L1/24 ,  G01L5/0047 ,  G01N2201/062 ,  G01N2201/0683 ,  H04N5/232

摘要： A vitreous silica crucible used to pull up silicon single crystal includes: a cylindrical straight body portion, a corner portion formed at a lower end of the straight body portion, and a bottom portion connected with the straight body portion via the corner portion, wherein the vitreous silica crucible further comprises: an opaque outer layer enclosing bubbles therein; and a transparent inner layer from which bubbles are removed, wherein the residual distortion's distribution obtained by measuring the silica glass's inner surface in a non-destructed state has an optical path difference which is 130 nm or less, which residual distortion's distribution is measured using a distortion-measuring apparatus which converts a linearly polarized light into circularly polarized light and then irradiates the crucible's wall.

公开(公告)号：US20170292204A1

公开(公告)日：2017-10-12

申请号：US15512537

申请日：2015-09-24

申请人： SUMCO CORPORATION

发明人： Tadahiro SATO ,  Eriko KITAHARA ,  Toshiaki SUDO ,  Ken KITAHARA

IPC分类号： C30B15/10 ,  C30B15/20 ,  C30B29/06

CPC分类号： C30B15/10 ,  C30B15/00 ,  C30B15/20 ,  C30B29/06 ,  C30B35/007

摘要： Spatial coordinates of multiple points on an inner surface of a vitreous silica crucible are measured prior to filling raw material in the vitreous silica crucible, and a three-dimensional shape of the inner surface of the vitreous silica crucible using a combination of polygons having vertex coordinates constituted by the respective measured points is specified (S11); a predictive value of an initial liquid surface level of the silicon melt in the vitreous silica crucible is preset (S12); a volume of the silicon melt satisfying the predictive value of the initial liquid surface level is obtained based on the three-dimensional shape of the inner surface of the vitreous silica crucible (S13); a weight of the silicon melt having the volume is obtained (S14); raw material having the weight is filled in the vitreous silica crucible (S15); a dipping control of the seed crystal is performed based on the predictive value of the initial liquid surface level (S17).

公开(公告)号：US20160313234A1

公开(公告)日：2016-10-27

申请号：US15103609

申请日：2014-12-25

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Eriko KITAHARA

IPC分类号： G01N21/23 ,  C03C3/04 ,  H04N5/232 ,  G01L1/24 ,  G01L5/00

CPC分类号： G01N21/23 ,  C03C3/04 ,  C30B15/10 ,  C30B29/06 ,  G01L1/24 ,  G01L5/0047 ,  G01N2201/062 ,  G01N2201/0683 ,  H04N5/232

摘要： In an embodiment, a distortion-measuring apparatus for measuring a distortion distribution of an entire vitreous silica crucible in a non-destructive way includes: a light source 11; a first polarizer 12 and a first quarter-wave plate 13 disposed between the light source 11 and an outer surface of a vitreous silica crucible wall; a camera 14 disposed inside of a vitreous silica crucible 1; a camera control mechanism 15 configured to control a photographing direction of the camera 14; a second polarizer 16 and a second quarter-wave plate 17 disposed between the camera 14 and an inner surface of the vitreous silica crucible wall. An optical axis of the second quarter-wave plate 17 inclines 90 degrees with respect to the first quarter-wave plate 13.

摘要翻译： 在一个实施例中，用于以非破坏性方式测量整个石英坩埚坩埚的失真分布的失真测量装置包括：光源11; 设置在光源11和石英玻璃坩埚壁的外表面之间的第一偏振器12和第一四分之一波长板13; 设置在石英玻璃坩埚1内的相机14; 被配置为控制相机14的拍摄方向的相机控制机构15; 设置在相机14与玻璃状石英玻璃坩埚壁的内表面之间的第二偏振器16和第二四分之一波片17。 第二四分之一波片17的光轴相对于第一四分之一波片13倾斜90度。

公开(公告)号：US20160289862A1

公开(公告)日：2016-10-06

申请号：US15103639

申请日：2014-12-25

申请人： SUMCO CORPORATION

发明人： Toshiaki SUDO ,  Tadahiro SATO ,  Ken KITAHARA ,  Eriko KITAHARA

IPC分类号： C30B15/10 ,  C03B19/09 ,  C30B29/06

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

摘要： In an embodiment, a vitreous silica crucible 1 includes a cylindrical straight body portion 10a, a corner portion 10c formed at lower end of the straight body portion 10a, and a bottom portion 10b connected with the straight body portion 10a via the corner portion 10c. Moreover, the vitreous silica crucible 1 includes a bubble-containing opaque layer 11 constituting an outer layer, and a bubble-free transparent layer 12 constituting an inner layer. A boundary surface, between the opaque layer 11 and the transparent layer 12 in at least the straight body portion 10a, forms a periodic wave surface in a vertical direction. The vitreous silica crucible can suppress deformation under high temperature.

摘要翻译： 在一个实施例中，石英玻璃坩埚1包括圆柱形直体部分10a，形成在直体部分10a的下端的角部10c，以及经由拐角部分10c与直体部分10a连接的底部10b。 此外，石英玻璃坩埚1包括构成外层的含气泡的不透明层11和构成内层的无气泡透明层12。 至少在直体部分10a中的不透明层11和透明层12之间的边界表面在垂直方向上形成周期波表面。 石英玻璃坩埚可以抑制高温下的变形。