公开(公告)号：US20230352294A1

公开(公告)日：2023-11-02

申请号：US18336552

申请日：2023-06-16

Applicant: Beijing E-Town Semiconductor Technology Co., Ltd. ,  Mattson Technology, Inc.

Inventor： Michael X. Yang ,  Rolf Bremensdorfer ,  Dave Camm ,  Joseph Cibere ,  Dieter Hezler ,  Shawming Ma ,  Yun Yang

IPC: H01J61/86 ,  H01J61/073 ,  H05H1/48 ,  H01J61/52 ,  H01J61/28

CPC classification number: H01J61/86 ,  H01J61/0732 ,  H05H1/48 ,  H01J61/526 ,  H01J61/28

Abstract: Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

公开(公告)号：US11631579B2

公开(公告)日：2023-04-18

申请号：US17225595

申请日：2021-04-08

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Noritaka Ashizawa

IPC: G03F7/20 ,  H01J61/06 ,  H01J61/02 ,  H01J61/28

Abstract: An extreme ultraviolet light source apparatus includes a disc-shaped cathode rotating about an axis, a disc-shaped anode rotating about an axis, an energy beam irradiation device irradiating a plasma raw material on the cathode with an energy beam to vaporize the plasma raw material, a power supply for causing a discharge between the cathode and the anode for generating a plasma in the gap between the cathode and the anode to emit extreme ultraviolet light, and an irradiation position adjusting mechanism for adjusting a position at which the cathode is irradiated with the energy beam. The cathode, the anode, and the irradiation position adjusting mechanism are accommodated in a housing. A photography device is disposed outside the housing and is configured to photograph a visible-light image of a vicinity of the cathode and the anode, the vicinity including visible light emitted from the plasma.

公开(公告)号：US11521845B2

公开(公告)日：2022-12-06

申请号：US17018092

申请日：2020-09-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hideki Matsumoto ,  Yasushi Sugiyama ,  Kohei Suzuki ,  Yukihiro Yokota ,  Shunsuke Ota

IPC: H01J61/28 ,  H01J61/32 ,  G03F7/20 ,  H01J61/36 ,  H01J61/30 ,  H01J61/20

Abstract: The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

公开(公告)号：US11437228B2

公开(公告)日：2022-09-06

申请号：US17415163

申请日：2020-01-21

Applicant: PHOTOSCIENCE JAPAN CORPORATION

Inventor： Akihiro Inoue

IPC: H01J61/60 ,  H01J61/28 ,  H01J61/52

Abstract: A mercury discharge lamp includes: a discharge tube having encapsulated therein mercury in the form of an amalgam; and a temperature control member that controls an ambient temperature of the amalgam in such a manner as to compensate for a change in the ambient temperature of the amalgam. The temperature control member may include a bimetal supporting the amalgam at a predetermined position, and the support member is formed or constituted by a bimetal. By the bimetal deforming in response to a change in the ambient temperature of the amalgam, the temperature control member changes a spaced-apart distance of the amalgam to a filament within the discharge tube and thereby changes an influence of heat generation by the filament on the amalgam. The temperature control member may include, near the amalgam, a resistance element whose resistance value changes in response to a temperature to control heat generation thereby.

公开(公告)号：US20200068690A1

公开(公告)日：2020-02-27

申请号：US16548566

申请日：2019-08-22

Applicant: FRANK E GORDON ,  HARPER JOHN WHITEHOUSE

Inventor： FRANK E GORDON ,  HARPER JOHN WHITEHOUSE

IPC: H05B41/36 ,  H01J61/28 ,  H01J61/06 ,  H01J61/12 ,  H01J61/36 ,  H01J61/52 ,  H01J61/42 ,  H01J9/395 ,  H01J9/02

Abstract: A gaseous-phase ionizing; radiation generator for the voltage controlled production, flux, and use of one or more forms of ionizing electrornagnetic and/or particulate radiation including: embodiments to collect and convert the particulate radiation that is generated by the radiation generator into electricity; embodiments that generate electricity from the ionized gas within the radiation generator by means of an auxiliary electrode structure composed of interdigitated individual electrodes of alternating work function; and a method or procedure for the fabrication and the activation of at least one working electrode composed in part of a metal hydride host material that is not formally considered to be radioactive.

公开(公告)号：US10529551B2

公开(公告)日：2020-01-07

申请号：US15671520

申请日：2017-08-08

Applicant: Lucidity Lights, Inc.

Inventor： Harris Miller ,  Tenzin Wangjor Nanchung ,  John R. Goscha ,  Felix I. Alexandrov

IPC: H01J1/62 ,  H01J65/04 ,  H05B41/28 ,  H01J9/24 ,  H05B41/392 ,  H01J61/28 ,  H01J9/40 ,  H01J9/395 ,  H01J7/22 ,  H01J7/20 ,  H01J9/34 ,  H01J9/32 ,  H02M1/42 ,  H01J61/20 ,  H01J61/72 ,  H01J61/24

Abstract: An RF fluorescent lamp, comprising a bulbous vitreous portion of the RF fluorescent lamp comprising a vitreous envelope filled with a working gas mixture, a power coupler to induce an alternating electric field within the vitreous envelope, an electronic ballast, and a mercury amalgam accommodating structure mounted within the lamp envelope and adapted to absorb power from the electric field to rapidly heat and vaporize an amalgam of mercury to rapidly illuminate the lamp envelope during a turn-on phase of the RF fluorescent lamp, wherein the structure is comprised of a substrate material coated with a mixture of indium and gold.

