MIM capacitor with adjustable capacitance via electronic fuses

    公开(公告)号:US11631614B2

    公开(公告)日:2023-04-18

    申请号:US17536464

    申请日:2021-11-29

    Abstract: Certain aspects of the present disclosure are generally directed to techniques and apparatus for adjusting capacitance in one or more metal-insulator-metal (MIM) capacitors in an effort to reduce capacitance variation between semiconductor devices and improve yield during fabrication. One example method for fabricating a semiconductor device generally includes measuring a capacitance value of a MIM capacitor of the semiconductor device, determining the measured capacitance value of the MIM capacitor is above a target capacitance value for the MIM capacitor, and selectively rupturing a set of connections in the MIM capacitor based on the measured capacitance value. Selectively rupturing the set of connections in the MIM capacitor may reduce the capacitance value of the MIM capacitor to a value approximately that of the target capacitance value.

    RADIO-FREQUENCY INTEGRATED CIRCUITS (RFICS) INCLUDING A POROSIFIED SEMICONDUCTOR ISOLATION REGION TO REDUCE NOISE INTERFERENCE AND RELATED FABRICATION METHODS

    公开(公告)号:US20230088569A1

    公开(公告)日:2023-03-23

    申请号:US17482733

    申请日:2021-09-23

    Abstract: Radio frequency (RF) circuits generate noise that can interfere with other RF circuits on the same semiconductor die. An isolation material disposed in an isolation region between a first active region of a first RF circuit and a second active region of a second RF circuit comprises a porosified region of the semiconductor material of the semiconductor die. The isolation material (e.g., porosified material) has a higher resistivity and lower permittivity than the semiconductor material to reduce transmission of noise interference between the first RF circuit and the second RF circuit. The isolation material in the isolation region of the semiconductor material comprises a porosity in the range 20% to 50% higher than the porosity of the semiconductor material in the first and second active regions. The porosified region has a lower permittivity and a higher resistivity than the non-porosified region to protect against the transmission of noise interference.

    Three-dimensional (3D) integrated circuit with passive elements formed by hybrid bonding

    公开(公告)号:US11605620B2

    公开(公告)日:2023-03-14

    申请号:US16906509

    申请日:2020-06-19

    Abstract: A three-dimensional integrated circuit (3DIC) and techniques for fabricating a 3DIC. An example semiconductor device generally includes an integrated circuit (IC) having a first plurality of pads coupled to components of the IC, wherein a first oxide material is disposed between the first plurality of pads, and a second plurality of pads, wherein at least a portion of the first plurality of pads is bonded to at least a portion of the second plurality of pads, and wherein a second oxide material is disposed between the second plurality of pads and is bonded to the first oxide material b. The semiconductor device may also include a substrate disposed above the second plurality of pads, one or more passive devices adjacent to the substrate, and one or more vias formed through the substrate, wherein at least one of the second plurality of pads is coupled to the one or more vias.

    SURFACE ACOUSTIC WAVE (SAW) FILTER PACKAGES EMPLOYING AN ENHANCED THERMALLY CONDUCTIVE CAVITY FRAME FOR HEAT DISSIPATION, AND RELATED FABRICATION METHODS

    公开(公告)号:US20230054636A1

    公开(公告)日:2023-02-23

    申请号:US17409282

    申请日:2021-08-23

    Abstract: Surface acoustic wave (SAW) filter packages employing an enhanced thermally conductive cavity frame for heat dissipation, and related fabrication methods are disclosed. The SAW filter package also includes a cavity frame comprising a perimeter structure and a cavity inside the perimeter structure coupled to a substrate of a piezoelectric material that contains interdigital transducers (IDTs). A cap substrate is disposed on the perimeter structure of the cavity frame to enclose an air cavity inside the perimeter structure between a substrate and the cap substrate. In exemplary aspects, to effectively dissipate heat generated in the SAW filter package to maintain the desired performance of the SAW filter, the cavity frame is comprised of a material that has an enhanced thermal conductivity. The heat generated in the SAW filter package can more effectively be dissipated, particularly at edges and corners of the cavity frame where hot spots can particularly occur.

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