Aqueous developer solution having hydroxy-alkyl piperidine for
positive-working photoresists
    165.
    再颁专利
    Aqueous developer solution having hydroxy-alkyl piperidine for positive-working photoresists 失效
    具有用于正性光刻胶的羟基 - 烷基哌啶的水性显影剂溶液

    公开(公告)号:USRE35217E

    公开(公告)日:1996-04-23

    申请号:US240166

    申请日:1994-05-09

    CPC classification number: G03F7/322

    Abstract: An aqueous developer solution contains, as a water-soluble basic compound, a compound of the general formula (I) ##STR1## where R.sup.1 to R.sup.5 are identical or different and are each H, OH, hydroxyalkyl, alkoxy or alkyl.It is suitable for developing positive-working photoresists.

    Abstract translation: 水性显影剂溶液含有通式(I)的化合物,其中R 1至R 5相同或不同,各自为H,OH,羟基烷基,烷氧基或烷基。 适合开发正性光刻胶。

    Radiation-sensitive polymer having acid labile groups and onium salt
groups
    166.
    发明授权
    Radiation-sensitive polymer having acid labile groups and onium salt groups 失效
    具有酸不稳定基团和鎓盐基团的辐射敏感聚合物

    公开(公告)号:US5260410A

    公开(公告)日:1993-11-09

    申请号:US844977

    申请日:1992-03-02

    Inventor: Reinhold Schwalm

    CPC classification number: G03F7/039

    Abstract: Radiation-sensitive polymers contain, in the polymer main chain, both acid-labile groups and onium salt groups with nonnucleophilic counterions and are suitable for the production of semiconductor structural elements.

    Abstract translation: 辐射敏感性聚合物在聚合物主链中含有具有非亲核抗衡离子的酸不稳定基团和鎓盐基团,并且适用于半导体结构元素的生产。

    Sulfonium salts and use thereof
    167.
    发明授权
    Sulfonium salts and use thereof 失效
    SULFONIUM SALTS及其使用

    公开(公告)号:US5159088A

    公开(公告)日:1992-10-27

    申请号:US551779

    申请日:1990-07-12

    Inventor: Reinhold Schwalm

    CPC classification number: C07C381/12 C08F2/50 G03F7/029

    Abstract: Novel sulfonium salts suitable for use as photoinitiators for cationic polymerization and for photoresists have the general formula (I) ##STR1## where X is 1, 2 or 3,R is a hydrocarbon radicalR.sup.1 is hydrogen, alkyl, alkoxy, halogen or nitro,R.sup.2 is a monovalent radical containing more than 6 carbon atoms,Y is a single bond or a bridge member andA.sup..crclbar. is a non-nucleophilic counterion.

    Abstract translation: 适用于阳离子聚合的光引发剂和光致抗蚀剂的新型锍​​盐具有通式(I)其中X为1,2或3,R为烃基,R 1为氢,烷基,烷氧基,卤素 或硝基,R 2是含有多于6个碳原子的一价基团,Y是单键或桥连构件,A( - )是非亲核反离子。

    Radiation sensitive mixture and production of relief patterns
    169.
    发明授权
    Radiation sensitive mixture and production of relief patterns 失效
    辐射敏感性混合物和放射性物质的生产

    公开(公告)号:US5069998A

    公开(公告)日:1991-12-03

    申请号:US352419

    申请日:1989-05-16

    CPC classification number: G03F7/0045 Y10S430/111 Y10S430/122

    Abstract: A radiation sensitive mixture useful for producing relief patterns contains(a) a polymeric binder which is insoluble in water but soluble in aqueous alkaline solutions and(b) an organic compound whose solubility in an aqueous alkaline developer is increased by the action of acid and which contains at least one acid cleavable group and additionally a group which forms a strong acid on irradiation, and in addition(c) a nonphotosensitive organic compound which contains at least one acid cleavable bond and the solubility of which in an aqueous alkaline developer is increased by the action of acid, or(d) a nonphotosensitive organic compound which contains at least one acid cleavable bond and which by the action of acid decomposes in such a way as to be completely removable by treatment at from 60.degree. to 120.degree. C.

    Abstract translation: 用于产生浮雕图案的辐射敏感混合物包含(a)不溶于水但可溶于碱性水溶液的聚合物粘合剂,和(b)其在碱性显影液中的溶解度通过酸的作用而增加的有机化合物, 含有至少一个酸可裂解基团,另外是在照射时形成强酸的基团,另外(c)含有至少一个酸可裂解键的非光敏有机化合物,其在碱性显影液中的溶解度增加 酸的作用,或(d)含有至少一个酸可分解键的非光敏有机化合物,其通过酸分解的作用可以通过在60℃至120℃下处理而完全除去。

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