ELECTRODE FOR A DISCHARGE CHAMBER

    公开(公告)号:US20210384027A1

    公开(公告)日:2021-12-09

    申请号:US17411155

    申请日:2021-08-25

    申请人: Cymer, LLC

    发明人: Leyla Ramin

    摘要: A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

    HIGH-PRESSURE DISCHARGE LAMP
    2.
    发明申请

    公开(公告)号:US20210210336A1

    公开(公告)日:2021-07-08

    申请号:US17056633

    申请日:2019-02-07

    IPC分类号: H01J61/073

    摘要: A high-pressure discharge lamp includes a cathode body composed of a cathode made of tungsten or tungsten alloy and a lead rod inserted in a lead rod insertion hole of the cathode. The cathode has a carbonized layer made of tungsten carbide (W2C) formed on a surface thereof exposed to a discharge space (except for a tip portion thereof) and on an inner surface of the lead rod insertion hole. The carbonized layer contains carbon in an amount of 0.44 g/cc to 0.53 g/cc.

    Electrode arrangement for a discharge lamp, gas discharge lamp, protective film and method for providing a protective film on an electrode arrangement

    公开(公告)号:US10991569B2

    公开(公告)日:2021-04-27

    申请号:US16799876

    申请日:2020-02-25

    申请人: OSRAM GmbH

    发明人: Knut Grothmann

    摘要: An electrode arrangement for a discharge lamp is provided, including an electrode unit including an electrode and an electrode plate, and a conductive connection unit for coupling to an energy source. The connection unit includes a connection unit plate. The arrangement includes a cylinder composed of a nonconductive material, said cylinder arranged between the electrode plate and the connection unit plate, and at least one conduction film which is arranged on an outer side of the cylinder and extends from the connection unit plate as far as the electrode plate and connects the connection unit plate and the electrode plate to one another. The arrangement includes a cap-shaped and integrally embodied protective film arranged on the electrode plate or connection unit plate, such that the film covers a plate side facing away from the cylinder and an outer lateral surface of the electrode plate or of the connection unit plate.

    Metal halide lamp and manufacturing method thereof

    公开(公告)号:US10861691B2

    公开(公告)日:2020-12-08

    申请号:US16476530

    申请日:2018-08-24

    IPC分类号: H01J61/82 H01J61/073

    摘要: The present disclosure relates to the technical field of electric light sources, particularly to a metal halide lamp and a manufacturing method thereof. The metal halide lamp includes an electric arc tube, an inner glass bulb, and a lamp holder fixedly connected with the inner glass bulb; the electric arc tube includes a tube body, a positive electrode located inside an electric arc cavity of the tube body and connected with a positive feedthrough inserted in a first leg portion of the tube body, and a negative electrode connected with a negative feedthrough inserted in a second leg portion of the tube body; the electric arc cavity is provided therein with an ignition gas; an outer surface of the first leg portion is provided with a conductive layer and a metal electrical connector, wherein the conductive layer has one end close to and the other end away from an electrode tip of the positive electrode, the metal electrical connector has one end connected with the other end of the conductive layer, and the other end connected with a long molybdenum rod. Security risks in manufacturing, transportation, mounting, utilization, storage, and waste disposal brought about by use of the radioactive material 85Kr are avoided in the present disclosure.

    ELECTRODE FOR A DISCHARGE CHAMBER
    5.
    发明申请

    公开(公告)号:US20200328074A1

    公开(公告)日:2020-10-15

    申请号:US16955952

    申请日:2018-12-14

    申请人: Cymer, LLC

    发明人: Leyla Ramin

    摘要: A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

    ELECTRODE ARRANGEMENT FOR A DISCHARGE LAMP, GAS DISCHARGE LAMP, PROTECTIVE FILM AND METHOD FOR PROVIDING A PROTECTIVE FILM ON AN ELECTRODE ARRANGEMENT

    公开(公告)号:US20200273694A1

    公开(公告)日:2020-08-27

    申请号:US16799876

    申请日:2020-02-25

    申请人: OSRAM GmbH

    发明人: Knut Grothmann

    摘要: An electrode arrangement for a discharge lamp is provided, including an electrode unit including an electrode and an electrode plate, and a conductive connection unit for coupling to an energy source. The connection unit includes a connection unit plate. The arrangement includes a cylinder composed of a nonconductive material, said cylinder arranged between the electrode plate and the connection unit plate, and at least one conduction film which is arranged on an outer side of the cylinder and extends from the connection unit plate as far as the electrode plate and connects the connection unit plate and the electrode plate to one another. The arrangement includes a cap-shaped and integrally embodied protective film arranged on the electrode plate or connection unit plate, such that the film covers a plate side facing away from the cylinder and an outer lateral surface of the electrode plate or of the connection unit plate.

    METAL HALIDE LAMP AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20200126782A1

    公开(公告)日:2020-04-23

    申请号:US16476530

    申请日:2018-08-24

    IPC分类号: H01J61/82 H01J61/073

    摘要: The present disclosure relates to the technical field of electric light sources, particularly to a metal halide lamp and a manufacturing method thereof. The metal halide lamp includes an electric arc tube, an inner glass bulb, and a lamp holder fixedly connected with the inner glass bulb; the electric arc tube includes a tube body, a positive electrode located inside an electric arc cavity of the tube body and connected with a positive feedthrough inserted in a first leg portion of the tube body, and a negative electrode connected with a negative feedthrough inserted in a second leg portion of the tube body; the electric arc cavity is provided therein with an ignition gas; an outer surface of the first leg portion is provided with a conductive layer and a metal electrical connector, wherein the conductive layer has one end close to and the other end away from an electrode tip of the positive electrode, the metal electrical connector has one end connected with the other end of the conductive layer, and the other end connected with a long molybdenum rod. Security risks in manufacturing, transportation, mounting, utilization, storage, and waste disposal brought about by use of the radioactive material 85Kr are avoided in the present disclosure.

    Electrode body and high-pressure discharge lamp

    公开(公告)号:US10553419B2

    公开(公告)日:2020-02-04

    申请号:US16472353

    申请日:2017-12-07

    IPC分类号: H01J61/073 H01J61/36

    摘要: An electrode module includes an electrode and a core wire inserted into a core wire insertion hole of the electrode. When inserting the core wire into the core wire insertion hole of the electrode, the core wire can be inserted smoothly, thereby avoiding occurrence of chipping or cracking in the core wire insertion hole. A low-friction layer is provided on the inner surface of the core wire insertion hole of the electrode and/or the outer periphery of the inserted portion of the core wire.

    Discharge lamp that includes a luminous tube and a pair of electrodes and a manufacturing method for discharge lamp and projector

    公开(公告)号:US10186415B2

    公开(公告)日:2019-01-22

    申请号:US15205847

    申请日:2016-07-08

    发明人: Junichi Suzuki

    摘要: A discharge lamp includes a luminous tube and a pair of electrodes. At least one of the pair of electrodes includes a core material, a coil section in which a metal wire is wound on the core material in three or more layers, a distal end portion made of a conductor and provided, with respect to the coil section, at an end portion of the core material on a side where the other electrode is disposed, and a rear end portion made of a conductor and provided on the opposite side of the distal end portion with respect to the coil section. The rear end portion includes a first diameter section having a first diameter and a second diameter section having a second diameter smaller than the first diameter and present in a position farther from the coil section than the first diameter section.