ANTENNA MODULE AS A RADIO-FREQUENCY (RF) INTEGRATED CIRCUIT (IC) DIE WITH AN INTEGRATED ANTENNA SUBSTRATE, AND RELATED FABRICATION METHODS

    公开(公告)号:US20240347913A1

    公开(公告)日:2024-10-17

    申请号:US18300067

    申请日:2023-04-13

    IPC分类号: H01Q9/04 H01Q1/22

    CPC分类号: H01Q9/0407 H01Q1/2283

    摘要: An antenna module as a radio-frequency (RF) integrated circuit (IC) semiconductor die (“die”) with an integrated antenna substrate. The die with the integrated antenna substrate can be provided as part of a single IC chip that is fabricated as part of a wafer-level fabrication process as an example. The antenna elements are formed in one more antenna layers as part of an antenna substrate. The antenna layers may be formed as re-distribution layers (RDLs) for example to support smaller line-spacing (LS) and/or smaller pitched metal interconnects for forming and interconnecting to smaller wavelength antenna elements for supporting higher frequency communications. The antenna substrate is formed on a semiconductor wafer of an IC as part of the die. In this manner, the antenna layers can be formed as part of a wafer-level fabrication process used to form the die to form the antenna layers.

    VARYING THICKNESS INDUCTOR
    6.
    发明申请
    VARYING THICKNESS INDUCTOR 有权
    变化厚度电感器

    公开(公告)号:US20150061813A1

    公开(公告)日:2015-03-05

    申请号:US14155244

    申请日:2014-01-14

    IPC分类号: H01F27/28 H01F41/04

    摘要: A particular device includes a substrate and a spiral inductor coupled to the substrate. The spiral inductor includes a first conductive spiral and a second conductive spiral overlaying the first conductive spiral. A first portion of an innermost turn of the spiral inductor has a first thickness in a direction perpendicular to the substrate. The first portion of the innermost turn includes a first portion of the first conductive spiral and does not include the second conductive spiral. A second portion of the innermost turn includes a first portion of the second conductive spiral. A portion of an outermost turn of the spiral inductor has a second thickness in the direction perpendicular to the substrate that is greater than the first thickness. A portion of the outermost turn includes a second portion of the first conductive spiral and a second portion of the second conductive spiral.

    摘要翻译: 特定器件包括衬底和耦合到衬底的螺旋电感器。 螺旋电感器包括覆盖第一导电螺旋的第一导电螺旋和第二导电螺旋。 螺旋电感器的最内圈的第一部分在垂直于衬底的方向上具有第一厚度。 最内圈的第一部分包括第一导电螺旋的第一部分,并且不包括第二导电螺旋。 最内圈的第二部分包括第二导电螺旋的第一部分。 螺旋电感器的最外圈的一部分在垂直于衬底的方向上具有大于第一厚度的第二厚度。 最外圈的一部分包括第一导电螺旋的第二部分和第二导电螺旋的第二部分。

    MEMS varactors
    7.
    发明授权
    MEMS varactors 有权
    MEMS变容二极管

    公开(公告)号:US08922974B2

    公开(公告)日:2014-12-30

    申请号:US13751977

    申请日:2013-01-28

    IPC分类号: H01G7/00 H01G7/06 H01P1/12

    摘要: Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

    摘要翻译: 描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。 在一个示例性设计中,可调谐MEMS谐振器包括(i)具有空腔和柱的第一部分和(ii)与第一部分配合并且包括位于柱下方的可移动层的第二部分。 每个部分可以在面向另一部分的表面上被金属层覆盖。 可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。 空腔可以具有矩形或圆形形状,并且可以是空的或者用电介质材料填充。 柱可以位于腔的中间。 可移动板可以经由锚固件附接到第二部件(i)并作为悬臂操作,或者(ii)经由两个锚定件并作为桥梁操作。

    Antenna on glass with air cavity structure

    公开(公告)号:US11594804B2

    公开(公告)日:2023-02-28

    申请号:US16910025

    申请日:2020-06-23

    IPC分类号: H01Q13/18 H01Q1/12 H01Q23/00

    摘要: Disclosed is an antenna on glass (AOG) device having an air cavity at least partially formed in a photosensitive glass substrate. An air cavity structure is at least partially encloses the air cavity and wherein the air cavity structure at least partially formed from the photosensitive glass substrate. An antenna is formed from portion of a top conductive layer disposed on a top surface of the air cavity structure and at least partially overlapping the air cavity. A metallization structure is provided having a bottom conductive layer disposed on a bottom surface of the air cavity structure, wherein the bottom conductive layer is electrically coupled to the top metal layer by a conductive pillar disposed through the photosensitive glass substrate. In addition, the AOG device may integrate one or more MIM capacitors and/or inductors that allow for RF filtering and impedance matching.