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公开(公告)号：US20080182183A1
公开(公告)日：2008-07-31
申请号：US12028250
申请日：2008-02-08
摘要： To provide a reflective mask blank for EUV lithography having an absorber layer which has a low reflectance in a wavelength region of EUV light or light for inspection of a pattern and which is easy to control to have a desired layer composition and thickness.A reflective mask blank for EUV lithography, which comprises a substrate, and a reflective layer to reflect EUV light and an absorber layer to absorb EUV light, formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta) and hafnium (Hf), and in the absorber layer, the content of Hf is from 20 to 60 at. % and the content of Ta is from 40 to 80 at. %, and wherein the absorber layer has a content of N being 0 to at most 35 at. %.
摘要翻译： 为了提供EUV光刻用的反射掩模板，其具有在EUV光或光的波长区域具有低反射率的吸收层，用于检查图案，并且易于控制以具有期望的层组成和厚度。 用于EUV光刻的反射掩模板，其包括基板，以及反射层，用于反射EUV光和吸收层，以吸收在基板上依次形成的EUV光，其中吸收层包含钽（Ta）和铪（ Hf），并且在吸收层中，Hf的含量为20〜60at。 ％，Ta的含量为40〜80。 ％，并且其中所述吸收层的N含量为0至至多35at。 ％。
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142.发明申请REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH A CONDUCTIVE FILM FOR THE MASK BLANK 有权用于EUV光刻的反射掩模层和带有导电膜的掩模公开(公告)号：US20070160874A1
公开(公告)日：2007-07-12
申请号：US11566883
申请日：2006-12-05
IPC分类号： B32B9/04
CPC分类号： G03F1/24 , B82Y10/00 , B82Y40/00 , G03F1/38 , G21K2201/067 , Y10T428/31616
摘要： To provide a substrate with a conductive film for an EUV mask blank having an increased surface hardness, and a substrate with a reflective multilayer film and an EUV mask blank using such a substrate with a conductive film. A substrate with a conductive film to be used for production of a reflective mask blank for EUV lithography, characterized in that the chief material of the conductive film is at least one member selected from the group consisting of Cr, Ti, Zr, Nb, Ni and V, and the conductive film contains B (boron) at an average concentration of from 1 to 70 at %.
摘要翻译： 为了提供具有增加表面硬度的EUV掩模坯料用导电膜的基板，以及使用这种具有导电膜的基板的具有反射多层膜的基板和EUV掩模坯料。 一种具有用于生产用于EUV光刻的反射掩模板的导电膜的基板，其特征在于，导电膜的主要材料是选自Cr，Ti，Zr，Nb，Ni中的至少一种 和V，导电膜含有平均浓度为1-70原子％的B（硼）。
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公开(公告)号：US06898916B2
公开(公告)日：2005-05-31
申请号：US10315937
申请日：2002-12-11
摘要： A elastic member of weatherstrip has a base portion with nearly U-shaped section, lips extending from ends of the base portion. An edge of a door glass is adapted to be accommodated in an accommodating portion provided in the elastic member. Each of the inner wall of the accommodating portion, and the inner walls and the outer walls of the lips is covered with a surface treatment layer having a predetermined film thickness. In contrast, the outer wall of the base portion is not covered. An embossing for obtaining a surface like a pearskin-finished one with a surface irregularity is preliminarily performed on the outer wall of the base portion and the outer wall of each of the lips, so that the surface has gloss and color close to those of the surface treatment layer.
摘要翻译： 密封条的弹性部件具有基部，其具有大致U形的部分，从基部的端部延伸的唇部。 门玻璃的边缘适于容纳在设置在弹性构件中的容纳部分中。 容纳部分的每个内壁以及唇部的内壁和外壁均被具有预定膜厚度的表面处理层覆盖。 相反，基部的外壁不被覆盖。 预先在每个唇部的基部和外壁的外壁上进行用于获得具有表面不规则的梨形表面的表面的压花，使得表面的光泽和颜色接近于 表面处理层。
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公开(公告)号：US06490833B1
公开(公告)日：2002-12-10
申请号：US09471341
申请日：1999-12-23
申请人： Teruhito Goto , Kazuyuki Hayashi , Akira Matsuura , Yasuo Oyama , Kotaro Oami
发明人： Teruhito Goto , Kazuyuki Hayashi , Akira Matsuura , Yasuo Oyama , Kotaro Oami
IPC分类号： E04C507
摘要： A weather strip is attached to the periphery of an organic glass plate. The organic glass plate is supported by a slide panel. A space is defined between the weather strip and an end face of the periphery of the organic glass plate. The space accommodates thermal expansion of the organic glass plate. A tube is located at a corner of the weather strip. Foreign matter trapped in the space moves from the space to the tube and then is discharged from the space.
摘要翻译： 防风条附着在有机玻璃板的周边。 有机玻璃板由滑动面板支撑。 在耐候条和有机玻璃板的周边的端面之间限定空间。 该空间容纳有机玻璃板的热膨胀。 管子位于天气条的一角。 被困在空间中的异物从空间移动到管中，然后从空间排出。
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公开(公告)号：US5148908A
公开(公告)日：1992-09-22
申请号：US760390
申请日：1991-09-16
CPC分类号： B65G25/02 , H05K13/0061 , Y10S188/01
摘要： A lead frame conveying apparatus comprises a driving force converting unit for transmitting to a frame receiving arm a horizontal reciprocating linear motion of an elliptic motion of a timing belt placed over two timing pulleys between the centers of the timing pulleys and converting semicircular motions at both ends of the horizontal reciprocating linear motion into vertical reciprocating linear motions by employing rolling contact for absorbing the horizontal component thereof and transmitting the vertical reciprocating linear motion to the frame receiving arm so as to put the frame receiving arm into a rectangular motion. The apparatus thus requires only one induction motor as a driving device.
摘要翻译： 引线框架输送装置包括：驱动力转换单元，用于将定位带的中心之间的两个定时皮带轮上的同步带的椭圆运动的水平往复直线运动传送到框架接收臂，并在两端转换半圆形运动 通过使用用于吸收其水平分量的滚动接触并将垂直往复直线运动传递到框架接收臂以将框架接收臂放置成矩形运动，将水平往复直线运动转换成垂直往复线性运动。 因此，该装置仅需要一个感应电动机作为驱动装置。
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公开(公告)号：US4938834A
公开(公告)日：1990-07-03
申请号：US305024
申请日：1989-02-02
CPC分类号： H01L21/67144 , H01L2224/78703 , Y10T29/49144
摘要： An apparatus for preventing the oxidation of a lead frame in a bonding system. The apparatus has a first introducing device for introducing a first atmospheric gas toward a bonding portion of the lead frame and a second introducing device for introducing a second atmospheric gas to shield the bonding portion from contact with ambient air simultaneously with the introduction of the first atmospheric gas.
摘要翻译： 一种用于防止接合系统中引线框架氧化的装置。 该装置具有第一引入装置，用于向引线框架的接合部分引入第一气氛气体;以及第二引入装置，用于引入第二气体气体，以在引入第一大气的同时，使接合部分与环境空气接触; 加油站。
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