公开(公告)号：US10269552B2

公开(公告)日：2019-04-23

申请号：US15575731

申请日：2016-05-10

Applicant: ZED ZIEGLER ELECTRONIC DEVICES GMBH

Inventor： Karin Ziegler ,  Rolf Ziegler

IPC: H01J61/24 ,  H01J61/28 ,  H01J61/52 ,  H01J61/72 ,  H01J65/04

Abstract: The present invention relates to a device for the regulated temperature control of a gas discharge lamp, and a gas discharge lamp. The device according to the invention includes a transformer core of a transformer, the transformer core being designed for accommodating at least one discharge current-conducting connecting line of the gas discharge lamp as a primary winding. The transformer forms an energy source for heating a functional area of the gas discharge lamp that determines a function of the gas discharge lamp, and that is formed by an amalgam reservoir. The device also includes a secondary winding on the transformer core, and a means for temperature control that is used to regulate the energy that heats the amalgam reservoir. The means for temperature control is electrically connected to the secondary winding.

公开(公告)号：US20190107438A1

公开(公告)日：2019-04-11

申请号：US16210097

申请日：2018-12-05

Applicant: Gigaphoton Inc.

Inventor： Masato MORIYA

IPC: G01J3/26 ,  H01J61/28 ,  H01S3/139 ,  H01S3/225

Abstract: A line-narrowed KrF excimer laser apparatus includes a laser chamber, a line narrow optical system, an actuator, an output coupling mirror, a wavelength detecting unit, and a wavelength controller. The actuator is capable of changing a wavelength of light selected by the line narrow optical system. The wavelength detecting unit includes a low-pressure mercury lamp accommodating mercury, a getter material that adsorbs at least a part of the mercury, and a hot cathode that excites at least a part of the mercury, an etalon provided at a position where reference light emitted from the low-pressure mercury lamp and detected light emitted from the output coupling mirror are incident on the etalon, and a light intensity distribution sensor configured to detect an intensity distribution profile of interference fringes of the reference light and an intensity distribution profile of interference fringes of the detected light.

公开(公告)号：US20150357178A1

公开(公告)日：2015-12-10

申请号：US14296166

申请日：2014-06-04

Applicant: General Electric Company

Inventor： Agoston Boroczki ,  Peter Horvath ,  Istvan Kerenyi ,  Sandor Sebok ,  Anna Inczedy

IPC: H01J61/28 ,  H01J9/26 ,  C04B35/645 ,  C04B35/117 ,  C04B35/107 ,  C04B35/495 ,  H01J61/12 ,  H01J9/395

CPC classification number: H01L27/1214 ,  C04B35/117 ,  C04B2235/3256 ,  C04B2235/40 ,  C04B2235/94 ,  H01J9/26 ,  H01J61/125 ,  H01J61/26 ,  H01J61/28 ,  H01J61/302 ,  H01J61/827

Abstract: A ceramic metal halide lamp according to various embodiments can include a discharge vessel and an ionizable fill. The ionizable fill is sealed within the discharge vessel. The ionizable fill includes an oxygen dispenser to introduce oxygen in a form of a pellet into the discharge vessel in a controlled manner to facilitate a tungsten halogen wall cleaning cycle. The pellet comprises aluminum-oxide and molybdenum-oxide.

Abstract translation: 根据各种实施例的陶瓷金属卤化物灯可以包括放电容器和可电离填充物。 可离子化填充物被密封在放电容器内。 可离子化填充物包括氧分配器，以可控的方式将颗粒形式的氧引入放电容器中以促进钨卤素壁清洁循环。 颗粒包含氧化铝和氧化钼。

公开(公告)号：US09202682B2

公开(公告)日：2015-12-01

申请号：US14186722

申请日：2014-02-21

Applicant: Bourns, Inc.

Inventor： John Kelly ,  Johan Schleimann-Jensen ,  Jan Heath ,  Craig Robert Shipley ,  Gordon L. Bourns

IPC: H01J17/26 ,  H01J61/28 ,  H01J61/30 ,  H01T1/20 ,  H01T1/10 ,  H01T1/04 ,  H01T4/12 ,  H01J61/92 ,  H01J61/54

CPC classification number: H01T4/02 ,  H01J61/305 ,  H01J61/545 ,  H01J61/92 ,  H01T1/04 ,  H01T1/10 ,  H01T1/20 ,  H01T4/12 ,  H01T21/00

Abstract: Disclosed are devices and methods related to flat gas discharge tubes (GDTs). In some embodiments, a plurality of GDTs can be fabricated from an insulator plate having a first side and a second side, with the insulator plate defining a plurality of openings. Each opening can be covered by first and second electrodes on the first and second sides of the insulator plate to thereby define an enclosed gas volume configured for GDT operation. Various examples related to such GDTs, including electrode configurations, opening configurations, pre-ionization features, grouping of a GDT with another GDT or device, and packaging configurations, are disclosed.

Abstract translation: 公开了与平坦气体放电管（GDT）相关的装置和方法。 在一些实施例中，多个GDT可以由具有第一侧和第二侧的绝缘板制造，绝缘板限定多个开口。 每个开口可以由绝缘板的第一和第二侧上的第一和第二电极覆盖，从而限定被配置用于GDT操作的封闭气体体积。 公开了与这种GDT相关的各种实例，包括电极配置，开口配置，预电离特征，GDT与另一GDT或器件的分组以及封装结构。